METHOD AND SYSTEM FOR BONDING HIGH FLUENCE OPTICS TO OPTOMECHANICAL ASSEMBLIES

    公开(公告)号:US20240360023A1

    公开(公告)日:2024-10-31

    申请号:US18594991

    申请日:2024-03-04

    申请人: KLA Corporation

    IPC分类号: C03B29/16 G02B7/00 G03F7/00

    摘要: A method for binding a first optical element to a substrate is disclosed. The method may include receiving a first optical element and a substrate. The method may include positioning an indium foil between the first optical element and the substrate. The method may include securing the first optical element to the substrate to produce a pre-bonded assembly, wherein the indium foil is disposed between the first optical element and the substrate. The method may include heating the pre-bonded assembly above a melting temperature of the indium foil. The method may include cooling the pre-bonded assembly. The method may include releasing the pre-bonded assembly, wherein releasing the pre-bonded assembly releases a bonded structure.

    Latch improvement for overhead frame corners

    公开(公告)号:US12085121B1

    公开(公告)日:2024-09-10

    申请号:US18209449

    申请日:2023-06-13

    申请人: Tony J. Ballew

    发明人: Tony J. Ballew

    IPC分类号: F16B7/22 F16B45/04 G02B7/00

    摘要: Improved latches for overhead corners which reduce the susceptibility of bundled frame components becoming unlatched and separated due to insufficient torque of latch knobs or to repeated shock. The improved latches retain the prior art notched latches along with their strength and simplicity, but are capable of absorbing shock by accommodating a rotational dynamic present in a latch-to-strike connection rather than attempting to prevent it. One of two styles of moveable, pressure-actuated latch keepers is joined to a notched latch of an overhead frame. One style of keeper provides a barrier into the latch's notch, while another style of keeper provides a barrier relative to the strike's features. The latch keepers provide a predetermined amount of resistance to a radial force applied to the latch. This force retains the strike into the latch's notch in a fully-seated orientation, yet allows for the beneficial shock-absorbing rotational movement of the latch to the strike. This use of pressure-actuated keepers eliminates the need for the prior art latch knob and thus also eliminates the subjectivity associated with determining the proper degree of torque required to sufficiently secure the latch to the strike under a range of conditions.

    POSITION DETECTION DEVICE
    4.
    发明公开

    公开(公告)号:US20240210213A1

    公开(公告)日:2024-06-27

    申请号:US18597013

    申请日:2024-03-06

    申请人: TDK CORPORATION

    摘要: A position detection device includes a first position detector, a second position detector, and a signal generator. The first position detector includes a first magnetic field generation unit, a second magnetic field generation unit, and a first magnetic sensor. The second position detector includes a third magnetic field generation unit, a fourth magnetic field generation unit, and a second magnetic sensor. The positions of the second and fourth magnetic field generation units vary in response to variations in a detection-target position. The signal generator generates a position detection signal, which is the sum of a first detection signal generated by the first magnetic sensor and a second detection signal generated by the second magnetic sensor. Each of the first and second position detectors includes a bias magnetic field generation unit.

    METHOD AND APPARATUS FOR MOUNTING OPTICAL COMPONENTS

    公开(公告)号:US20230341646A1

    公开(公告)日:2023-10-26

    申请号:US18313086

    申请日:2023-05-05

    摘要: A method and apparatus for mounting optical components is described. The apparatus is suitable for mounting multiple optical components and comprises a baseplate having opposing first and second surfaces. Recesses or apertures are formed within the baseplate and are located upon the first or second surfaces so as to define thermally activated optic mounting areas. Pillars are then located within the thermally activated optic mounting areas and these provide a means for attaching the optical component to the baseplate. The employment of the recesses or apertures act to significantly reduce the thermal conduction throughout the baseplate. As a result preferential heating can be provided to the one or more thermally activated optic mounting areas while maintaining the baseplate with a desired mechanical strength. The optical mounting apparatus exhibits a high thermal stability thus making the apparatus ideally suited for use within commercial optical system.

    OPTICAL SYSTEM, IN PARTICULAR LITHOGRAPHY SYSTEM

    公开(公告)号:US20230194994A1

    公开(公告)日:2023-06-22

    申请号:US18173461

    申请日:2023-02-23

    IPC分类号: G03F7/20 G02B7/00

    CPC分类号: G03F7/70233 G02B7/00

    摘要: An optical system, such as a lithography system, comprises: a plate-shaped component, such as a stop element; an optionally frame-shaped holder for holding the component; and a plurality of webs for connecting the plate-shaped component to the holder. The plate-shaped component is releasably connected to the preferably wire-shaped webs. The plate-shaped component is attached to a carrying structure. The webs are releasably connected to the carrying structure.

    Position detection device
    7.
    发明授权

    公开(公告)号:US11674822B2

    公开(公告)日:2023-06-13

    申请号:US16890284

    申请日:2020-06-02

    申请人: TDK CORPORATION

    摘要: A position detection device includes a first position detector, a second position detector, and a signal generator. The first position detector includes a first magnetic field generation unit, a second magnetic field generation unit, and a first magnetic sensor. The second position detector includes a third magnetic field generation unit, a fourth magnetic field generation unit, and a second magnetic sensor. The positions of the second and fourth magnetic field generation units vary in response to variations in a detection-target position. The signal generator generates a position detection signal, which is the sum of a first detection signal generated by the first magnetic sensor and a second detection signal generated by the second magnetic sensor. Each of the first and second position detectors includes a bias magnetic field generation unit.

    Diffuser assembly
    8.
    发明授权

    公开(公告)号:US11644793B2

    公开(公告)日:2023-05-09

    申请号:US16843544

    申请日:2020-04-08

    申请人: Dualitas Ltd.

    IPC分类号: G03H1/32 G02B5/02 G02B7/00

    摘要: There is described herein a diffuser assembly comprising a leaf spring, diffuser and at least one actuator. The leaf spring is arranged as a rectangular frame having a width, x, and height, y. The diffuser is suspended by the frame such as within the frame. The at least one actuator arranged to move, such as translate, the diffuser. The assembly is arranged such that the leaf spring provides in-plane (x-y plane) stiffness, kx and ky, less than the out-of-plane (z-direction) stiffness, kz.

    CAMERA MODULE PROVIDING OIS FUNCTION AND ELECTRONIC DEVICE COMPRISING THE SAME

    公开(公告)号:US20180180900A1

    公开(公告)日:2018-06-28

    申请号:US15857027

    申请日:2017-12-28

    IPC分类号: G02B27/64 G03B5/02

    摘要: A camera module providing an OIS function is disclosed and includes a camera device configured to rotate in a first direction perpendicular to an optical axis, a first rotation support configured to provide support so that the first direction becomes a central axis for rotating the camera device, and a flexible printed circuit board (FPCB) configured to connect the camera device and the first rotation support physically at two or more separate points. A cross sectional shape of the camera module in the direction of a center point of the central axis is configured so that line segments connecting the center point to the two or more separate points, and the cross sectional shape of the flexible printed circuit board form a closed loop, and at least one line segment connecting two random points in the closed loop passes outside of the closed loop.

    Optical code reader
    10.
    发明授权

    公开(公告)号:US09990522B2

    公开(公告)日:2018-06-05

    申请号:US15639577

    申请日:2017-06-30

    IPC分类号: G06K7/00 G06K7/10 G06K7/14

    摘要: An imager module for an optical code reader may include a camera comprising a lens system, and an actuator for moving the lens system operatively connected to the lens system for autofocus adjustment. The actuator for moving the lens system comprises a linear electric motor with a drive shaft, a position sensor device adapted to detect the position of the drive shaft within a predefined stroke length and a control device adapted to control the movement of the drive shaft. The control device and the position sensor device are integrated in a single PCB, the electric motor comprises a frame that supports the drive shaft, and the single PCB constitutes part of said frame. On optical code reader may include such an imager module.