公开(公告)号：US06647998B2

公开(公告)日：2003-11-18

申请号：US09885772

申请日：2001-06-20

申请人： Jih-Churng Twu ,  Ming-Dar Guo ,  Tsung-Chieh Tsai ,  Sheng-Hsiung Tseng ,  Wei-Ming You ,  Yao-Pin Huang ,  Chia-Chun Cheng ,  Chin-Hsiung Ho ,  Ming Te More

发明人： Jih-Churng Twu ,  Ming-Dar Guo ,  Tsung-Chieh Tsai ,  Sheng-Hsiung Tseng ,  Wei-Ming You ,  Yao-Pin Huang ,  Chia-Chun Cheng ,  Chin-Hsiung Ho ,  Ming Te More

IPC分类号： B08B310

CPC分类号： H01L21/67034 ,  Y10S134/902

摘要： An electrostatic charge-free solvent-type dryer for drying semiconductor wafers after a wet bench process is disclosed in a preferred embodiment and in an alternate embodiment. In the preferred embodiment, the electrostatic charge-free solvent-type dryer is constructed by a tank body, a wafer carrier, an elevator means, a tank cover and a conduit for feeding the flow of solvent vapor. At least one of the tank cover, the conduit for feeding the flow of solvent vapor and the plurality of partition plates is fabricated of a non-electrostatic material such that electrostatic charge is not generated in the flow of solvent vapor. In the alternate embodiment, a deionizer is further provided in the tank cavity for producing a flux of positive ions to neutralize any negative ions that are possibly produced in the flow of solvent vapor.

公开(公告)号：US20060021571A1

公开(公告)日：2006-02-02

申请号：US10901284

申请日：2004-07-28

申请人： Sheng-Hsiung Tseng ,  Yao-Pin Huang ,  Ming-Huang Wu ,  Chang-Jung Su ,  Stone Shyr ,  Yuan-Hung Chang ,  He-Ming Chuang

发明人： Sheng-Hsiung Tseng ,  Yao-Pin Huang ,  Ming-Huang Wu ,  Chang-Jung Su ,  Stone Shyr ,  Yuan-Hung Chang ,  He-Ming Chuang

IPC分类号： C23C16/00

CPC分类号： C23C16/4412 ,  F16L53/35 ,  H01J37/32522 ,  H01J37/32834

摘要： A vacuum pump line for a process chamber is disclosed. The vacuum pump line includes a pump line wall and a heater layer comprising a nickel-chromium alloy surrounding the pump line wall for heating the pump line wall. A method for fabricating a pump line for a process chamber is also disclosed.

摘要翻译： 公开了一种用于处理室的真空泵管线。 真空泵管线包括泵管壁和包括围绕泵管壁的镍 - 铬合金的加热器层，用于加热泵管壁。 还公开了一种用于制造处理室的泵管线的方法。