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公开(公告)号：US07319912B2
公开(公告)日：2008-01-15
申请号：US11431028
申请日：2006-05-10
申请人： Jin-Woo Park , Hong-Jin Park , Hyoung-Min Park , Young-Hak Hwang , Yong-Bum Park
发明人： Jin-Woo Park , Hong-Jin Park , Hyoung-Min Park , Young-Hak Hwang , Yong-Bum Park
CPC分类号： G05B19/4183 , G05B19/41855 , G05B2219/31095 , G05B2219/31162 , G05B2219/31281 , G05B2219/31286 , G05B2219/33199 , G05B2219/45031 , G06K2017/0045 , G06Q10/08 , G06Q50/04 , Y02P90/10 , Y02P90/185 , Y02P90/28 , Y02P90/30
摘要： A management system for semiconductor manufacturing equipment in a manufacturing facility is provided. The system includes a host computer communicating with a tracking server, the tracking server communicating with a wireless network adapted to communicate with a radio tag associated with a wafer cassette. The tracking server is adapted to receive status information from the radio tag via the wireless network, to derive location or movement information for the wafer cassette from the status information, and to determining an optimal transfer path for the wafer cassette through the manufacturing facility.
摘要翻译： 提供了一种制造设备中的半导体制造设备的管理系统。 该系统包括与跟踪服务器通信的主机，跟踪服务器与适于与与晶片盒相关联的无线电标签通信的无线网络通信。 跟踪服务器适于经由无线网络从无线电标签接收状态信息，从状态信息导出晶片盒的位置或移动信息，以及通过制造设备确定晶片盒的最佳传送路径。
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公开(公告)号：US20070090953A1
公开(公告)日：2007-04-26
申请号：US11431028
申请日：2006-05-10
申请人： Jin-Woo Park , Hong-Jin Park , Hyoung-Min Park , Young-Hak Hwang , Yong-Bum Park
发明人： Jin-Woo Park , Hong-Jin Park , Hyoung-Min Park , Young-Hak Hwang , Yong-Bum Park
CPC分类号： G05B19/4183 , G05B19/41855 , G05B2219/31095 , G05B2219/31162 , G05B2219/31281 , G05B2219/31286 , G05B2219/33199 , G05B2219/45031 , G06K2017/0045 , G06Q10/08 , G06Q50/04 , Y02P90/10 , Y02P90/185 , Y02P90/28 , Y02P90/30
摘要： A management system for semiconductor manufacturing equipment in a manufacturing facility is provided. The system includes a host computer communicating with a tracking server, the tracking server communicating with a wireless network adapted to communicate with a radio tag associated with a wafer cassette. The tracking server is adapted to receive status information from the radio tag via the wireless network, to derive location or movement information for the wafer cassette from the status information, and to determining an optimal transfer path for the wafer cassette through the manufacturing facility.
摘要翻译： 提供了一种制造设备中的半导体制造设备的管理系统。 该系统包括与跟踪服务器通信的主机，跟踪服务器与适于与与晶片盒相关联的无线电标签通信的无线网络通信。 跟踪服务器适于经由无线网络从无线电标签接收状态信息，从状态信息导出晶片盒的位置或移动信息，以及通过制造设备确定晶片盒的最佳传送路径。
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