摘要:
The occurrence of defects of a semiconductor device at the time of transportation is prevented by the present invention relates to a transportation method for a semiconductor device which uses, for transportation of a semiconductor device from the departure point to the arrival point, the transportation route B1nullB2 wherein the cosmic ray concentration is the smallest among a plurality of transportation routes A and B1nullB2 from the departure point to the arrival point. In addition, the invention also relates to a transportation route selection method for a semiconductor device comprising the step of inputting a departure point and an arrival point for the transportation for a semiconductor device, the step of calculating a plurality of transportation routes A and B1nullB2 from the departure point to the arrival point, the step of calculating the cosmic ray concentration in each of the plurality of transportation routes A and B1nullB2 and the step of selecting the transportation route wherein the cosmic ray concentration is the smallest among the plurality of transportation routes A and B1nullB2.
摘要:
The control of second to fourth paths (slave paths) is performed with reference to various settings and the sequence of the first path (master path), instead of various settings and sequences of the second to fourth paths, thus, control of all path groups is centralized by the sequence of the first path.
摘要:
A management system for semiconductor manufacturing equipment in a manufacturing facility is provided. The system includes a host computer communicating with a tracking server, the tracking server communicating with a wireless network adapted to communicate with a radio tag associated with a wafer cassette. The tracking server is adapted to receive status information from the radio tag via the wireless network, to derive location or movement information for the wafer cassette from the status information, and to determining an optimal transfer path for the wafer cassette through the manufacturing facility.
摘要:
A management system for semiconductor manufacturing equipment in a manufacturing facility is provided. The system includes a host computer communicating with a tracking server, the tracking server communicating with a wireless network adapted to communicate with a radio tag associated with a wafer cassette. The tracking server is adapted to receive status information from the radio tag via the wireless network, to derive location or movement information for the wafer cassette from the status information, and to determining an optimal transfer path for the wafer cassette through the manufacturing facility.
摘要:
Various embodiments are directed to operator workstations that improve efficiency of handling operations at an object handling environment. In one aspect, an operator workstation for handling a plurality of objects is provided. The operator workstation includes a workbench platform having a configurable number of sub-platforms upon which objects can be disposed. The operator workstation further includes a plurality of sensors configured to collect sensor data for detection of object presences and object states of objects disposed upon the workbench platform. The operator workstation further includes a plurality of equipment configured to control movement of objects disposed upon the workbench platform. In various embodiments, different subsets of the sensors and equipment are configured for network communication via different network services provided by a wireless network. For instance, network communication may be provided to different sensors and equipment via different network slices of a 5th generation new radio (5G) cellular network.
摘要:
The control of second to fourth paths (slave paths) is performed with reference to various settings and the sequence of the first path (master path), instead of various settings and sequences of the second to fourth paths, thus, control of all path groups is centralized by the sequence of the first path.
摘要:
A method for determining parking assignments for material handling vehicles in a manufacturing system is provided. The manufacturing system is operable to perform fabrication processes on a plurality of loads. The method includes identifying at least one idle material handling vehicle. A first cost factor associated with expected transit times for the at least one idle material handling vehicle to available parking locations in the manufacturing system is determined. A second cost factor based on a number of loads available to be serviced by the at least one idle material handling vehicle in the parking locations and relative priorities assigned to the loads is determined. A parking location for the at least one idle material handling vehicles is determined based on the first and second cost factors. A parking request is issued to the at least one idle material handling vehicle based on the determined parking locations.
摘要:
Systems and methods are disclosed which reduce the occurrence of defects in semiconductor devices by selecting transportation routes for the semiconductor devices which reduce or minimize the amount of cosmic ray radiation to which the semiconductor devices are subjected during transportation. Cosmic radiation exposure is determined for a plurality of transportation routes and a route is selected which minimizes or reduces the radiation to which semiconductor devices are exposed during transportation.
摘要:
The present invention increases the productivity of an entire factory, even of the type that produces different types of products in different quantities using transport vehicles, by performing transport operation control. This transport operation control device is provided with: a spatial distribution measuring unit which measures the spatial distribution of products-in-process being transported by the transport vehicles; and an operation schedule calculation unit which, on the basis of the measured spatial distribution of the group of partly-finished products, calculates an operation schedule that specifies both a route and a frequency of a transport operation to be carried out by each transport vehicle of the transport vehicles, wherein the operation schedule calculation unit determines the timing with which to update the operation schedule, on the basis of changes in a productivity index that is determined from the measured spatial distribution of the products-in-process.
摘要:
A method for determining parking assignments for material handling vehicles in a manufacturing system is provided. The manufacturing system is operable to perform fabrication processes on a plurality of loads. The method includes identifying at least one idle material handling vehicle. A first cost factor associated with expected transit times for the at least one idle material handling vehicle to available parking locations in the manufacturing system is determined. A second cost factor based on a number of loads available to be serviced by the at least one idle material handling vehicle in the parking locations and relative priorities assigned to the loads is determined. A parking location for the at least one idle material handling vehicles is determined based on the first and second cost factors. A parking request is issued to the at least one idle material handling vehicle based on the determined parking locations.