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公开(公告)号：US20110020187A1
公开(公告)日：2011-01-27
申请号：US12921305
申请日：2008-03-06
申请人： Jiro Hiraiwa , Hitoshi Takebayashi , Osamu Yoshimoto , Noriyuki Tanaka , Ichiro Fujita , Hiroyoshi Sasaki , Kazutaka Mori
发明人： Jiro Hiraiwa , Hitoshi Takebayashi , Osamu Yoshimoto , Noriyuki Tanaka , Ichiro Fujita , Hiroyoshi Sasaki , Kazutaka Mori
CPC分类号： H01L21/6719 , B01J4/008 , H01L21/67017 , H01L21/67109
摘要： A surface treatment apparatus 100 includes a diluent gas supplier 1, a fluorine gas supplier 2, a mixer 5 which mixes a diluent gas with a fluorine gas, and a reactor 6 which treats a treatment target by using a mixed gas generated by the mixer 5. A diluent gas supplied from a diluent gas supplier is heated by a heater 8, and the heated diluent gas is mixed with a fluorine gas supplied from a fluorine gas supplier, in the mixer 5. The mixed gas is supplied to the reactor 6. The gas in the reactor 6 is supplied from the reactor 6 to flow paths 219, 220, 221, and 222 by an exhauster 207. The valves 223, 224, 225, and 226 are serially opened, so that the gas in the reactor 6 is supplied to a harm removal apparatus 208 while the gas flow rate is being adjusted by the flow paths 219, 220, 221, and 222.
摘要翻译： 表面处理装置100包括稀释气体供给体1，氟气供给体2，将稀释气体与氟气混合的混合器5以及通过使用由混合器5产生的混合气体来处理处理对象物的反应器6 从稀释气体供给装置供给的稀释气体由加热器8加热，加热后的稀释气体与从氟气供给体供给的氟气混合在混合器5中。混合气体供给反应器6。 反应器6中的气体通过排气器207从反应器6供应到流动路径219,220,221和222.阀223,224,225和226串联打开，使得反应器6中的气体 在通过流路219,220,221和222调节气体流量的同时，供给到危害消除装置208。
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公开(公告)号：US08038852B2
公开(公告)日：2011-10-18
申请号：US10447237
申请日：2003-05-29
申请人： Tetsuro Tojo , Jiro Hiraiwa , Osamu Yoshimoto , Hitoshi Takebayashi , Yoshitomi Tada , Udai Tanaka
发明人： Tetsuro Tojo , Jiro Hiraiwa , Osamu Yoshimoto , Hitoshi Takebayashi , Yoshitomi Tada , Udai Tanaka
摘要： A fluorine gas generator for generating highly pure fluorine gas in a stable and safe manner by electrolyzing an electrolytic bath 2 comprising hydrogen fluoride in the form of a molten mixed gas is provided which comprises an electrolytic cell 1 divided, by a partition wall 16, into an anode chamber 3 in which an anode is disposed and a cathode chamber 4 in which a cathode is disposed, pressure maintenance means for maintaining the anode chamber 3 and cathode chamber 4 at atmospheric pressure, and liquid level sensing means 5, 6 capable of sensing the levels of the electrolytic bath 2 in the anode chamber 3 and in the cathode chamber 4, respectively, at three or more level stages.
摘要翻译： 提供一种用于通过电解包含熔融混合气体形式的氟化氢的电解槽2以稳定和安全的方式产生高纯度氟气的氟气发生器，其包括通过分隔壁16分成的电解池1 设有阳极的阳极室3和设置有阴极的阴极室4，用于将阳极室3和阴极室4维持在大气压的压力维持装置以及能够感测的液位检测装置5,6 阳极室3和阴极室4中的电解槽2的水平分别处于三级或更多级。
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公开(公告)号：US07556678B2
公开(公告)日：2009-07-07
申请号：US11003867
申请日：2004-12-06
摘要： A gas generator is provided in which the filter life is prolonged and the pressure regulating valve is thereby protected for a prolonged periods. The gas generator is intended for electrolyzing an electrolyte in an electrolytic cell to generate a gas or gases and comprises at least one absorber for absorbing an unnecessary by-products generated from the gas generator, a filter for removing the mist generated from the absorber, and at least one pressure regulating valve for adjusting the pressure in the electrolytic cell, wherein the filter is inserted downstream from the absorber and, further, the pressure regulating valve is disposed downstream from the filter.
摘要翻译： 提供了一种气体发生器，其中过滤器寿命延长，并且压力调节阀由此被长时间保护。 气体发生器用于电解电解池中的电解液以产生气体或气体，并且包括至少一个用于吸收由气体发生器产生的不必要副产物的吸收器，用于去除由吸收器产生的雾的过滤器，以及 用于调节电解槽中的压力的至少一个压力调节阀，其中过滤器被从吸收器的下游插入，此外，压力调节阀设置在过滤器的下游。
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公开(公告)号：US20050132882A1
公开(公告)日：2005-06-23
申请号：US11003867
申请日：2004-12-06
IPC分类号： C25B9/00 , C25B1/24 , C25B15/02 , C25B15/08 , F25B27/00 , B01D53/02 , B01D59/26 , F25B15/00 , F25B17/00
摘要： A gas generator is provided in which the filter life is prolonged and the pressure regulating valve is thereby protected for a prolonged periods. The gas generator is intended for electrolyzing an electrolyte in an electrolytic cell to generate a gas or gases and comprises at least one absorber for absorbing an unnecessary by-products generated from the gas generator, a filter for removing the mist generated from the absorber, and at least one pressure regulating valve for adjusting the pressure in the electrolytic cell, wherein the filter is inserted downstream from the absorber and, further, the pressure regulating valve is disposed downstream from the filter.
摘要翻译： 提供了一种气体发生器，其中过滤器寿命延长，并且压力调节阀由此被长时间保护。 气体发生器用于电解电解池中的电解液以产生气体或气体，并且包括至少一个用于吸收由气体发生器产生的不必要副产物的吸收器，用于去除由吸收器产生的雾的过滤器，以及 用于调节电解槽中的压力的至少一个压力调节阀，其中过滤器被从吸收器的下游插入，此外，压力调节阀设置在过滤器的下游。
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公开(公告)号：US08366886B2
公开(公告)日：2013-02-05
申请号：US12064704
申请日：2006-06-28
摘要： A fluorine/fluoride gas generator which has an electrolyte made of mixed molten salt containing hydrogen fluoride in an electrolytic cell including an anode chamber and a cathode chamber, and generates a gas containing fluorine by electrolyzing the electrolyte, includes a raw material supply pipe for supplying an electrolysis raw material, reaching the inside of the electrolyte in the electrolytic cell, a normally-closed valve provided in the middle of the raw material supply pipe, and a bypass pipe provided with a normally-open valve, joining the raw material supply pipe on the downstream side from the normally-closed valve to a gas phase area of the electrolytic cell. Accordingly, the electrolyte is prevented from being suctioned into the raw material supply pipe in the fluorine/fluoride gas generator, and solidification of the electrolyte inside the raw material supply pipe can be prevented.
摘要翻译： 一种氟/氟化物气体发生器，其具有由包含阳极室和阴极室的电解池中含有氟化氢的混合熔融盐形成的电解质，并且通过电解电解产生含氟气体的氟/氟化物气体发生器包括：供给源 电解原料，到达电解槽中的电解质的内部，设置在原料供给管的中间的常闭阀，以及设有常开阀的旁通管，将原料供给管 在常闭阀的下游侧到电解池的气相区域。 因此，防止电解液被吸入到氟/氟化物气体发生器中的原料供给管中，并且可以防止原料供给管内的电解质的凝固。
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公开(公告)号：US20090260981A1
公开(公告)日：2009-10-22
申请号：US12064704
申请日：2006-06-28
IPC分类号： C25B9/00
摘要： A fluorine/fluoride gas generator which has an electrolyte made of mixed molten salt containing hydrogen fluoride in an electrolytic cell including an anode chamber and a cathode chamber, and generates a gas containing fluorine by electrolyzing the electrolyte, includes a raw material supply pipe for supplying an electrolysis raw material, reaching the inside of the electrolyte in the electrolytic cell, a normally-closed valve provided in the middle of the raw material supply pipe, and a bypass pipe provided with a normally-open valve, joining the raw material supply pipe on the downstream side from the normally-closed valve to a gas phase area of the electrolytic cell. Accordingly, the electrolyte is prevented from being suctioned into the raw material supply pipe in the fluorine/fluoride gas generator, and solidification of the electrolyte inside the raw material supply pipe can be prevented.
摘要翻译： 一种氟/氟化物气体发生器，其具有由包含阳极室和阴极室的电解池中含有氟化氢的混合熔融盐形成的电解质，并且通过电解电解产生含氟气体的氟/氟化物气体发生器包括：供给源 电解原料，到达电解槽中的电解质的内部，设置在原料供给管的中间的常闭阀，以及设有常开阀的旁通管，将原料供给管 在常闭阀的下游侧到电解池的气相区域。 因此，防止电解液被吸入到氟/氟化物气体发生器中的原料供给管中，并且可以防止原料供给管内的电解质的凝固。
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公开(公告)号：US08387559B2
公开(公告)日：2013-03-05
申请号：US12278407
申请日：2007-02-07
申请人： Jiro Hiraiwa , Osamu Yoshimoto , Hiroshi Hayakawa , Tetsuro Tojo , Tsuneyuki Okabe , Takanobu Asano , Shinichi Wada , Ken Nakao , Hitoshi Kato
发明人： Jiro Hiraiwa , Osamu Yoshimoto , Hiroshi Hayakawa , Tetsuro Tojo , Tsuneyuki Okabe , Takanobu Asano , Shinichi Wada , Ken Nakao , Hitoshi Kato
IPC分类号： C23C16/455 , C23C16/52 , C23F1/00 , H01L21/306 , C23C16/06 , C23C16/22
CPC分类号： F17D1/04 , C01B7/19 , F17C2250/032 , F17C2270/0518 , H01L21/67017 , H01L21/67276
摘要： Fluorine gas generators are connected with semiconductor manufacturing apparatuses through a gas supplying system including a storage tank that can store a predetermined quantity of fluorine gas generated in the on-site fluorine gas generators. When one or more of the on-site fluorine gas generators are stopped, fluorine gas is supplied to the semiconductor manufacturing apparatuses from the storage tank storing a predetermined quantity of fluorine gas, so as to keep the operations of the semiconductor manufacturing apparatuses. Thereby obtained is a semiconductor manufacturing plant in which fluorine gas generated in the fluorine gas generators can be safely and stably supplied to the semiconductor manufacturing apparatuses, and with superior cost performance.
摘要翻译： 氟气发生器通过包括存储在现场氟气发生器中产生的预定量的氟气的储罐的气体供给系统与半导体制造装置连接。 当一个或多个现场氟气发生器停止时，从储存预定量的氟气的储罐向半导体制造装置供应氟气，以保持半导体制造装置的操作。 由此，能够将在氟气发生器中产生的氟气安全稳定地供给到半导体制造装置，并具有优异的成本性能的半导体制造工厂。
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公开(公告)号：US20080128270A1
公开(公告)日：2008-06-05
申请号：US11972103
申请日：2008-01-10
申请人： Jiro HIRAIWA , Osamu Yoshimoto , Tetsuro Tojo
发明人： Jiro HIRAIWA , Osamu Yoshimoto , Tetsuro Tojo
IPC分类号： C25B9/00
摘要： An electrolytic apparatus for molten salt disposed on an electrolytic cell to electrolyze an electrolytic bath consisting of the mixed molten salt. The apparatus including a first heat exchanging means to heat and/or cool an electrolytic cell body. The apparatus including a support member comprising one of a flange part and an upper lid. The apparatus including a cover member. The apparatus including an electric insulating material and a gas sealing material disposed between the support member and the cover member for simultaneous electric insulation and gas sealing.
摘要翻译： 一种用于熔融盐的电解设备，其设置在电解槽上，以电解由所述混合熔融盐组成的电解槽。 该装置包括用于加热和/或冷却电解槽体的第一热交换装置。 该装置包括包括凸缘部分和上盖中的一个的支撑构件。 该装置包括盖构件。 该装置包括电绝缘材料和设置在支撑构件和盖构件之间的气体密封材料，用于同时电绝缘和气体密封。
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公开(公告)号：US20050011766A1
公开(公告)日：2005-01-20
申请号：US10879135
申请日：2004-06-30
申请人： Tetsuro Tojo , Jiro Hiraiwa , Osamu Yoshimoto
发明人： Tetsuro Tojo , Jiro Hiraiwa , Osamu Yoshimoto
摘要： An apparatus for controlling a molten salt electrolyzer in which an electrolytic bath in a solid form as contained in the electrolyzer is melted to automatically attain a state allowing electrolysis, which apparatus comprises detecting means for detecting the changes in state of the electrolyzer by means of detectors fitted to the electrolyzer, and adjusting means for adjusting, after using the detecting means, the liquid electrolytic bath levels to a state allowing electrolysis.
摘要翻译： 一种用于控制熔盐电解器的装置，其中包含在电解槽中的固体电解液熔化，以自动获得允许电解的状态，该装置包括用于通过检测器检测电解槽状态变化的检测装置 以及调节装置，用于在使用检测装置之后将液体电解槽液位调整到允许电解的状态。
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公开(公告)号：US20100064969A1
公开(公告)日：2010-03-18
申请号：US12278407
申请日：2007-02-07
申请人： Jiro Hiraiwa , Osamu Yoshimoto , Hiroshi Hayakawa , Tetsuro Tojo , Tsuneyuki Okabe , Takanobu Asano , Shinichi Wada , Ken Nakao , Hitoshi Kato
发明人： Jiro Hiraiwa , Osamu Yoshimoto , Hiroshi Hayakawa , Tetsuro Tojo , Tsuneyuki Okabe , Takanobu Asano , Shinichi Wada , Ken Nakao , Hitoshi Kato
IPC分类号： H01L21/46
CPC分类号： F17D1/04 , C01B7/19 , F17C2250/032 , F17C2270/0518 , H01L21/67017 , H01L21/67276
摘要： Fluorine gas generators are connected with semiconductor manufacturing apparatuses through a gas supplying system including a storage tank that can store a predetermined quantity of fluorine gas generated in the on-site fluorine gas generators. When one or more of the on-site fluorine gas generators are stopped, fluorine gas is supplied to the semiconductor manufacturing apparatuses from the storage tank storing a predetermined quantity of fluorine gas, so as to keep the operations of the semiconductor manufacturing apparatuses. Thereby obtained is a semiconductor manufacturing plant in which fluorine gas generated in the fluorine gas generators can be safely and stably supplied to the semiconductor manufacturing apparatuses, and with superior cost performance.
摘要翻译： 氟气发生器通过包括存储在现场氟气发生器中产生的预定量的氟气的储罐的气体供给系统与半导体制造装置连接。 当一个或多个现场氟气发生器停止时，从储存预定量的氟气的储罐向半导体制造装置供应氟气，以保持半导体制造装置的操作。 由此，能够将在氟气发生器中产生的氟气安全稳定地供给到半导体制造装置，并具有优异的成本性能的半导体制造工厂。
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