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公开(公告)号：US20120033279A1
公开(公告)日：2012-02-09
申请号：US13264530
申请日：2010-05-10
IPC分类号： G02B26/10
CPC分类号： G02B26/0833 , G02B27/01 , G02B27/017 , G02B2027/0147
摘要： An optical reflection element has a frame-shaped supporting body, a first oscillator and a second oscillator each having a meander shape, and a mirror portion. A line segment connecting a joining position between the mirror portion and the first oscillator to a joining position between the supporting body and the first oscillator, and a line segment connecting a joining position of the mirror portion and the second oscillator to a joining position of the supporting body and the second oscillator cross a mirror portion central axis. An outer circumference of at least any one of turn portions of the first oscillator and the second oscillator is deviated from a first end portion axis that is parallel to the mirror portion central axis and extends along a first side of the mirror portion. Alternatively, an outer circumference of at least any one of the turn portions of the first oscillator and the second oscillator is deviated from a second end portion axis T2 that is parallel to the mirror portion central axis and extends along a second side parallel to the first side of the mirror portion. At least any one of these two conditions is satisfied.
摘要翻译： 光反射元件具有框形支撑体，第一振荡器和第二振荡器，每个具有曲折形状和反射镜部分。 将反射镜部分和第一振荡器之间的接合位置连接到支撑体和第一振荡器之间的接合位置的线段，以及将镜部分和第二振荡器的接合位置连接到第二振荡器的接合位置的线段 支撑体和第二振荡器穿过反射镜部分中心轴线。 第一振荡器和第二振荡器的旋转部分中的至少任一个的外圆周与第一端部轴线偏离，第一端部轴线平行于反射镜部分中心轴线并沿着反射镜部分的第一侧延伸。 或者，第一振荡器和第二振荡器的匝部中的至少任一个的外周与第二端部轴线T2偏离，第二端部轴线T2平行于反射镜部分中心轴线，并沿着与第一振荡器和第二振荡器的第一振荡器平行的第二侧延伸 侧部分。 这两个条件中至少有一个是满足的。
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公开(公告)号：US08477398B2
公开(公告)日：2013-07-02
申请号：US13264530
申请日：2010-05-10
IPC分类号： G02B26/08
CPC分类号： G02B26/0833 , G02B27/01 , G02B27/017 , G02B2027/0147
摘要： An optical reflection element has a frame-shaped supporting body, a first oscillator and a second oscillator each having a meander shape, and a mirror portion. A line segment connecting a joining position between the mirror portion and the first oscillator to a joining position between the supporting body and the first oscillator, and a line segment connecting a joining position of the mirror portion and the second oscillator to a joining position of the supporting body and the second oscillator cross a mirror portion central axis. As one illustrative condition to be satisfied, an outer circumference of at least any one of turn portions of the first oscillator and the second oscillator is deviated from a first end portion axis that is parallel to the mirror portion central axis and extends along a first side of the mirror portion.
摘要翻译： 光反射元件具有框形支撑体，第一振荡器和第二振荡器，每个具有曲折形状和反射镜部分。 将反射镜部分和第一振荡器之间的接合位置连接到支撑体和第一振荡器之间的接合位置的线段，以及将镜部分和第二振荡器的接合位置连接到第二振荡器的接合位置的线段 支撑体和第二振荡器穿过反射镜部分中心轴线。 作为要满足的一个说明性条件，第一振荡器和第二振荡器的至少任一个的旋转部分的外圆周与第一端部轴线偏离，第一端部轴线平行于反射镜部分中心轴线并且沿着第一侧面 的镜部分。
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3.发明授权Optical reflection element with drive and monitor elements separated by a separation groove 有权具有驱动和监视元件的光学反射元件由分隔槽分隔开公开(公告)号：US08462411B2
公开(公告)日：2013-06-11
申请号：US13130150
申请日：2009-11-18
CPC分类号： G02B26/0858 , G02B26/101
摘要： An optical reflection element includes a mirror portion and an oscillator coupled to the mirror portion. The oscillator includes a base, an insulating layer, a drive element, and a monitor element. The insulating layer is formed on the base. The drive element and the monitor element are formed on the insulating layer, and are separated from each other by a separation groove. Each of the drive element and the monitor element includes a lower electrode layer, a piezoelectric layer, and an upper electrode layer formed in that order on the insulating layer. The monitor element has high detection accuracy, allowing the optical reflection element to perform self-excited driving with high accuracy.
摘要翻译： 光反射元件包括镜部分和耦合到镜部分的振荡器。 振荡器包括基座，绝缘层，驱动元件和监视元件。 绝缘层形成在基座上。 驱动元件和监视元件形成在绝缘层上，并通过分隔槽相互分离。 驱动元件和监视元件中的每一个包括在绝缘层上依次形成的下电极层，压电层和上电极层。 监视器元件具有高检测精度，允许光反射元件以高精度执行自激驱动。
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公开(公告)号：US08279508B2
公开(公告)日：2012-10-02
申请号：US13265139
申请日：2010-04-16
申请人： Shinsuke Nakazono , Soichiro Hiraoka , Jirou Terada , Shigeo Furukawa , Kiyomi Furukawa, legal representative , Toshiaki Horie , Kazuki Komaki , Masaki Tada , Yuta Yamamoto
发明人： Shinsuke Nakazono , Soichiro Hiraoka , Jirou Terada , Shigeo Furukawa , Toshiaki Horie , Kazuki Komaki , Masaki Tada , Yuta Yamamoto
IPC分类号： G02B26/08
CPC分类号： G02B26/0858
摘要： An optical reflecting element includes a mirror, and a pair of high-frequency vibrators and a pair of low-frequency vibrators for vibrating the mirror. The high-frequency vibrators include a substrate, a bottom electrode layer formed on the substrate, a piezoelectric layer, and a drive electrode and a first monitor electrode as the top electrode layer. One end of the low-frequency vibrator has the substrate shared with the high-frequency vibrator, a bottom electrode layer, a piezoelectric layer, a drive electrode, and a second monitor electrode as the top electrode layer. The other end of the low-frequency vibrator has the substrate shared with the high-frequency vibrator, a bottom electrode layer, a piezoelectric layer, a drive electrode, a first monitor electrode, and an insulator layer as a dead zone for preventing a piezoelectric effect due to the piezoelectric layer from reaching the first monitor electrode. The first monitor electrode provided on the low-frequency vibrator is connected from the top of the vibrator to an extraction electrode.
摘要翻译： 光反射元件包括反射镜，一对高频振动器和用于振动反射镜的一对低频振动器。 高频振动器包括基板，形成在基板上的底部电极层，压电层和驱动电极以及作为顶部电极层的第一监视电极。 低频振动器的一端具有与高频振动器共用的基板，底部电极层，压电层，驱动电极和作为顶部电极层的第二监视电极。 低频振动器的另一端具有与高频振子共用的基板，底电极层，压电层，驱动电极，第一监视电极和绝缘体层，作为防止压电的死区 由于压电层到达第一监视电极的作用。 设置在低频振动器上的第一监视电极从振动器的顶部连接到提取电极。
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公开(公告)号：US20120113492A1
公开(公告)日：2012-05-10
申请号：US13265139
申请日：2010-04-16
申请人： Shinsuke Nakazono , Soichiro Hiraoka , Jirou Terada , Shigeo Furukawa , Kiyomi Furukawa , Toshiaki Horie , Kazuki Komaki , Masaki Tada , Yuta Yamamoto
发明人： Shinsuke Nakazono , Soichiro Hiraoka , Jirou Terada , Shigeo Furukawa , Kiyomi Furukawa , Toshiaki Horie , Kazuki Komaki , Masaki Tada , Yuta Yamamoto
IPC分类号： G02B26/08
CPC分类号： G02B26/0858
摘要： An optical reflecting element includes a mirror, and a pair of high-frequency vibrators and a pair of low-frequency vibrators for vibrating the mirror. The high-frequency vibrators include a substrate, a bottom electrode layer formed on the substrate, a piezoelectric layer, and a drive electrode and a first monitor electrode as the top electrode layer. One end of the low-frequency vibrator has the substrate shared with the high-frequency vibrator, a bottom electrode layer, a piezoelectric layer, a drive electrode, and a second monitor electrode as the top electrode layer. The other end of the low-frequency vibrator has the substrate shared with the high-frequency vibrator, a bottom electrode layer, a piezoelectric layer, a drive electrode, a first monitor electrode, and an insulator layer as a dead zone for preventing a piezoelectric effect due to the piezoelectric layer from reaching the first monitor electrode. The first monitor electrode provided on the low-frequency vibrator is connected from the top of the vibrator to an extraction electrode.
摘要翻译： 光反射元件包括反射镜，一对高频振动器和用于振动反射镜的一对低频振动器。 高频振动器包括基板，形成在基板上的底部电极层，压电层和驱动电极以及作为顶部电极层的第一监视电极。 低频振动器的一端具有与高频振动器共用的基板，底部电极层，压电层，驱动电极和作为顶部电极层的第二监视电极。 低频振动器的另一端具有与高频振子共用的基板，底电极层，压电层，驱动电极，第一监视电极和绝缘体层，作为防止压电的死区 由于压电层到达第一监视电极的作用。 设置在低频振动器上的第一监视电极从振动器的顶部连接到提取电极。
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公开(公告)号：US20110292479A1
公开(公告)日：2011-12-01
申请号：US13130150
申请日：2009-11-18
IPC分类号： G02B26/08
CPC分类号： G02B26/0858 , G02B26/101
摘要： An optical reflection element includes a mirror portion and an oscillator coupled to the mirror portion. The oscillator includes a base, an insulating layer, a drive element, and a monitor element. The insulating layer is formed on the base. The drive element and the monitor element are formed on the insulating layer, and are separated from each other by a separation groove. Each of the drive element and the monitor element includes a lower electrode layer, a piezoelectric layer, and an upper electrode layer formed in that order on the insulating layer. The monitor element has high detection accuracy, allowing the optical reflection element to perform self-excited driving with high accuracy.
摘要翻译： 光反射元件包括镜部分和耦合到镜部分的振荡器。 振荡器包括基座，绝缘层，驱动元件和监视元件。 绝缘层形成在基座上。 驱动元件和监视元件形成在绝缘层上，并通过分隔槽相互分离。 驱动元件和监视元件中的每一个包括在绝缘层上依次形成的下电极层，压电层和上电极层。 监视器元件具有高检测精度，允许光反射元件以高精度执行自激驱动。
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7.发明授权Meandering oscillator, optical reflecting element using meandering oscillator, and image projection device using meandering oscillator 有权蜿蜒振荡器，使用蜿蜒振荡器的光学反射元件，以及使用曲折振荡器的图像投影装置公开(公告)号：US08508826B2
公开(公告)日：2013-08-13
申请号：US12937299
申请日：2009-04-23
IPC分类号： G02B26/08
CPC分类号： H01L41/0953 , G02B26/0858
摘要： A meandering oscillator includes a plurality of oscillating plates bent and coupled in predetermined directions and piezoelectric actuators each including a lower electrode, a piezoelectric body, and an upper electrode stacked on the oscillating plate in this order, and wherein the piezoelectric actuators are alternately arranged on the oscillating plates. Thus, even when an element is made smaller, electrodes can be easily arranged. As a result, the productivity can be improved.
摘要翻译： 曲折振荡器包括按预定方向弯曲和耦合的多个振荡板，并且按压力驱动器依次叠置在振荡板上的压电致动器各自包括下电极，压电体和上电极，并且其中压电致动器交替布置在 摆动板。 因此，即使使元件变小，也可以容易地布置电极。 结果，可以提高生产率。
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8.发明申请MEANDERING OSCILLATOR, OPTICAL REFLECTING ELEMENT USING MEANDERING OSCILLATOR, AND IMAGE PROJECTION DEVICE USING MEANDERING OSCILLATOR 有权使用振动振荡器的光学振荡器，光学反射元件和使用振动振荡器的图像投影设备公开(公告)号：US20110032590A1
公开(公告)日：2011-02-10
申请号：US12937299
申请日：2009-04-23
IPC分类号： G02B27/18 , H01L41/047 , G02B26/08
CPC分类号： H01L41/0953 , G02B26/0858
摘要： A meandering oscillator includes a plurality of oscillating plates bent and coupled in predetermined directions and piezoelectric actuators each including a lower electrode, a piezoelectric body, and an upper electrode stacked on the oscillating plate in this order, and wherein the piezoelectric actuators are alternately arranged on the oscillating plates. Thus, even when an element is made smaller, electrodes can be easily arranged. As a result, the productivity can be improved.
摘要翻译： 曲折振荡器包括按预定方向弯曲和耦合的多个振荡板，并且按压力驱动器依次叠置在振荡板上的压电致动器各自包括下电极，压电体和上电极，并且其中压电致动器交替布置在 摆动板。 因此，即使使元件变小，也可以容易地布置电极。 结果，可以提高生产率。
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公开(公告)号：US08681407B2
公开(公告)日：2014-03-25
申请号：US13581837
申请日：2011-03-24
申请人： Soichiro Hiraoka , Kazuki Komaki , Masaki Tada , Shigeo Furukawa , Kiyomi Furukawa , Shinsuke Nakazono , Yuta Yamamoto , Toshiaki Horie
发明人： Soichiro Hiraoka , Kazuki Komaki , Masaki Tada , Shigeo Furukawa , Kiyomi Furukawa , Shinsuke Nakazono , Yuta Yamamoto , Toshiaki Horie
IPC分类号： G02B26/08
CPC分类号： G02B26/0833 , B81B3/0051 , B81B2201/042
摘要： An optical reflection element has a frame, a pair of meandering-shaped vibration elements, a mirror having a reflection surface, and a pair of protective beams. The vibration elements have their respective outer ends supported by confronting portions of an inside of the frame. The vibration elements support the mirror with respective inner ends thereof. The protective beams extend from the respective confronting portions of the inside of the frame toward the mirror with a predetermined space from the vibration elements and in parallel with a vibration axis of the vibration elements.
摘要翻译： 光反射元件具有框架，一对曲折形状的振动元件，具有反射面的反射镜和一对保护光束。 振动元件的各自的外端由框架内部的相对部分支撑。 振动元件支撑着镜子的相应内端。 保护梁从振动元件的预定空间与振动元件的振动轴线平行地从框架内部的相应的相对部分向镜子延伸。
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公开(公告)号：US08964273B2
公开(公告)日：2015-02-24
申请号：US13698327
申请日：2011-06-21
申请人： Toshiaki Horie , Shinsuke Nakazono , Soichiro Hiraoka , Yuta Yamamoto , Kazuki Komaki , Masaki Tada , Kiyomi Furukawa
发明人： Toshiaki Horie , Shinsuke Nakazono , Soichiro Hiraoka , Shigeo Furukawa , Yuta Yamamoto , Kazuki Komaki , Masaki Tada
CPC分类号： G02B26/101 , B81B3/0045 , B81B2201/042 , B81B2203/0163 , G02B7/1821 , G02B26/0833 , G02B26/0858 , G02B26/105
摘要： An optical reflection element according to the present invention includes a fixed frame, a pair of first oscillation parts, a movable frame, a pair of second oscillation parts, and a mirror part. One-side ends of the first oscillation parts are connected to the inside of the fixed frame. The movable frame is connected to and held by the other-side ends of the pair of first oscillation parts to be pivotable. One-side ends of the pair of second oscillation parts are connected to the inside of the movable frame and the pair of second oscillation parts are disposed to be substantially perpendicular to the pair of first oscillation parts. The mirror part is connected to and held by the other-side ends of the pair of second oscillation parts to be pivotable. The second oscillation parts have a meandering shape in which a plurality of straight portions and a plurality of folded portions are formed, and a stepped structure portion is provided in part of the folded portion.
摘要翻译： 根据本发明的光反射元件包括固定框架，一对第一振动部件，可动框架，一对第二振荡部件和反射镜部件。 第一振动部分的一端连接到固定框架的内部。 可移动框架连接到一对第一振动部件的另一侧端部并由其保持以可枢转。 一对第二振荡部的一端连接到可动框架的内侧，并且一对第二振荡部被配置为大致垂直于该对第一振动部。 镜部分连接到一对第二振动部件的另一侧端部并由其保持以可枢转。 第二振动部分具有弯曲形状，其中形成多个直线部分和多个折叠部分，并且在折叠部分的一部分中设置阶梯状结构部分。
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