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1.发明申请公开(公告)号：US20120125117A1
公开(公告)日：2012-05-24
申请号：US13321625
申请日：2010-05-18
CPC分类号： G02B26/0833 , H02N1/006
摘要： A micromechanical component includes: an adjustable element connected to a holder at least via a spring; a first sensor device with at least one first piezo-resistive sensor element, which first sensor device provides a first sensor signal relating to a first mechanical stress, the first piezo-resistive sensor element being situated on or in an anchoring region of the spring; and a second sensor device with at least one second piezo-resistive sensor element, which second sensor device provides a second sensor signal relating to a second mechanical stress, the second piezo-resistive sensor element being situated on or in an anchoring region of the spring.
摘要翻译： 微机械部件包括：至少通过弹簧连接到保持器的可调元件; 具有至少一个第一压阻传感器元件的第一传感器装置，所述第一传感器装置提供与第一机械应力相关的第一传感器信号，所述第一压阻传感器元件位于所述弹簧的锚定区域上或其中; 以及具有至少一个第二压阻传感器元件的第二传感器装置，所述第二传感器装置提供与第二机械应力相关的第二传感器信号，所述第二压阻传感器元件位于所述弹簧的锚定区域上或其中 。
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公开(公告)号：US20150036203A1
公开(公告)日：2015-02-05
申请号：US14364991
申请日：2012-10-23
申请人： Heiko Nitsche , Frederic Njikam Njimonzie , Wolfram Schock , Joerg Muchow , Helmut Grutzeck , Zoltan Lestyan
发明人： Heiko Nitsche , Frederic Njikam Njimonzie , Wolfram Schock , Joerg Muchow , Helmut Grutzeck , Zoltan Lestyan
CPC分类号： G02B26/0833 , B81B3/0043 , B81B2201/042 , B81B2203/0109 , B81B2203/0163 , G02B7/1821 , G02B26/101 , G02B26/105
摘要： A micromirror including a first layer having a first main extension plane, and a second layer having a second main extension plane, the first main extension plane and the second main extension plane being situated parallel to one another, the first layer and the second layer being sectionally connected to one another via at least one connection area, at least one spring element being implemented in the first layer, a movably suspended mirror plate being implemented in the second layer, the mirror plate having a mirror surface on a first side parallel to the main extension plane and being connected on an opposing second side via the connection area to an anchor of the spring element, a part of the spring element on the second side of the mirror plate being movably situated in relation to the mirror plate. A two-mirror system having such a micromirror is also provided.
摘要翻译： 一种微镜，包括具有第一主延伸面的第一层和具有第二主延伸面的第二层，第一主延伸面和第二主延伸面相互平行，第一层和第二层为 通过至少一个连接区域彼此分开连接，至少一个弹簧元件被实施在第一层中，可移动悬挂的镜板被实施在第二层中，镜板具有在平行于第二层的第一侧上的镜面 主延伸平面并经由连接区域连接到弹簧元件的锚固件的相对的第二侧上，反射镜板的第二侧上的弹簧元件的一部分相对于镜板可移动地定位。 还提供了具有这种微镜的双镜像系统。
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3.发明申请MICROMECHANICAL COMPONENT AND PRODUCTION METHOD FOR A MICROMECHANICAL COMPONENT 审中-公开微生物组分的微生物组分和生产方法公开(公告)号：US20120133242A1
公开(公告)日：2012-05-31
申请号：US13320712
申请日：2010-05-18
CPC分类号： G02B26/0841 , B81B3/0021 , B81B2201/033 , B81B2201/042 , Y10T29/49002
摘要： A micromechanical component has an outer stator electrode component and an outer actuator electrode component which is connected to a holder via at least one outer spring, an adjustable element being adjustable about a first rotation axis by application of a first voltage between the outer actuator electrode component and the outer stator electrode component, and having an inner stator electrode component and an inner actuator electrode component having a first web with at least one electrode finger disposed thereon, the adjustable element being adjustable about a second rotation axis by application of a second voltage between the at least one electrode finger of the inner actuator electrode component and the inner stator electrode component, and the inner actuator electrode component being connected to the outer actuator electrode component via an intermediate spring which is oriented along the second rotation axis. Also described is a production method for a micromechanical component.
摘要翻译： 微机械部件具有外部定子电极部件和外部致动器电极部件，其经由至少一个外部弹簧连接到保持器，可调节元件可围绕第一旋转轴线调节，通过在外部致动器电极部件 和外部定子电极部件，并且具有内部定子电极部件和内部致动器电极部件，所述内部致动器电极部件具有设置在其上的至少一个电极指的第一网状物，所述可调节元件可围绕第二旋转轴线调节， 内部致动器电极部件的至少一个电极指和内部定子电极部件，内部致动器电极部件通过沿着第二旋转轴线取向的中间弹簧连接到外部致动器电极部件。 还描述了一种用于微机械部件的制造方法。
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4.发明授权公开(公告)号：US08813573B2
公开(公告)日：2014-08-26
申请号：US13321625
申请日：2010-05-18
IPC分类号： G01B7/16
CPC分类号： G02B26/0833 , H02N1/006
摘要： A micromechanical component includes: an adjustable element connected to a holder at least via a spring; a first sensor device with at least one first piezo-resistive sensor element, which first sensor device provides a first sensor signal relating to a first mechanical stress, the first piezo-resistive sensor element being situated on or in an anchoring region of the spring; and a second sensor device with at least one second piezo-resistive sensor element, which second sensor device provides a second sensor signal relating to a second mechanical stress, the second piezo-resistive sensor element being situated on or in an anchoring region of the spring.
摘要翻译： 微机械部件包括：至少通过弹簧连接到保持器的可调元件; 具有至少一个第一压阻传感器元件的第一传感器装置，所述第一传感器装置提供与第一机械应力相关的第一传感器信号，所述第一压阻传感器元件位于所述弹簧的锚定区域上或其中; 以及具有至少一个第二压阻传感器元件的第二传感器装置，所述第二传感器装置提供与第二机械应力相关的第二传感器信号，所述第二压阻传感器元件位于所述弹簧的锚定区域上或其中 。
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5.发明授权公开(公告)号：US09360664B2
公开(公告)日：2016-06-07
申请号：US14471582
申请日：2014-08-28
申请人： Simon Armbruster , Helmut Grutzeck , Frank Schatz , Joerg Muchow , Frederic Njikam Njimonzie , Johannes Baader , Kerrin Doessel , Rainer Straub
发明人： Simon Armbruster , Helmut Grutzeck , Frank Schatz , Joerg Muchow , Frederic Njikam Njimonzie , Johannes Baader , Kerrin Doessel , Rainer Straub
CPC分类号： G02B26/0858
摘要： A micromechanical component and a method for producing a micromechanical component are described. The component has: a frame; a plate spring that is connected to the frame and that has a front side and a rear side facing away from the front side; a mirror element that is situated on the front side of the plate spring and is connected to the front side of the plate spring in such a way that the mirror element is suspended on the frame so as to be capable of displacement; and at least one piezoelectric strip that is connected to the rear side of the plate spring; the plate spring being elastically deformable through the application of an electrical voltage to the at least one piezoelectric strip in order to displace the mirror element.
摘要翻译： 描述微机械部件和微机械部件的制造方法。 该组件具有：一个框架; 板簧，其连接到所述框架并且具有背面和远离所述前侧的前侧和后侧; 镜片元件位于板簧的前侧，并连接到板簧的前侧，使得镜元件悬挂在框架上以便能够移位; 以及连接到所述板簧的后侧的至少一个压电条; 所述板簧通过向所述至少一个压电条施加电压而可弹性变形，以便使所述镜元件移位。
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6.发明申请ELECTROSTATIC DRIVE, METHOD FOR OPERATING A MICROMECHANICAL COMPONENT HAVING AN ELECTROSTATIC DRIVE, AND METHOD FOR MANUFACTURING AN ELECTROSTATIC DRIVE 有权静电驱动装置，具有静电驱动装置的微型组件的操作方法以及制造静电驱动装置的方法公开(公告)号：US20100201292A1
公开(公告)日：2010-08-12
申请号：US12698806
申请日：2010-02-02
CPC分类号： H02N1/006 , Y10T29/49226
摘要： An electrostatic drive having at least three intermediate frames, each two adjacent intermediate frames being connected to one another via at least one intermediate spring whose longitudinal directions lie on a first axis of rotation, and intermediate electrode fingers being situated on frame girders oriented parallel to the first axis of rotation of the intermediate frames, and having an outer frame that surrounds the intermediate frames and that is connected to the outermost intermediate frame via at least one outer spring whose longitudinal direction lies on a second axis of rotation that is oriented non-parallel to the first axis of rotation, and outer electrode fingers being situated on frame girders oriented parallel to the second axis of rotation of the outer frame and of the outermost intermediate frame of the at least three intermediate frames. In addition, a micromechanical component having this electrostatic drive, a method for operating such a micromechanical component, and methods for manufacturing the electrostatic drive and the micromechanical component are described.
摘要翻译： 具有至少三个中间框架的静电驱动器，每两个相邻的中间框架经由至少一个中间弹簧彼此连接，所述至少一个中间弹簧的纵向位于第一旋转轴线上，中间电极指位于平行于 中间框架的第一旋转轴线，并且具有环绕中间框架的外框架，并且其经由至少一个外部弹簧连接到最外侧中间框架，该外部弹簧的纵向位于不平行的第二旋转轴线上 并且外电极指位于平行于外框的第二旋转轴线和至少三个中间框架的最外侧中间框架的框架梁上。 此外，描述了具有这种静电驱动的微机械部件，用于操作这种微机械部件的方法，以及用于制造静电驱动器和微机械部件的方法。
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7.发明授权Micromechanical component having an inclined structure and corresponding manufacturing method 有权具有倾斜结构的微机械部件和相应的制造方法公开(公告)号：US08847336B2
公开(公告)日：2014-09-30
申请号：US12937093
申请日：2008-11-28
申请人： Tjalf Pirk , Stefan Pinter , Hubert Benzel , Heribert Weber , Michael Krueger , Robert Sattler , Frederic Njikam Njimonzie , Joerg Muchow , Joachim Fritz , Christoph Schelling , Christoph Friese
发明人： Tjalf Pirk , Stefan Pinter , Hubert Benzel , Heribert Weber , Michael Krueger , Robert Sattler , Frederic Njikam Njimonzie , Joerg Muchow , Joachim Fritz , Christoph Schelling , Christoph Friese
IPC分类号： H01L29/788 , B81C1/00
CPC分类号： B81C1/00103 , B81B2203/0118 , B81B2203/0307
摘要： In a micromechanical component having an inclined structure and a corresponding manufacturing method, the component includes a substrate having a surface; a first anchor, which is provided on the surface of the substrate and which extends away from the substrate; and at least one cantilever, which is provided on a lateral surface of the anchor, and which points at an inclination away from the anchor.
摘要翻译： 在具有倾斜结构和相应的制造方法的微机械部件中，该部件包括具有表面的基板; 第一锚，其设置在基板的表面上并且远离基板延伸; 以及至少一个悬臂，其设置在锚固件的侧表面上，并且其倾斜远离锚固件。
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8.发明授权Electrostatic drive, method for operating a micromechanical component having an electrostatic drive, and method for manufacturing an electrostatic drive 有权静电驱动装置，具有静电驱动装置的微机械部件的动作方法以及静电驱动装置的制造方法公开(公告)号：US08188634B2
公开(公告)日：2012-05-29
申请号：US12698806
申请日：2010-02-02
IPC分类号： H02N1/00
CPC分类号： H02N1/006 , Y10T29/49226
摘要： An electrostatic drive having at least three intermediate frames, each two adjacent intermediate frames being connected to one another via at least one intermediate spring whose longitudinal directions lie on a first axis of rotation, and intermediate electrode fingers being situated on frame girders oriented parallel to the first axis of rotation of the intermediate frames, and having an outer frame that surrounds the intermediate frames and that is connected to the outermost intermediate frame via at least one outer spring whose longitudinal direction lies on a second axis of rotation that is oriented non-parallel to the first axis of rotation, and outer electrode fingers being situated on frame girders oriented parallel to the second axis of rotation of the outer frame and of the outermost intermediate frame of the at least three intermediate frames. In addition, a micromechanical component having this electrostatic drive, a method for operating such a micromechanical component, and methods for manufacturing the electrostatic drive and the micromechanical component are described.
摘要翻译： 具有至少三个中间框架的静电驱动器，每两个相邻的中间框架经由至少一个中间弹簧彼此连接，所述至少一个中间弹簧的纵向位于第一旋转轴线上，中间电极指位于平行于 中间框架的第一旋转轴线，并且具有环绕中间框架的外框架，并且其经由至少一个外部弹簧连接到最外侧中间框架，该外部弹簧的纵向位于不平行的第二旋转轴线上 并且外电极指位于平行于外框的第二旋转轴线和至少三个中间框架的最外侧中间框架的框架梁上。 此外，描述了具有这种静电驱动的微机械部件，用于操作这种微机械部件的方法，以及用于制造静电驱动器和微机械部件的方法。
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9.发明申请公开(公告)号：US20110147862A1
公开(公告)日：2011-06-23
申请号：US12937093
申请日：2008-11-28
申请人： Tjalf Pirk , Stefan Pinter , Hubert Benzel , Herbert Weber , Michael Krueger , Robert Sattler , Frederic Njikam Njimonzie , Joerg Muchow , Joachim Fritz , Christoph Schelling , Christoph Friese
发明人： Tjalf Pirk , Stefan Pinter , Hubert Benzel , Herbert Weber , Michael Krueger , Robert Sattler , Frederic Njikam Njimonzie , Joerg Muchow , Joachim Fritz , Christoph Schelling , Christoph Friese
CPC分类号： B81C1/00103 , B81B2203/0118 , B81B2203/0307
摘要： In a micromechanical component having an inclined structure and a corresponding manufacturing method, the component includes a substrate having a surface; a first anchor, which is provided on the surface of the substrate and which extends away from the substrate; and at least one cantilever, which is provided on a lateral surface of the anchor, and which points at an inclination away from the anchor.
摘要翻译： 在具有倾斜结构和相应的制造方法的微机械部件中，该部件包括具有表面的基板; 第一锚，其设置在基板的表面上并且远离基板延伸; 以及至少一个悬臂，其设置在锚固件的侧表面上，并且其倾斜远离锚固件。
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公开(公告)号：US20120313638A1
公开(公告)日：2012-12-13
申请号：US13514550
申请日：2010-10-22
申请人： Christian Patak , Stefan Weiss , Frederic Njikam Njimonzie , Frank Schaltz , Paul Farber , Christian Bierhoff
发明人： Christian Patak , Stefan Weiss , Frederic Njikam Njimonzie , Frank Schaltz , Paul Farber , Christian Bierhoff
IPC分类号： G01R33/04
摘要： A magnetic field sensor includes a magnetizable core having a curved surface at least sectionally, a magnetization device for magnetizing the core, and a determination device for determining a magnetic field in the core.
摘要翻译： 磁场传感器包括具有至少剖面的弯曲表面的可磁化芯体，用于磁化磁芯的磁化装置，以及用于确定磁芯中的磁场的确定装置。
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