-
1.发明授权
公开(公告)号：US5590389A
公开(公告)日：1996-12-31
申请号：US363397
申请日：1994-12-23
申请人： John A. Dunlop , Jun Yuan , Janine K. Kardokus , Roger A. Emigh
发明人： John A. Dunlop , Jun Yuan , Janine K. Kardokus , Roger A. Emigh
CPC分类号： C23C14/3414 , B21C23/001 , B21C23/01 , B22F3/115 , B22F3/20 , C22C1/0416 , C22C21/00 , B22F2998/10
摘要： A sputtering target comprising a body of metal such as aluminum and its alloy with an ultrafine grain size and small second phase. Also described is a method for making an ultra-fine grain sputtering target comprising melting, atomizing, and depositing atomized metal to form a workpiece, and fabricating the workpiece to form a sputtering target. A method is also disclosed that includes the steps of extruding a workpiece through a die having contiguous, transverse inlet and outlet channels of substantially identical cross section, and fabricating the extruded article into a sputtering target. The extrusion may be performed several times, producing grain size of still smaller size and controlled grain texture.
摘要翻译： 一种溅射靶，其包括诸如铝的金属体及其具有超细晶粒尺寸和小的第二相的合金。 还描述了一种制造超细晶粒溅射靶的方法，包括熔化，雾化和沉积雾化金属以形成工件，以及制造工件以形成溅射靶。 还公开了一种方法，其包括以下步骤：将工件挤压通过具有基本相同横截面的连续的，横向的入口和出口通道的模具，并将挤压制品制造成溅射靶。 挤出可以进行几次，产生更小尺寸的颗粒尺寸和受控的颗粒纹理。
-
公开(公告)号：US4915802A
公开(公告)日：1990-04-10
申请号：US362495
申请日：1989-06-07
摘要： Lead with a low alpha particle emission is produced by selecting an orebody wherein lead mineral is present in a coarsely disseminated form and substantially free of impurities. The ore is selected from a host rock that is relatively low in alpha emitters, such as a carbonate rock. The ore is mined and is milled such that the lead mineral can be separated from the host rock and any other minerals. The ground ore may be screened into one or more fractions having a narrow range of particle sizes. Each fraction is formed into a fluid suspension, and each suspension is subjected to gravity separation to remove the host rock and any other minerals which substantially contain the alpha particle-emitting substances, and to recover the lead mineral as a concentrate with a low alpha count. The lead concentrate is subjected to a suitable reduction operation that may include a conversion of the concentrate into a reducible form, without the introduction of alpha emitters, for the recovery of a low alpha lead. When the lead mineral is galena, suitable reductions include the smelting with sodiuim carbonate with or without an oxygen-bearing gas and electrolytic reduction in a molten bath of lead chloride. The low alpha lead recovered from these operations has an alpha count of about 0.02 alpha particle per cm.sup.2 per hour or less, and the count does not substantially increase with time. The recovered low alpha lead may be further purified by electro-refining.
摘要翻译： 具有低α粒子排放的铅通过选择其中铅矿物以粗分散形式存在且基本上不含杂质的矿体来生产。 矿石选自α发射体相对较低的主岩，如碳酸盐岩。 矿石被开采并被研磨，使得铅矿物可以与主体岩石和任何其它矿物分离。 研磨的矿石可以筛选成具有窄范围粒度的一种或多种级分。 每个馏分形成流体悬浮液，每个悬浮液进行重力分离以除去主体岩石和基本上含有α粒子发射物质的任何其它矿物质，并以低α计数作为浓缩物回收铅矿物质 。 铅精矿经受合适的还原操作，其可包括将浓缩物转化为可还原形式，而不引入α发射体，用于回收低α铅。 当铅矿物为方铅矿时，合适的还原包括用含有或不含氧气体的碳酸钠进行熔炼，并在氯化锌熔池中进行电解还原。 从这些操作中回收的低α铅具有每平方厘米每小时或更少的约0.02个α粒子的α计数，并且计数基本上不随时间增加。 回收的低α铅可以通过电解进一步纯化。
-
公开(公告)号：US4838935A
公开(公告)日：1989-06-13
申请号：US200344
申请日：1988-05-31
申请人： John A. Dunlop , Hans Rensing
发明人： John A. Dunlop , Hans Rensing
CPC分类号： C23C14/3414 , C22C1/045
摘要： Tungsten-titanium sputtering targets with improved characteristics are made from high-purity tungsten powder and a second powder consisting of high-purity titanium hydride powder or high-purity titanium hydride powder and high-purity titanium powder. The second powder contains at least 5%, preferably 25% to 100% by weight of titanium hydride powder. A powder mixture having a binodal particle size distribution with respect to the tungsten and second powders is placed under a containment pressure in a die. The die is heated in a vacuum hot-press chamber to a temperature sufficient to dehydride the titanium hydride, and to remove gases and alkali metals. The die is then heated to a second temperature in the range of 1350.degree. to 1550.degree. C. while maintaining the containment pressure and vacuum. A compaction force in the range of 2000 to 5000 psi is then applied to form a compact. The compaction force and vacuum are subsequently released and the compact is cooled. The compact is easily machined to give a sputtering target having a density of at least 95%, preferably, at least 100% of theoretical density, a total gas content of less than 850 ppm, a carbon content of less than 100 ppm and low particulates upon sputtering.
-
4.发明授权Method of reducing sputtering burn-in time, minimizing sputtered particulate, and target assembly therefor 失效降低溅射老化时间，最小化溅射颗粒的方法，以及靶组装
公开(公告)号：US6030514A
公开(公告)日：2000-02-29
申请号：US850707
申请日：1997-05-02
CPC分类号： C23C14/3414
摘要： A target for sputtering is subjected to a surface treatment process and special packaging after target manufacture for improved sputtering performance and process and yield by reducing particulates. The sputtering target is first surface treated to remove oxides, impurities and contaminants. The surface treated target is then covered with a metallic enclosure and, optionally, a passivating barrier layer. The metallic enclosure protects the target surface from direct contact with subsequently employed packaging material such as plastic bags, thereby eliminating sources of organic materials during sputtering operations. The surface treatment of the target removes deformed material, smearing, twins, or burrs and the like from the target surface, reducing "burn-in" or sputter conditioning time prior to production sputtering of thin films.
摘要翻译： 在目标制造之后对溅射靶进行表面处理和特殊包装，以改善溅射性能和工艺，并通过减少微粒产生收率。 首先对溅射靶进行表面处理以除去氧化物，杂质和污染物。 然后用金属外壳和任选的钝化阻挡层覆盖表面处理的靶。 金属外壳保护目标表面免受与随后使用的包装材料如塑料袋的直接接触，从而在溅射操作期间消除有机材料的来源。 靶的表面处理从目标表面去除变形的材料，涂抹，双胞胎或毛刺等，在薄膜的生产溅射之前减少“老化”或溅射调理时间。
-
公开(公告)号：US4887492A
公开(公告)日：1989-12-19
申请号：US237747
申请日：1988-08-29
摘要： Lead with a low alpha particle emission is produced by selecting an orebody wherein lead mineral is present in a coarsely disseminated form and substantially free of impurities. The ore is selected from a host rock that is relatively low in alpha emitters, such as a carbonate rock. The ore is mined and is milled such that the lead mineral can be separated from the host rock and any other minerals. The ground ore may be screened into one or more fractions having a narrow range of particle sizes. Each fraction is formed into a fluid suspension, and each suspension is subjected to gravity separation to remove the host rock and any other minerals which substantially contain the alpha particle-emitting substances, and to recover the lead mineral as a concentrate with a low alpha count. The lead concentrate is subjected to a suitable reduction operation that may include a conversion of the concentrate into a reducible form, without the introduction of alpha emitters, for the recovery of a low alpha lead. When the lead mineral is galena, suitable reductions include the smelting with sodium carbonate with or without an oxygen-bearing gas and electrolytic reduction in a molten bath of lead chloride. The low alpha lead recovered from these operations has an alpha count of about 0.02 alpha particle per cm.sup.2 per hour or less, and the count does not substantially increase with time. The recovered low alpha lead may be further purified by electro-refining.
摘要翻译： 具有低α粒子排放的铅通过选择其中铅矿物以粗分散形式存在且基本上不含杂质的矿体来生产。 矿石选自α发射体相对较低的主岩，如碳酸盐岩。 矿石被开采并被研磨，使得铅矿物可以与主体岩石和任何其它矿物分离。 研磨的矿石可以筛选成具有窄范围粒度的一种或多种级分。 每个级分形成流体悬浮液，并且每个悬浮液进行重力分离以除去主体岩石和基本上含有α粒子发射物质的任何其它矿物质，并且以低α计数作为浓缩物回收铅矿物质 。 铅精矿经受合适的还原操作，其可包括将浓缩物转化为可还原形式，而不引入α发射体，用于回收低α铅。 当铅矿物为方铅矿时，合适的还原包括用含有或不带氧气的碳酸钠进行熔炼，并在氯化锌熔池中进行电解还原。 从这些操作中回收的低α铅具有每小时或更少每平方厘米约0.02个阿尔法粒子的α计数，并且计数基本上不随时间增加。 回收的低α铅可以通过电解进一步纯化。
-
公开(公告)号：USRE33313E
公开(公告)日：1990-08-28
申请号：US406063
申请日：1989-09-12
申请人： John A. Dunlop , Robert W. Smyth , Gerald W. Toop
发明人： John A. Dunlop , Robert W. Smyth , Gerald W. Toop
摘要： Lead with a low alpha particle emission is produced by selecting an orebody wherein lead mineral is present in a coarsely disseminated form and substantially free of impurities. The ore is selected from a host rock that is relatively low in alpha emitters, such as a carbonate rock. The ore is mined and is milled such that the lead mineral can be separated from the host rock and any other minerals. The ground ore may be screened into one or more fractions having a narrow range of particle sizes. Each fraction is formed into a fluid suspension, and each suspension is subjected to gravity separation to remove the host rock and any other minerals which substantially contain the alpha particle-emitting substances, and to recover the lead mineral as a concentrate with a low alpha count. The lead concentrate is subjected to a suitable smelting operation, without the introduction of alpha emitters for the recovery of a low alpha lead. When the lead mineral is galena, the smelting is preferably carried out with sodium carbonate and an oxygen-bearing gas in the presence of sodium chloride as a fluxing agent to form a low melting point slag. The low alpha lead has an alpha count of about 0.02 alpha particles per cm.sup.2 per hour or less, and the count does not substantially increase with time.
-
公开(公告)号：US4770698A
公开(公告)日：1988-09-13
申请号：US98853
申请日：1987-09-21
申请人： John A. Dunlop , Robert W. Smyth , Gerald W. Toop
发明人： John A. Dunlop , Robert W. Smyth , Gerald W. Toop
摘要： Lead with a low alpha particle emission is produced by selecting an orebody wherein lead mineral is present in a coarsely disseminated form and substantially free of impurities. The ore is selected from a host rock that is relatively low in alpha emitters, such as a carbonate rock. The ore is mined and is milled such that the lead mineral can be separated from the host rock and any other minerals. The ground ore may be screened into one or more fractions having a narrow range of particle sizes. Each fraction is formed into a fluid suspension, and each suspension is subjected to gravity separation to remove the host rock and any other minerals which substantially contain the alpha particle-emitting substances, and to recover the lead mineral as a concentrate with a low alpha count. The lead concentrate is subjected to a suitable smelting operation, without the introduction of alpha emitters for the recovery of a low alpha lead. When the lead mineral is galena, the smelting is preferaby carried out with sodium carbonate and an oxygen-bearing gas in the presence of sodium chloride as a fluxing agent to form a low melting point slag. The low alpha lead has an alpha count of about 0.02 alpha particles per cm.sup.2 per hour or less, and the count does not substantially increase with time.
摘要翻译： 具有低α粒子排放的铅通过选择其中铅矿物以粗分散形式存在且基本上不含杂质的矿体来生产。 矿石选自α发射体相对较低的主岩，如碳酸盐岩。 矿石被开采并被研磨，使得铅矿物可以与主体岩石和任何其它矿物分离。 研磨的矿石可以筛选成具有窄范围粒度的一种或多种级分。 每个馏分形成流体悬浮液，每个悬浮液进行重力分离以除去主体岩石和基本上含有α粒子发射物质的任何其它矿物质，并以低α计数作为浓缩物回收铅矿物质 。 铅精矿经过适当的熔炼操作，而不引入用于回收低α铅的α发射体。 当铅矿物是方铅矿时，在氯化钠作为助熔剂存在下，优选用碳酸钠和含氧气体进行熔炼以形成低熔点渣。 低α铅具有每平方厘米每小时或更少的约0.02个α粒子的α计数，并且计数基本上不随时间增加。
-
-
-
-
-
-
搜索结果
7 条记录 (耗时 0.019 秒)
