摘要:
The present invention relates to a microlens fabrication method for fabricating a non-global microlens from a multi-layer substrate. In the microlens fabrication method of the invention, a first layer of a predetermined etching rate is formed first, and then a second layer is formed on the first layer. The second layer has a predetermined etching rate different from that of the first layer. A mask pattern in use for etching is formed on the second layer, and then the first and second layers are etched to form a non-spherical lens contour therein.
摘要:
Disclosed herein is a cantilever-type PLC optical attenuator. The optical attenuator includes a base substrate made of silicon, an input waveguide, and output waveguide. Front portions of the upper and lower silicon substrates around the output waveguide are thinner than rear portions of the upper and lower silicon substrates around the output waveguide to provide a cantilever part having upper and lower cantilever substrate parts. A first electrode is provided on a bottom of the lower cantilever substrate part, and a second electrode is provided on the base substrate to electromagnetically correspond to the first electrode. When a voltage is applied between the first and second electrodes, the cantilever part moves up and down by an electromagnetic force, thus controlling the output light.
摘要:
The present invention relates to a multi-channel variable optical attenuator, more particularly, which comprises a multilayer structure of a fiber optic module and an attenuating module in order to enhance the integrity of the multi-channel variable optical attenuator. The multi-channel variable optical attenuator comprises at least two optical signal transmission lines which are arranged parallel with each other, and have associated separating spaces formed between input and output terminals to adjust the power of an optical signal. A screen is placed in one of the separating spaces of the optical signal transmission lines, and movable in a direction crossing the optical signal transmission lines. A Micro Electro Mechanical System (MEMS) actuator is placed above one of the optical signal transmission lines, and connected with the screen to shift the same. The MEMS actuator is placed above a first optical signal transmission line which is placed adjacent to a second optical signal transmission line for placing the screen therein.
摘要:
An optical attenuator includes an attenuating section arranged between a receiving waveguide coaxial with a receiving optical fiber and a transmitting waveguide coaxial with a transmitting optical fiber to attenuate the intensity of light emitted from the receiving waveguide. In the optical attenuator, an actuator drives a movable section across the propagation of light. An inner housing has a cover mounted with the receiving and transmitting waveguides in an underside and a body arranged and bonded under the cover. The receiving and transmitting waveguides can be arranged in a cavity of the body without interference. An outer housing contains the inner housing to protect the same. A calibrating section generates attractive force from above the cover to pull the movable section against the latitudinal deformation thereof so that optical axes of the attenuating section and the receiving and transmitting sections are coaxially aligned, compensating the vertical deformation of the movable section, in order to minimize the initial insertion loss of light as well as improve optical properties of a final product.
摘要:
Disclosed is a fishbone diffraction-type light modulator. In the fishbone diffraction-type light modulator, a lower micromirror is provided on a silicone substrate, and an upper micromirror is spaced apart from the silicone substrate and has a plurality of openings through both sides thereof. The upper micromirror and the lower micromirror deposited on the silicone substrate form pixels.
摘要:
The present invention relates to an actuator and optical attenuator using the actuator. The rotary-type comb-drive actuator includes a substrate, a movable electrode, a drive electrode, one or more vertical springs, one or more vertical spring anchors, a horizontal spring and a horizontal spring anchor. The movable electrode is arranged on a plane of the substrate to be movable in parallel to the substrate plane, and formed to have a predetermined length so as to have a comb-shaped electrode comprised of a plurality of fingers. The drive electrode is formed to have a length corresponding to that of the movable electrode, and formed to have a comb-shaped electrode that is comprised of a plurality of fingers and arranged to be interdigitated with the comb-shaped electrode of the movable electrode. The vertical springs are arranged in parallel to the substrate, and connected to be perpendicular to the movable electrode on both sides of a first end of the movable electrode. The vertical spring anchors are connected to the vertical springs to support the vertical springs. The horizontal spring has a main part connected in parallel to a longitudinal direction of the movable electrode. The horizontal spring anchor is connected to the horizontal spring to support the horizontal spring, and fixed on the substrate.
摘要:
Disclosed is a light modulator having a digital micro blaze diffraction grating. In the light modulator, a fine protrusion is formed on an edge of a lower surface of a diffraction member so that a reflective surface inclines due to the fine protrusion when the diffraction member is drawn downward.
摘要:
Disclosed herein is an interdigitation-type diffractive light modulator. In the interdigitation-type diffractive light modulator of the present invention, each of a pair of ribbons has a plurality of diffractive branches which are arranged in a comb shape, and the diffractive branches of the ribbons interdigitate with each other. Furthermore, the respective ribbons moves upwards and downwards or, alternatively, one ribbon moves upwards and downwards, so that the diffractive branches of the ribbons which interdigitate with each other form a stepped structure, thus diffracting incident light.
摘要:
The present invention relates, in general, to a light modulator having a variable blaze diffraction grating and, more particularly, to a light modulator having a variable blaze diffraction grating, in which a diffraction member rotates due to piezoelectric force so as to incline a reflective surface.