Abstract:
A method for fabricating a semiconductor device includes sequentially forming an interlayer insulating layer and a hard mask pattern including a first opening on a substrate including a lower pattern, forming a trench exposing the lower pattern in the interlayer insulating layer using the hard mask pattern, forming a liner layer including a first part formed along sidewalls and a bottom surface of the trench and a second part formed along a top surface of the hard mask pattern, forming a sacrificial pattern exposing the second part of the liner layer in the trench, removing the second part of the liner layer and the hard mask pattern using the sacrificial pattern, and after the removing of the hard mask pattern, removing the sacrificial pattern to expose the first part of the liner layer.
Abstract:
A method for manufacturing an array of thin film actuated mirrors capable of ensuring an optimum optical efficiency is disclosed. The method includes the steps of: forming a thin film sacrificial layer on top of an active matrix; forming an array of semifinished actuating structures on top of the thin film sacrificial layer, wherein each of the semifinished actuating structures includes a thin film electrodisplacive member, a second thin film electrode and an elastic member; forming selectively a polymer layer; depositing a first thin film layer on top of each of the semifinished actuating structures; removing the polymer layer, thereby forming an array of actuating structures, each of the actuating structures having a first thin film electrode and the semifinished actuating structure; and removing the thin film sacrificial layer, thereby forming the array of thin film actuated mirrors. Since the formation of the array of semifinished actuating structures is followed by the formation of the first thin film electrode, it may prevent the first thin film electrode, which also functions as a mirror, from chemically or physically damaged during the formation of the array of semifinished actuating structures, thereby ensuring the optical efficiency of the array of thin film actuated mirrors.
Abstract:
A wiring structure includes a substrate, a lower insulation layer on the substrate, a lower wiring in the lower insulation layer, a first etch-stop layer covering the lower wiring and including a metallic dielectric material, a second etch-stop layer on the first etch-stop layer and the lower insulation layer, an insulating interlayer on the second etch-stop layer, and a conductive pattern extending through the insulating interlayer, the second etch-stop layer and the first etch-stop layer and electrically connected to the lower wiring.
Abstract:
A pumping voltage generating circuit of a semiconductor memory apparatus, the pumping voltage generating circuit includes a detecting unit configured to compare a level of a pumping voltage with a level of a reference voltage to generate a detection signal, an oscillating signal generator configured to sequentially generate a first oscillating signal and a second oscillating signal in response to the detection signal, and to elevate frequencies of the first and second oscillating signals when the second oscillating signal is generated, a first pump configured to perform a pumping operation in response to the first oscillating signal, and a second pump configured to perform a pumping operation in response to the second oscillating signal, wherein output terminals of the first pump and the second pump are commonly connected, and the pumping voltage is output at the output terminals of the first pump and the second pump.
Abstract:
A test apparatus includes a test fuse unit for generating a test fuse signal in response to a test mode signal during a test time and generating a test fuse signals according to a fuse cutting after a termination of the test time, a combination signal generating unit for storing a test signal and inactivating a combination signal when the test mode signal is inactivate and for outputting the stored test signal as the combination signal when the test mode signal is activate, and a code signal generating unit for activating a test code signal when one of the test fuse signal and the combination signal is activated.
Abstract:
A method for fabricating a semiconductor device includes sequentially forming an interlayer insulating layer and a hard mask pattern including a first opening on a substrate including a lower pattern, forming a trench exposing the lower pattern in the interlayer insulating layer using the hard mask pattern, forming a liner layer including a first part formed along sidewalls and a bottom surface of the trench and a second part formed along a top surface of the hard mask pattern, forming a sacrificial pattern exposing the second part of the liner layer in the trench, removing the second part of the liner layer and the hard mask pattern using the sacrificial pattern, and after the removing of the hard mask pattern, removing the sacrificial pattern to expose the first part of the liner layer.
Abstract:
A rechargeable battery pack for portable electronic equipment is includes a battery coupled to a charge/discharge circuit and includes a a first substrate for mounting parts positioned on a high-current path and a second substrate for mounting peripheral circuits for controlling a charge/discharge of the battery. Accordingly, heat sensitive parts on low current paths may be thermally isolated from heat generating parts on high current paths.
Abstract:
A mobile device management apparatus has a policy storage unit that receives a plurality of security policies, which are classified into a plurality of profiles assigned priorities of activation and in which operating states of functions of a mobile device are defined. A management server supplies the profiles and the security policies to the mobile device. A policy implementation unit selectively activates the profiles so that control of the mobile device functions can be carried out with minimal communication, and also in response to changing events.
Abstract:
A test apparatus includes a test fuse unit for generating a test fuse signal in response to a test mode signal during a test time and generating a test fuse signals according to a fuse cutting after a termination of the test time, a combination signal generating unit for storing a test signal and inactivating a combination signal when the test mode signal is inactivate and for outputting the stored test signal as the combination signal when the test mode signal is activate, and a code signal generating unit for activating a test code signal when one of the test fuse signal and the combination signal is activated.
Abstract:
A rechargeable battery pack for portable electronic equipment is includes a battery coupled to a charge/discharge circuit and includes a a first substrate for mounting parts positioned on a high-current path and a second substrate for mounting peripheral circuits for controlling a charge/discharge of the battery. Accordingly, heat sensitive parts on low current paths may be thermally isolated from heat generating parts on high current paths.