公开(公告)号：US5726741A

公开(公告)日：1998-03-10

申请号：US668904

申请日：1996-06-24

申请人： Jong-wook Kye ,  Cheol-hong Kim ,  Tae-gyun Kim

发明人： Jong-wook Kye ,  Cheol-hong Kim ,  Tae-gyun Kim

IPC分类号： G02B27/44 ,  G03F1/00 ,  G03F1/68 ,  G03F7/20 ,  H01L21/027 ,  G03B27/42

CPC分类号： G03F7/701 ,  G03F7/70108 ,  G03F7/70158

摘要： A photolithographic projection system for transferring a predetermined pattern from a photomask to a wafer includes a radiation source and a grating mask. The radiation source projects radiation along a path through the photomask toward the wafer. The grating mask is positioned along the radiation path and is separate from the photomask. In a method for transferring a predetermined pattern from a photomask to a wafer, radiation is projected along a path through a grating mask and a photomask toward the wafer, and the grating mask is separate from the photomask.

摘要翻译： 用于将预定图案从光掩模转印到晶片的光刻投影系统包括辐射源和光栅掩模。 辐射源沿着通过光掩模的路径向晶片投射辐射。 光栅掩模沿辐射路径定位并与光掩模分开。 在将预定图案从光掩模转印到晶片的方法中，沿着通过光栅掩模和光掩模的路径朝向晶片投射辐射，并且光栅掩模与光掩模分离。

公开(公告)号：US08011749B2

公开(公告)日：2011-09-06

申请号：US12123713

申请日：2008-05-20

申请人： Sang-il Kim ,  Tae-gyun Kim ,  Tae-woon Cha ,  Sang-kwon Wee

发明人： Sang-il Kim ,  Tae-gyun Kim ,  Tae-woon Cha ,  Sang-kwon Wee

IPC分类号： B41J29/38 ,  B41J29/393 ,  G01F23/00

CPC分类号： B41J29/393

摘要： Provided are an apparatus and method for measuring the thickness of an ink layer in a pixel and a method of controlling nozzles of an inkjet head using the apparatus and method. The apparatus includes: a substrate; a plurality of pixels disposed on the substrate and filled with ink due to a printing operation; first and second electrodes corresponding to the pixels, the first and second electrodes disposed on opposite sides of each of the pixels; and a capacitance measurement circuit electrically connected to the first and second electrodes to measure the capacitance of each of the pixels.

摘要翻译： 提供了一种用于测量像素中的墨层的厚度的装置和方法，以及使用该装置和方法控制喷墨头的喷嘴的方法。 该装置包括：基板; 设置在基板上并由于打印操作而填充有墨水的多个像素; 对应于像素的第一和第二电极，第一和第二电极设置在每个像素的相对侧上; 以及电容测量电路，电连接到第一和第二电极以测量每个像素的电容。

公开(公告)号：US20060078434A1

公开(公告)日：2006-04-13

申请号：US11222816

申请日：2005-09-12

申请人： Tae-gyun Kim ,  Young-ki Hong

发明人： Tae-gyun Kim ,  Young-ki Hong

IPC分类号： F04B37/02 ,  F04F11/00

CPC分类号： F04B43/043 ,  F04B19/24 ,  F04B43/06

摘要： A simple structured thermal actuation pump for reducing energy loss is provided. The thermal actuation pump includes: a first chamber having at least one working fluid inlet and at least one working fluid outlet; a second chamber having at least one working fluid inlet and at least one working fluid outlet; and a thermoelectric element arranged between the first chamber and the second chamber and including one side being cooled and the other side being heated according to a direction of current for changing inside pressures of the first chamber and the second chamber.

摘要翻译： 提供了一种用于减少能量损失的简单结构化的热致动泵。 热致动泵包括：具有至少一个工作流体入口和至少一个工作流体出口的第一室; 具有至少一个工作流体入口和至少一个工作流体出口的第二室; 以及热电元件，其布置在所述第一室和所述第二室之间，并且包括一侧被冷却，另一侧根据用于改变所述第一室和所述第二室的内部压力的电流方向被加热。

公开(公告)号：US08764144B2

公开(公告)日：2014-07-01

申请号：US13533084

申请日：2012-06-26

申请人： Tae-gyun Kim ,  Tae-woon Cha ,  Sang-il Kim

发明人： Tae-gyun Kim ,  Tae-woon Cha ,  Sang-il Kim

IPC分类号： B41J29/38

CPC分类号： B41J2/125 ,  B41J29/393

摘要： Provided are method of controlling nozzles of an inkjet head and an apparatus for measuring the amounts of ink ejected from the nozzles of the inkjet head. The method includes: preparing a mass measuring device, which measures the mass of ink by using an oscillation change, in a pixel; ejecting ink into the pixel from a nozzle of the inkjet head, and measuring the amount of ink ejected from the nozzle by using the mass measuring device; and adjusting a voltage waveform applied to the nozzle of the inkjet head.

摘要翻译： 提供了一种控制喷墨头的喷嘴的方法和用于测量从喷墨头的喷嘴喷出的墨量的装置。 该方法包括：在像素中准备通过使用振荡变化来测量墨水质量的质量测量装置; 从喷墨头的喷嘴将墨水喷射到像素中，并且通过使用质量测量装置测量从喷嘴喷射的墨量; 以及调整施加到喷墨头的喷嘴的电压波形。

公开(公告)号：US20120268508A1

公开(公告)日：2012-10-25

申请号：US13533084

申请日：2012-06-26

申请人： Tae-gyun Kim ,  Tae-woon Cha ,  Sang-il Kim

发明人： Tae-gyun Kim ,  Tae-woon Cha ,  Sang-il Kim

IPC分类号： B41J2/195

CPC分类号： B41J2/125 ,  B41J29/393

摘要： Provided are method of controlling nozzles of an inkjet head and an apparatus for measuring the amounts of ink ejected from the nozzles of the inkjet head. The method includes: preparing a mass measuring device, which measures the mass of ink by using an oscillation change, in a pixel; ejecting ink into the pixel from a nozzle of the inkjet head, and measuring the amount of ink ejected from the nozzle by using the mass measuring device; and adjusting a voltage waveform applied to the nozzle of the inkjet head.

摘要翻译： 提供了一种控制喷墨头的喷嘴的方法和用于测量从喷墨头的喷嘴喷出的墨量的装置。 该方法包括：在像素中准备通过使用振荡变化来测量墨水质量的质量测量装置; 从喷墨头的喷嘴将墨水喷射到像素中，并且通过使用质量测量装置测量从喷嘴喷射的墨量; 以及调整施加到喷墨头的喷嘴的电压波形。

公开(公告)号：US07588307B2

公开(公告)日：2009-09-15

申请号：US11341364

申请日：2006-01-30

申请人： Young-ki Hong ,  Tae-gyun Kim ,  Jae-woo Chung

发明人： Young-ki Hong ,  Tae-gyun Kim ,  Jae-woo Chung

IPC分类号： B41J29/38 ,  B41J2/045 ,  B23P17/00

CPC分类号： B41J2/14233 ,  B41J2002/14491 ,  Y10T29/49401

摘要： A piezoelectric inkjet printhead having a channel forming plate including an ink channel having a pressure chamber coupled to a nozzle, a piezoelectric actuator including a lower electrode on the channel forming plate, a piezoelectric element on the lower electrode, and an upper electrode on the piezoelectric element, the piezoelectric actuator corresponding to the pressure chamber, an insulation element on the lower electrode and spaced apart from the piezoelectric element, a first electrode on the insulation element, and a temperature sensor on the first electrode, and a method of making the same.

摘要翻译： 一种具有通道形成板的压电喷墨打印头，该通道形成板包括具有连接到喷嘴的压力室的墨水通道，在通道形成板上包括下部电极的压电致动器，下部电极上的压电元件和压电元件 元件，对应于压力室的压电致动器，下电极上的绝缘元件并与压电元件间隔开，绝缘元件上的第一电极和第一电极上的温度传感器及其制造方法 。

公开(公告)号：US06812563B2

公开(公告)日：2004-11-02

申请号：US10198133

申请日：2002-07-19

申请人： Jeung-sang Go ,  Tae-gyun Kim ,  Kyung-il Cho

发明人： Jeung-sang Go ,  Tae-gyun Kim ,  Kyung-il Cho

IPC分类号： H01L2334

CPC分类号： H01L23/473 ,  H01L2924/0002 ,  Y10S257/93 ,  H01L2924/00

摘要： A microcooling device is provided. The microcooling device includes a substrate, a microchannel array, and a condenser. A predetermined region of a lower surface of the substrate contacts a heat source. The microchannel array is placed on the substrate so that a coolant concentrating portion is opposite to the predetermined region of the lower surface. The condenser fixes the microchannel array, condenses vapor generated in a process of cooling the heat source, and allows the condensed vapor to flow into the microchannel array.

摘要翻译： 提供了一个微型冷却装置。 微冷装置包括基板，微通道阵列和冷凝器。 基板的下表面的预定区域接触热源。 微通道阵列放置在基板上，使得冷却剂集中部分与下表面的预定区域相对。 冷凝器固定微通道阵列，冷凝在冷却热源的过程中产生的蒸气，并使冷凝的蒸汽流入微通道阵列。

公开(公告)号：US07740454B2

公开(公告)日：2010-06-22

申请号：US11222816

申请日：2005-09-12

申请人： Tae-gyun Kim ,  Young-ki Hong

发明人： Tae-gyun Kim ,  Young-ki Hong

IPC分类号： F04B19/24

CPC分类号： F04B43/043 ,  F04B19/24 ,  F04B43/06

摘要： A simple structured thermal actuation pump for reducing energy loss is provided. The thermal actuation pump includes: a first chamber having at least one working fluid inlet and at least one working fluid outlet; a second chamber having at least one working fluid inlet and at least one working fluid outlet; and a thermoelectric element arranged between the first chamber and the second chamber and including one side being cooled and the other side being heated according to a direction of current for changing inside pressures of the first chamber and the second chamber.

摘要翻译： 提供了一种用于减少能量损失的简单结构化的热致动泵。 热致动泵包括：具有至少一个工作流体入口和至少一个工作流体出口的第一室; 具有至少一个工作流体入口和至少一个工作流体出口的第二室; 以及热电元件，其布置在所述第一室和所述第二室之间，并且包括一侧被冷却，另一侧根据用于改变所述第一室和所述第二室的内部压力的电流方向被加热。

公开(公告)号：US20090020845A1

公开(公告)日：2009-01-22

申请号：US12106671

申请日：2008-04-21

申请人： Dong-suk Shin ,  Moon-han Park ,  Joo-won Lee ,  Jae-yoon Yoo ,  Tae-gyun Kim

发明人： Dong-suk Shin ,  Moon-han Park ,  Joo-won Lee ,  Jae-yoon Yoo ,  Tae-gyun Kim

IPC分类号： H01L21/762 ,  H01L23/00

CPC分类号： H01L21/3105 ,  H01L21/31155 ,  H01L21/76232

摘要： A semiconductor device includes a substrate having a trench, a sidewall liner that covers inner walls of the trench, a doped oxide film liner on the sidewall liner in the trench, and a gap-fill insulating film that buries the trench on the doped oxide film liner. In order to form the doped oxide film liner, an oxide film liner is doped with a dopant under a plasma atmosphere. Related methods are also disclosed.

摘要翻译： 半导体器件包括具有沟槽的衬底，覆盖沟槽的内壁的侧壁衬套，沟槽中的侧壁衬里上的掺杂氧化膜衬垫，以及将掺杂氧化物膜上的沟槽埋入的间隙填充绝缘膜 衬垫。 为了形成掺杂的氧化物膜衬垫，在等离子体气氛下，掺杂有氧化物膜衬垫。 还公开了相关方法。

公开(公告)号：US20070171265A1

公开(公告)日：2007-07-26

申请号：US11518929

申请日：2006-09-12

申请人： Young-ki Hong ,  Tae-gyun Kim

发明人： Young-ki Hong ,  Tae-gyun Kim

IPC分类号： B41J2/175

CPC分类号： B41J2/17556 ,  B41J2/17513 ,  B41J2002/17516

摘要： An ink supply apparatus of an inkjet printing system includes an ink tank including a pressure port and an ink supply opening connected to a print head, a flexible ink package connected to the ink supply opening to accommodate ink, and a pressure supply device to supply a purging pressure to the ink package by supplying a pressure fluid to the ink tank.

摘要翻译： 一种喷墨打印系统的墨水供应装置，包括一个墨水盒，该墨水盒包括一个连接到打印头的压力端口和一个墨水供应开口，连接到墨水供应开口以容纳墨水的柔性墨水包装盒，以及一个供应装置 通过向墨水罐供应压力流体来吹扫墨水包装的压力。