公开(公告)号：US20060058487A1

公开(公告)日：2006-03-16

申请号：US11215303

申请日：2005-08-31

申请人： Juha Rantala ,  Jyri Paulasaari ,  Janne Kylma ,  Turo Tormanen ,  Jarkko Pietikainen ,  Nigel Hacker ,  Admir Hadzic

发明人： Juha Rantala ,  Jyri Paulasaari ,  Janne Kylma ,  Turo Tormanen ,  Jarkko Pietikainen ,  Nigel Hacker ,  Admir Hadzic

IPC分类号： C08G77/04 ,  C08L83/04 ,  B05D3/02 ,  B32B9/04

CPC分类号： C09D183/14 ,  C08G77/50 ,  H01B3/46 ,  H01L21/02126 ,  H01L21/02282 ,  H01L21/3122 ,  H01L21/76822 ,  H01L21/76837 ,  H01L23/5329 ,  H01L2924/0002 ,  H01L2924/12044 ,  Y10T428/31663 ,  H01L2924/00

摘要： A thin film comprising a composition obtained by polymerizing a monomer having the formula I: wherein: R1 is a hydrolysable group, R2 is a polarizability reducing organic group, and R3 is a bridging hydrocarbon group, to form a siloxane material. The invention also concerns methods for producing the thin films. The thin film can be used a low k dielectric in integrated circuit devices. The novel dielectric materials have excellent properties of planarization resulting in good local and global planarity on top a semiconductor substrate topography, which reduces or eliminates the need for chemical mechanical planarization after dielectric and oxide liner deposition.

摘要翻译： 一种薄膜，其包含通过聚合具有式I的单体获得的组合物：