公开(公告)号：US20120082367A1

公开(公告)日：2012-04-05

申请号：US13237993

申请日：2011-09-21

申请人： Jung-hoon Byun ,  Yong-min Cho ,  Soo-bok Chin ,  Jae-kwan Park ,  Seok-woo Nam ,  Tae-yong Lee ,  Kee-Hong Lee ,  Young-min Kim

发明人： Jung-hoon Byun ,  Yong-min Cho ,  Soo-bok Chin ,  Jae-kwan Park ,  Seok-woo Nam ,  Tae-yong Lee ,  Kee-Hong Lee ,  Young-min Kim

IPC分类号： G06K9/48 ,  G06K9/00 ,  G06K9/36

CPC分类号： G06T7/0002 ,  G06T2207/10016 ,  G06T2207/10061 ,  G06T2207/30148 ,  G06T2207/30168

摘要： A method forms an ultimate or final image of a sample by selecting some of a plurality of image frames and integrating the selected frames. The method includes providing a semiconductor device including a region of interest and a peripheral region; obtaining a plurality of image frames each including a region of interest image and a peripheral region image respectively corresponding to the region of interest and the peripheral region; selecting at least some of the plurality of image frames based on a contrast between the region of interest image and the peripheral region image; and obtaining an image of the semiconductor device by integrating the selected image frames.

摘要翻译： 方法通过选择多个图像帧中的一些并且对所选择的帧进行积分来形成样本的最终或最终图像。 该方法包括提供包括感兴趣区域和周边区域的半导体器件; 获得各自包括分别对应于感兴趣区域和周边区域的感兴趣区域图像和周边区域图像的多个图像帧; 基于感兴趣区域与外围区域图像之间的对比度来选择多个图像帧中的至少一些; 以及通过对所选择的图像帧进行积分来获得半导体器件的图像。