Abstract:
A lens module includes a lens body; a lens holding member that movably holds the lens body along an optical axis of the lens body without tilting the optical axis; a displacement element that has a flat-plate shape of which one end edge on a side of the lens body along the optical axis is disposed as a free end and the free end is displaced to freely approach the lens body by applying a voltage; and a push-up member that is disposed on the free end of the displacement element and is inserted on one end surface side of the lens body, which is perpendicular to the optical axis, by the approach towards the lens body of the displacement element so as to push up the lens body in the optical axis direction.
Abstract:
An etching process is provided. The etching process allows etching and removing with a sufficient rate, from a fine etching opening, a sacrificing layer and thereby can form a structure that has a large hollow portion or a complicatedly constituted space portion and furthermore a structure high in the aspect ratio with excellent shape accuracy and without deteriorating a surface state. In the etching process, a work is exposed to a processing fluid that contains an etching reaction species and the processing fluid is maintained in a state where it is flowed relative to the work. In this state, on a surface of the work, illumination light is intermittently illuminated to heat the work intermittently. Thereby, the processing fluid in the neighborhood of the work is intermittently heated and thereby expanded and contracted to etch. As the processing fluid, a substance that contains an etching reaction species and is in a super critical state can be preferably used.
Abstract:
A lens module includes a lens body; a lens holding member that movably holds the lens body along an optical axis of the lens body without tilting the optical axis; a displacement element that has a flat-plate shape of which one end edge on a side of the lens body along the optical axis is disposed as a free end and the free end is displaced to freely approach the lens body by applying a voltage; and a push-up member that is disposed on the free end of the displacement element and is inserted on one end surface side of the lens body, which is perpendicular to the optical axis, by the approach towards the lens body of the displacement element so as to push up the lens body in the optical axis direction.
Abstract:
A compact and thin lens module that uses a flat-plate-shaped displacement device to drive a lens, and a compact, thin imaging apparatus and electronic system using the lens module.
Abstract:
A compact and thin lens module that uses a flat-plate-shaped displacement device to drive a lens, and a compact, thin imaging apparatus and electronic system using the lens module.