-
公开(公告)号：US20140023265A1
公开(公告)日：2014-01-23
申请号：US13981963
申请日：2011-12-07
IPC分类号： G06T7/00
CPC分类号： G06T7/0004 , G06T7/001 , G06T2207/10061 , G06T2207/30148 , H01L22/12
摘要： It is an object of the present invention to provide a semiconductor inspection apparatus capable of well carrying out position alignment and correctly determining whether the position alignment has been carried out successfully or has ended in a failure without operator interventions even if an inspected image is an image having few characteristics as is the case with a repetitive pattern or the inspected image is an image having a complicated shape.The semiconductor inspection apparatus includes means for imaging a shape on a wafer or on an exposure mask; means for storing an image inspected by the imaging means; means for storing design data of the semiconductor circuit corresponding to a position on the wafer or on the exposure mask which are to be imaged by the imaging means; means for storing a design-data image obtained as a result of converting the design data into an image; means for generating a design-data ROI image by converting an interest drawing region found from a relative crude-density relation of a shape included in the design-data image into an image; and a position alignment section configured to carry out position alignment on the inspected image and the design-data image. The semiconductor inspection apparatus makes use of the design-data ROI image in order to identify a position at which the inspected image and the design-data image match each other or compute the degree of coincidence.
摘要翻译： 本发明的目的是提供一种半导体检查装置，即使被检查的图像是图像，也能够良好地执行位置对准并且正确地确定位置对准是否已经成功地执行或者在没有操作者干预的情况下已经结束 具有与重复图案的情况相同的特性，或被检查图像是具有复杂形状的图像。 半导体检查装置包括用于对晶片或曝光掩模上的形状进行成像的装置; 用于存储由成像装置检查的图像的装置; 用于存储对应于要由成像装置成像的晶片或曝光掩模上的位置的半导体电路的设计数据的装置; 用于存储作为将设计数据转换为图像而获得的设计数据图像的装置; 用于通过将从所述设计数据图像中包含的形状的相对粗密度关系中找到的兴趣绘制区域转换为图像来生成设计数据ROI图像的装置; 以及位置对准部，被配置为在被检查图像和设计数据图像上执行位置对准。 半导体检查装置利用设计数据ROI图像来识别被检查图像和设计数据图像彼此匹配的位置或计算符合度。
-
公开(公告)号：US10535129B2
公开(公告)日：2020-01-14
申请号：US13981963
申请日：2011-12-07
IPC分类号： G06T7/00
摘要： It is an object of the present invention to provide a semiconductor inspection apparatus capable of well carrying out position alignment and correctly determining whether the position alignment has been carried out successfully or has ended in a failure without operator interventions even if an inspected image is an image having few characteristics as is the case with a repetitive pattern or the inspected image is an image having a complicated shape.The semiconductor inspection apparatus includes means for imaging a shape on a wafer or on an exposure mask; means for storing an image inspected by the imaging means; means for storing design data of the semiconductor circuit corresponding to a position on the wafer or on the exposure mask which are to be imaged by the imaging means; means for storing a design-data image obtained as a result of converting the design data into an image; means for generating a design-data ROI image by converting an interest drawing region found from a relative crude-density relation of a shape included in the design-data image into an image; and a position alignment section configured to carry out position alignment on the inspected image and the design-data image. The semiconductor inspection apparatus makes use of the design-data ROI image in order to identify a position at which the inspected image and the design-data image match each other or compute the degree of coincidence.
-
3.发明授权公开(公告)号：US08971627B2
公开(公告)日：2015-03-03
申请号：US13696260
申请日：2011-03-17
CPC分类号： G06K9/6201 , G01B11/00 , G01B15/00 , G06K9/6202 , G06T7/001 , G06T7/74 , G06T2207/30148 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： The present invention is a template matching processing device capable of evaluating a similarity degree which supports even a case of intensive morphological change between a design image and a photographic image. In the template matching processing device, matching processing between the design image and the photographic image is performed, a partial design image is obtained by clipping a portion having the highest correlation (step 101), and processing for deforming the photographic image in accordance with the clipped design image (steps 102 to 105) is performed, so that correlation between the deformed image obtained and the design image is taken to be set as the similarity degree.
摘要翻译： 本发明是一种模拟匹配处理装置，其能够评价即使在设计图像和摄影图像之间形成密集的情况的情况下也能够支持的相似度。 在模板匹配处理装置中，进行设计图像与摄影图像之间的匹配处理，通过剪切具有最高相关性的部分（步骤101）获得部分设计图像，以及根据 执行剪辑设计图像（步骤102至105），使得获得的变形图像与设计图像之间的相关性被设置为相似度。
-
4.发明申请公开(公告)号：US20130114898A1
公开(公告)日：2013-05-09
申请号：US13696260
申请日：2011-03-17
IPC分类号： G06K9/62
CPC分类号： G06K9/6201 , G01B11/00 , G01B15/00 , G06K9/6202 , G06T7/001 , G06T7/74 , G06T2207/30148 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： The present invention is a template matching processing device capable of evaluating a similarity degree which supports even a case of intensive morphological change between a design image and a photographic image. In the template matching processing device, matching processing between the design image and the photographic image is performed, a partial design image is obtained by clipping a portion having the highest correlation (step 101), and processing for deforming the photographic image in accordance with the clipped design image (steps 102 to 105) is performed, so that correlation between the deformed image obtained and the design image is taken to be set as the similarity degree.
摘要翻译： 本发明是一种模拟匹配处理装置，其能够评价即使在设计图像和摄影图像之间形成密集的情况的情况下也能够支持的相似度。 在模板匹配处理装置中，进行设计图像与摄影图像之间的匹配处理，通过剪切具有最高相关性的部分（步骤101）获得部分设计图像，以及根据 执行剪辑设计图像（步骤102至105），使得获得的变形图像与设计图像之间的相关性被设置为相似度。
-
公开(公告)号：US20120207397A1
公开(公告)日：2012-08-16
申请号：US13502823
申请日：2010-10-06
申请人： Wataru Nagatomo , Yuichi Abe , Mitsuji Ikeda
发明人： Wataru Nagatomo , Yuichi Abe , Mitsuji Ikeda
IPC分类号： G06K9/68
CPC分类号： G06K9/6203 , G06K9/6253 , G06K9/6255 , G06K9/6857 , G06T7/74 , G06T2207/10061 , G06T2207/20016 , G06T2207/30148 , H01J2237/221 , H01J2237/226
摘要： Provided is a template matching method and a template matching apparatus, where the degree of matching between a template and the actual image upon template matching is maintained at a high level, without depending on a partial appearance of a lower layer. Proposed as one embodiment, is a method and an apparatus for template matching, where either an area is set in which comparison of the template and the image is not conducted, or a second area is set inside the template where comparison different from comparison conducted in a first comparison area is to be conducted, and the template matching is conducted on the basis either of comparison excluding the non-comparison area, or of comparison using the first and second areas.
摘要翻译： 提供了一种模板匹配方法和模板匹配装置，其中模板匹配之间的模板和实际图像之间的匹配程度保持在高水平，而不依赖于较低层的部分外观。 作为一个实施例，提出了一种用于模板匹配的方法和装置，其中设置了不进行模板和图像的比较的区域，或者在模板内部设置第二区域，其中比较不同于进行比较 将进行第一比较区域，并且基于除非比较区域之外的比较或使用第一和第二区域的比较进行模板匹配。
-
公开(公告)号：US08885950B2
公开(公告)日：2014-11-11
申请号：US13502823
申请日：2010-10-06
申请人： Wataru Nagatomo , Yuichi Abe , Mitsuji Ikeda
发明人： Wataru Nagatomo , Yuichi Abe , Mitsuji Ikeda
CPC分类号： G06K9/6203 , G06K9/6253 , G06K9/6255 , G06K9/6857 , G06T7/74 , G06T2207/10061 , G06T2207/20016 , G06T2207/30148 , H01J2237/221 , H01J2237/226
摘要： Provided is a template matching method and a template matching apparatus, where the degree of matching between a template and the actual image upon template matching is maintained at a high level, without depending on a partial appearance of a lower layer. Proposed as one embodiment, is a method and an apparatus for template matching, where either an area is set in which comparison of the template and the image is not conducted, or a second area is set inside the template where comparison different from comparison conducted in a first comparison area is to be conducted, and the template matching is conducted on the basis either of comparison excluding the non-comparison area, or of comparison using the first and second areas.
摘要翻译： 提供了一种模板匹配方法和模板匹配装置，其中模板匹配之间的模板和实际图像之间的匹配程度保持在高水平，而不依赖于较低层的部分外观。 作为一个实施例，提出了一种用于模板匹配的方法和装置，其中设置了不进行模板和图像的比较的区域，或者在模板内部设置第二区域，其中比较不同于进行比较 将进行第一比较区域，并且基于除非比较区域之外的比较或使用第一和第二区域的比较进行模板匹配。
-
7.发明申请DEVICE AND METHOD FOR DETECTING ANGLE OF ROTATION FROM NORMAL POSITION OF IMAGE 有权用于检测图像正常位置的旋转角的装置和方法公开(公告)号：US20140016824A1
公开(公告)日：2014-01-16
申请号：US14005913
申请日：2011-11-09
申请人： Jun'ichi Taguchi , Mitsuji Ikeda , Yuichi Abe , Masahiro Kitazawa
发明人： Jun'ichi Taguchi , Mitsuji Ikeda , Yuichi Abe , Masahiro Kitazawa
IPC分类号： G06T7/00
CPC分类号： G06T7/0004 , G06K9/3275
摘要： An evaluation value indicative of the extent of lines in each direction is calculated for a pre-processed image in which 0s are filled in and extended in the lateral direction of the inputted image and which has been reduced ⅛th in the longitudinal direction. To obtain the angle of rotation of an image from the change in the evaluation value obtained while the angle relative to the lateral direction of the pre-processed image is modified in small steps, a parallel line is drawn for each direction, a projection is taken, and the sum of squares serves as the evaluation value of the direction. The direction having the highest evaluation value serves as the obtained direction of rotation from the normal position. The projection of each direction references the point of intersection between the parallel line drawn for each direction and the coordinate line of the horizontal axis.
摘要翻译： 对于其中0被填充并在输入图像的横向方向上延伸并且在纵向方向上减少1/8的预处理图像来计算指示每个方向的行程度的评估值。 为了在以小步骤修改相对于预处理图像的横向方向的角度获得的评估值的变化中获得图像的旋转角度，对于每个方向绘制平行线，进行投影 ，并且平方和作为方向的评价值。 具有最高评估值的方向用作从正常位置获得的旋转方向。 每个方向的投影参考在每个方向绘制的平行线与水平轴的坐标线之间的交点。
-
8.发明授权Device and method for detecting angle of rotation from normal position of image 有权从图像正常位置检测旋转角度的装置和方法公开(公告)号：US09514526B2
公开(公告)日：2016-12-06
申请号：US14005913
申请日：2011-11-09
申请人： Jun'ichi Taguchi , Mitsuji Ikeda , Yuichi Abe , Masahiro Kitazawa
发明人： Jun'ichi Taguchi , Mitsuji Ikeda , Yuichi Abe , Masahiro Kitazawa
CPC分类号： G06T7/0004 , G06K9/3275
摘要： An evaluation value indicative of the extent of lines in each direction is calculated for a pre-processed image in which 0s are filled in and extended in the lateral direction of the inputted image and which has been reduced ⅛th in the longitudinal direction. To obtain the angle of rotation of an image from the change in the evaluation value obtained while the angle relative to the lateral direction of the pre-processed image is modified in small steps, a parallel line is drawn for each direction, a projection is taken, and the sum of squares serves as the evaluation value of the direction. The direction having the highest evaluation value serves as the obtained direction of rotation from the normal position. The projection of each direction references the point of intersection between the parallel line drawn for each direction and the coordinate line of the horizontal axis.
摘要翻译： 对于其中0被填充并在输入图像的横向方向上延伸并且在纵向方向上被减小的预处理图像，计算表示每个方向的行程度的评估值。 为了在以小步骤修改相对于预处理图像的横向方向的角度获得的评估值的变化中获得图像的旋转角度，对于每个方向绘制平行线，进行投影 ，并且平方和作为方向的评价值。 具有最高评估值的方向用作从正常位置获得的旋转方向。 每个方向的投影参考在每个方向绘制的平行线与水平轴的坐标线之间的交点。
-
公开(公告)号：US20140016854A1
公开(公告)日：2014-01-16
申请号：US14001376
申请日：2011-12-12
申请人： Wataru Nagatomo , Yuichi Abe , Keisuke Nakashima
发明人： Wataru Nagatomo , Yuichi Abe , Keisuke Nakashima
IPC分类号： G06T7/00
CPC分类号： G06T7/001 , G06K9/685 , G06T2207/30148
摘要： The present invention aims at providing a pattern matching device that conducts pattern matching on an image including a plurality of regions having different features with high precision, such as a pattern image including a plurality of layers.In order to achieve the above object, the present invention proposes a pattern matching device that executes pattern matching on a target image with the use of a template formed on the basis of design data or a picked-up image, which executes the pattern matching on a first target image with the use of a first template including a plurality of different patterns, creates a second target image with the exclusion of information on a region including a specific pattern from the first target image, and determines the degree of similarity between the second target image, and a second template including pattern information other than the specific pattern.
摘要翻译： 本发明旨在提供一种图案匹配装置，其对包括具有高精度的不同特征的多个区域的图像（诸如包括多个图案的图案图像）进行图案匹配。 为了实现上述目的，本发明提出一种模式匹配装置，其使用基于设计数据形成的模板或执行模式匹配的拍摄图像来对目标图像执行模式匹配 使用包括多个不同图案的第一模板的第一目标图像从第一目标图像创建排除包括特定图案的区域的信息的第二目标图像，并且确定第二目标图像之间的相似度 目标图像，以及包括特定图案以外的图案信息的第二模板。
-
公开(公告)号：US08498489B2
公开(公告)日：2013-07-30
申请号：US12920724
申请日：2009-04-16
申请人： Yuichi Abe , Mitsuji Ikeda , Yoshimichi Sato , Yasutaka Toyoda
发明人： Yuichi Abe , Mitsuji Ikeda , Yoshimichi Sato , Yasutaka Toyoda
CPC分类号： G06T7/60 , G06K9/6203 , G06T7/74 , G06T2207/10061 , G06T2207/30148
摘要： The present invention provides a unified template matching technique which allows an adequate matching position to be provided even in an image with a distorted pattern shape and a variation in edge intensity. A correlation value contribution rate map is created for the vicinity of each of top candidate positions obtained by applying a centroid distance filter to a normalized correlation map resulting from template matching. A corrected intensity image is created from the correlation value contribution rate maps. Luminance correction is performed based on the corrected intensity image. Local matching is performed again on the vicinity of each candidate position. The candidates are then re-sorted based on candidate positions and correlation values newly obtained. Thus, even in an image with a distorted pattern shape and a variation in edge intensity, an adequate matching position can be provided in a unified manner.
摘要翻译： 本发明提供了一种统一的模板匹配技术，其允许即使在具有失真的图案形状和边缘强度的变化的图像中也能够提供足够的匹配位置。 对于通过将质心距离滤波器应用于由模板匹配得到的归一化相关图而获得的每个顶候选位置的附近，创建相关值贡献率图。 从相关值贡献率图形创建校正强度图像。 基于校正强度图像进行亮度校正。 在每个候选位置附近再次执行局部匹配。 然后基于新获得的候选位置和相关值对候选者进行重新排序。 因此，即使在具有失真的图案形状和边缘强度的变化的图像中，也能够以统一的方式提供足够的匹配位置。
-
-
-
-
-
-
-
-
-
搜索结果
137 条记录 (耗时 0.027 秒)
