公开(公告)号：US20080302656A1

公开(公告)日：2008-12-11

申请号：US11758955

申请日：2007-06-06

申请人： Jurgen Henrich ,  Andreas Sauer ,  Harald Wurster ,  Edgar Haberkorn

发明人： Jurgen Henrich ,  Andreas Sauer ,  Harald Wurster ,  Edgar Haberkorn

IPC分类号： C23C14/34

CPC分类号： C23C14/56 ,  C23C14/50

摘要： The invention relates to a vacuum coating installation with a transport system for planar substrates which are transported through a vacuum chamber. This transport system comprises several cylinders disposed in parallel. As the driving means for these cylinders one or several motors may be provided, which are located within or outside of the vacuum chamber. The coupling between the motor or the motors and the cylinders in any event takes place via magnet couplings. Since hereby no mechanical coupling established between the driving means and the cylinders, these can readily be separated from one another, which permits providing the cylinders, and with them the sputter cathodes, in a slide-in element which can be moved into and out of the vacuum chamber. If not every cylinder is provided with its own driving means, the cylinders, which are coupled with a driving means, can be connected via V-belts or the like with the other cylinders.

摘要翻译： 本发明涉及一种具有通过真空室输送的平面基板输送系统的真空镀膜装置。 该输送系统包括平行设置的多个圆筒。 作为这些气缸的驱动装置，可以设置一个或几个电动机，其位于真空室内或室外。 在任何情况下，电动机或电动机与气缸之间的联接通过磁性联轴器进行。 因此，由于驱动装置和气缸之间没有建立机械耦合，所以它们可以容易地彼此分开，这允许将气缸及其溅射阴极提供在可以移入和移出的滑入元件中 真空室。 如果不是每个气缸都设置有自己的驱动装置，则与驱动装置联接的气缸可以通过V型皮带等与其它气缸连接。

公开(公告)号：US20060037538A1

公开(公告)日：2006-02-23

申请号：US11171996

申请日：2005-06-30

申请人： Andreas Sauer ,  Harald Wurster ,  Gerhard Joos ,  Guido Hattendorf

发明人： Andreas Sauer ,  Harald Wurster ,  Gerhard Joos ,  Guido Hattendorf

IPC分类号： C23C16/00

CPC分类号： H01J37/3447 ,  H01J37/34

摘要： A holding device 12 for mounting at least one screen 9 in a coating chamber 2 of an installation for coating a substrate, especially a glass substrate, is configured such that a screen 9 held by the holding device 12 can be moved at least from a first position within the coating chamber 2 to a second position by movement of the holding device 12. The holding device 12 has means 13 of such kind as to enable the screen 9 to avoid obstructions on the way from the first position to the second position. In particular, during its movement from the first to the second position, the screen 9 is mounted slewably on the holding device 12.

摘要翻译： 用于将至少一个屏幕9安装在用于涂覆基板，特别是玻璃基板的设备的涂布室2中的保持装置12被构造成使得由保持装置12保持的屏幕9可以至少从第一 通过保持装置12的移动将涂布室2内的位置移动到第二位置。 保持装置12具有这样的装置13，使得屏幕9能够避免在从第一位置到第二位置的路上的障碍物。 特别地，在从第一位置到第二位置的移动期间，屏幕9可旋转地安装在保持装置12上。

公开(公告)号：US20070165206A1

公开(公告)日：2007-07-19

申请号：US10586513

申请日：2004-04-10

申请人： Arnold Olesch ,  Manfred Weimann ,  Dirk Remmlinger ,  Alfred Rick ,  Holger Ratschat ,  Frank Mertens ,  Andreas Sauer ,  Harald Wurster

发明人： Arnold Olesch ,  Manfred Weimann ,  Dirk Remmlinger ,  Alfred Rick ,  Holger Ratschat ,  Frank Mertens ,  Andreas Sauer ,  Harald Wurster

IPC分类号： G01P3/36

CPC分类号： B65G49/06 ,  B65G2249/02 ,  C03C17/002 ,  G01B11/06 ,  G01B11/2433 ,  G01V8/10

摘要： In order that an installation for coating panes of glass can be operated more reliably, the invention proposes a modification of the light barriers used in the installation. On the receiver side of these light barriers there is a row of individual cells which are more or less shaded according to the thickness of the glass pane passing through the ray path of the light barrier. Some cells always deliver a significantly reduced signal which can be evaluated as a reliable indication of the presence of an object in the ray path.

摘要翻译： 为了更可靠地操作玻璃板的安装，本发明提出了在安装中使用的光栅的改进。 在这些光屏障的接收器侧，存在一排单独的单元，其根据穿过光栅的光线路径的玻璃板的厚度或多或少地阴影。 一些细胞总是递送显着降低的信号，其可以被评估为在光线路径中存在物体的可靠指示。