公开(公告)号：US20150021191A1

公开(公告)日：2015-01-22

申请号：US14334986

申请日：2014-07-18

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Yongfang LI ,  Ryoichi INANAMI ,  Akiko MIMOTOGI ,  Takashi SATO ,  Masato SAITO ,  Koichi KOKUBUN

IPC: C25D5/02

CPC classification number: C25D5/02 ,  C25D11/005 ,  C25D11/022 ,  C25D11/32 ,  G03F7/0002

Abstract: According to one embodiment, a pattern transfer mold includes a base body, first and second stacked bodies, first and second electrodes. The base body includes a base unit including a first surface, a first protrusion provided on the first surface and having a first side surface, and a second protrusion provided on the first surface, separated from the first protrusion, and having a second side surface opposing the first side surface. The first stacked body is provided on the first side surface, and includes first conductive layers and a first insulating layer. The second stacked body is provided on the second side surface, separated from the first stacked body, and includes second conductive layers and a second insulating layer. The first electrode is electrically connected to at least one of the first conductive layers. The second electrode is electrically connected to at least one of the second conductive layers.

Abstract translation: 根据一个实施例，图案转印模具包括基体，第一和第二堆叠体，第一和第二电极。 基体包括基部单元，其包括第一表面，设置在第一表面上并具有第一侧表面的第一突起和设置在第一表面上的与第一突起分离的第二突起，并且具有与第一表面相对的第二侧表面 第一侧面。 第一层叠体设置在第一侧表面上，并且包括第一导电层和第一绝缘层。 第二层叠体设置在与第一层叠体分离的第二侧面上，并且包括第二导电层和第二绝缘层。 第一电极电连接到第一导电层中的至少一个。 第二电极电连接到至少一个第二导电层。

公开(公告)号：US20170235239A1

公开(公告)日：2017-08-17

申请号：US15255298

申请日：2016-09-02

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Mitsuko SHIMIZU ,  Takashi SATO ,  Akiko MIMOTOGI ,  Akiko YAMADA ,  Takeshi SUTO

IPC: G03F9/00 ,  C09K11/56 ,  C09K11/77 ,  G03F7/00

CPC classification number: G03F9/7042 ,  C09K11/565 ,  C09K11/7734 ,  G03F7/0002

Abstract: According to one embodiment, an imprint method is provided. In the imprint method, a template including a mechanoluminescent material is brought into contact with a resist on a substrate. The posture of the template is adjusted on the basis of the intensity of mechanoluminescence from the template. Light is emitted to the resist to harden the resist. The template is separated from the resist.