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公开(公告)号：US10533934B2
公开(公告)日：2020-01-14
申请号：US15408702
申请日：2017-01-18
摘要： According to one embodiment, a particle inspection system includes a voltage driving circuit which applies a driving voltage for a particle inspection to a particle inspection chip, a current-voltage conversion circuit which converts, into a voltage signal, a current signal output from the particle inspection chip when the driving voltage is applied to the particle inspection chip, a detection circuit which detects, based on the voltage signal, whether the sample liquid is introduced into a detection region of the particle inspection chip, and an analysis circuit which analyzes the fine particle, in the sample liquid based on the voltage signal. The voltage driving circuit varies the driving voltage based on the detection result of the detection circuit.
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公开(公告)号：US20180088081A1
公开(公告)日：2018-03-29
申请号：US15461891
申请日：2017-03-17
IPC分类号： G01N27/447 , C12Q1/04
CPC分类号： G01N27/44791 , B01L3/502761 , B01L2200/0668 , B01L2300/0645 , B01L2300/0816 , B01L2300/0893 , B01L2400/0421 , C12Q1/04 , G01N15/1245 , G01N2015/1006
摘要： According to one embodiment, an analysis chip for detection of particles in a sample liquid includes a substrate, a channel provided on a surface portion of the substrate, a liquid storage portion provided on a part of the channel to store the sample liquid, holes being provided at a bottom portion of the liquid storage portion to connect the liquid storage portion and the channel, and first electrodes provided in the channel or the liquid storage portion.
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公开(公告)号：US09885680B2
公开(公告)日：2018-02-06
申请号：US14848351
申请日：2015-09-09
发明人： Hiroshi Hamasaki , Michihiko Nishigaki , Yutaka Onozuka , Kentaro Kobayashi , Hiroko Miki , Naofumi Nakamura
CPC分类号： G01N27/07 , B01L3/5027 , B01L2200/0647 , B01L2300/0645 , B01L2300/0681 , B01L2300/0816 , B01L2300/0887 , B01L2400/0421 , B01L2400/086
摘要： According to one embodiment, an analysis package including an analysis chip provided on a main surface of a semiconductor substrate, the chip including a flow channel, both ends of which are open at peripheral parts of the substrate, and a microaperture which is provided in a middle of the flow channel and which allows a particle to pass therethrough, a package board on which the chip is mounted, liquid receivers provided on the package board, the liquid receivers being connected to openings, and electrodes, at least parts of which are provided on parts of bottom surfaces of the liquid receivers, the electrodes being provided at positions corresponding to an upstream side and a downstream side of the microaperture.
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公开(公告)号：US11460482B2
公开(公告)日：2022-10-04
申请号：US16815148
申请日：2020-03-11
IPC分类号： G01P15/125 , G01P15/08
摘要： According to one embodiment, a sensor includes a base body, a first movable structure body, and a first fixed structure body. The first movable structure body includes first movable electrodes. A direction from the base body toward the first movable electrodes is aligned with a first direction. A distance between the base body and the plurality of first movable electrodes is changeable. A direction from one of the first movable electrodes toward an other one of the first movable electrodes is aligned with a second direction crossing the first direction. The first fixed structure body includes first fixed electrodes. One of the first fixed electrodes is between the one of the first movable electrodes and the other one of the first movable electrodes. A first movable electrode length along the first direction is shorter than a first fixed electrode length along the first direction.
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公开(公告)号：US10908035B2
公开(公告)日：2021-02-02
申请号：US16567536
申请日：2019-09-11
发明人： Kei Masunishi , Naofumi Nakamura , Hiroaki Yamazaki , Tomohiro Saito , Fumitaka Ishibashi , Yoshihiko Kurui , Tomohiko Nagata
摘要： According to one embodiment, a pressure sensor is disclosed. The pressure sensor includes a substrate, and a first capacitor element. The first capacitor element includes a lower electrode provided on the substrate, an upper electrode disposed above the lower electrode, and a film provided over the lower electrode and upper electrode. The lower electrode and the upper electrode are between the substrate and the film. An absolute value of an amount of change in an electrostatic capacitance between the lower electrode and the upper electrode with respect to unit change in an ambient temperature of the first capacitor element is substantially zero.
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公开(公告)号：US20210041311A1
公开(公告)日：2021-02-11
申请号：US16789748
申请日：2020-02-13
发明人： Kei MASUNISHI , Naofumi Nakamura , Hiroaki Yamazaki , Tomohiro Saito , Fumitaka Ishibashi , Yoshihiko Kurui , Tomohiko Nagata
IPC分类号： G01L1/14
摘要： According to one embodiment, a pressure sensor includes a base body, a supporter, a film part, a first electrode, and a second electrode. The supporter is fixed to the base body. The film part is separated from the base body. The film part includes first, second, and third partial regions, and a rim portion. The rim portion is supported by the supporter. The second partial region is between the first partial region and the rim portion. The third partial region is between the second partial region and the rim portion. The first electrode is provided between the base body and the first partial region and between the base body and the second partial region. The first electrode is fixed to the base body. The second electrode is provided between the first electrode and the first partial region and between the first electrode and the second partial region.
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公开(公告)号：US20200300717A1
公开(公告)日：2020-09-24
申请号：US16567536
申请日：2019-09-11
发明人： Kei Masunishi , Naofumi Nakamura , Hiroaki Yamazaki , Tomohiro Saito , Fumitaka Ishibashi , Yoshihiko Kurui , Tomohiko Nagata
IPC分类号： G01L1/14
摘要： According to one embodiment, a pressure sensor is disclosed. The pressure sensor includes a substrate, and a first capacitor element. The first capacitor element includes a lower electrode provided on the substrate, an upper electrode disposed above the lower electrode, and a film provided over the lower electrode and upper electrode. The lower electrode and the upper electrode are between the substrate and the film. An absolute value of an amount of change in an electrostatic capacitance between the lower electrode and the upper electrode with respect to unit change in an ambient temperature of the first capacitor element is substantially zero.
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公开(公告)号：US10337976B2
公开(公告)日：2019-07-02
申请号：US14732399
申请日：2015-06-05
摘要： According to one embodiment, a microanalysis chip includes a substrate, a flow channel in which a sample liquid is allowed to flow, the flow channel being provided on a main surface side of the substrate, a reservoir in which the sample liquid is allowed to be stored, the reservoir being provided on a main surface of the substrate, including a bank having a go-around shape and further including a liquid introduction inlet for connection to an end of the flow channel, the liquid introduction inlet being provided on the main surface of the substrate in the bank, and a filter which is provided between the liquid introduction inlet and the end of the flow channel and includes a first micropore for allowing passage of a fine particle in the sample liquid.
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公开(公告)号：US09914637B2
公开(公告)日：2018-03-13
申请号：US15250519
申请日：2016-08-29
发明人： Akira Fujimoto , Naofumi Nakamura , Tamio Ikehashi
CPC分类号： B81B3/0075 , B81B2201/0221 , B81B2201/0235 , B81B2203/0307 , B81B2203/0315 , B81B2207/015 , B81C1/00293 , B81C1/00674 , B81C2201/0123 , B81C2201/0132 , B81C2201/053 , B81C2203/0136 , B81C2203/0145
摘要： According to one embodiment, an electronic device includes a base region, an element portion located on the base region, the element portion including a movable portion, and a protective film overlying the element portion and forming a cavity on an inner side of the protective film. The protective film includes a first protective layer and a second protective layer located on the first protective layer. A hole extends in a direction parallel to a main surface of the base region, and the second protective layer covers the hole.
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公开(公告)号：US11214481B2
公开(公告)日：2022-01-04
申请号：US16808499
申请日：2020-03-04
发明人： Fumitaka Ishibashi , Naofumi Nakamura , Hiroaki Yamazaki , Tomohiro Saito , Tomohiko Nagata , Kei Masunishi , Yoshihiko Kurui
IPC分类号： B81B3/00
摘要： According to one embodiment, a MEMS element includes a base body, a supporter, a film part, a first electrode, a second electrode, and an insulating member. The supporter is fixed to the base body. The film part is separated from the base body in a first direction and supported by the supporter. The first electrode is fixed to the base body and provided between the base body and the film part. The second electrode is fixed to the film part and provided between the first electrode and the film part. The insulating member includes a first insulating region and a second insulating region. The first insulating region is provided between the first electrode and the second electrode. A first gap is provided between the first insulating region and the second electrode. The second insulating region does not overlap the first electrode in the first direction.
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