公开(公告)号：US20140020721A1

公开(公告)日：2014-01-23

申请号：US13941836

申请日：2013-07-15

Applicant: Tokyo Electron Limited ,  Kabushiki Kaisha Toshiba

Inventor： Hidekazu HAYASHI ,  Yohei SATO ,  Hisashi OKUCHI ,  Hiroshi TOMITA ,  Kazuyuki MITSUOKA ,  Gen YOU ,  Hiroki OHNO ,  Takehiko ORII ,  Takayuki TOSHIMA

IPC: H01L21/02

CPC classification number: H01L21/02101 ,  B08B7/0021 ,  H01L21/02041 ,  H01L21/02057 ,  H01L21/67017 ,  H01L21/67051 ,  H01L21/67109

Abstract: A substrate processing method and apparatus for preventing evaporation of an anti-drying fluorine-containing organic solvent from a substrate during transportation of the substrate into a processing container and can prevent decomposition of a fluorine-containing organic solvent in the processing container. A substrate, the surface of which is covered with a first fluorine-containing organic solvent, is carried into a processing container. The first fluorine-containing organic solvent is removed from the substrate surface by forming a high-pressure fluid atmosphere of a mixture of the first fluorine-containing organic solvent and a second fluorine-containing organic solvent, having a lower boiling point than the first fluorine-containing organic solvent, in the processing container e.g. by supplying a high-pressure fluid of the second fluorine-containing organic solvent into the processing container. Thereafter, a fluid in the state of a high-pressure fluid or a gas is discharged from the processing container to obtain the substrate in the dried state.

Abstract translation: 一种基材处理方法和装置，用于在将基材输送到处理容器中时防止基材的防干燥含氟有机溶剂的蒸发，并且可以防止处理容器中的含氟有机溶剂的分解。 其表面被第一含氟有机溶剂覆盖的基材被携带到处理容器中。 通过形成第一含氟有机溶剂和第二含氟有机溶剂的混合物的高压流体气氛，第一含氟有机溶剂的沸点低于第一氟 在处理容器中，例如， 通过将第二含氟有机溶剂的高压流体供给到处理容器中。 此后，将处于高压流体或气体状态的流体从处理容器排出，从而获得处于干燥状态的基板。

公开(公告)号：US20170098659A1

公开(公告)日：2017-04-06

申请号：US15071006

申请日：2016-03-15

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Yasuhito YOSHIMIZU ,  Satoshi WAKATSUKI ,  Yohei SATO ,  Keiichi SAWA

IPC: H01L27/115 ,  H01L21/28 ,  H01L21/311 ,  H01L23/528 ,  H01L21/02

CPC classification number: H01L27/11582 ,  H01L21/02164 ,  H01L21/0217 ,  H01L21/28282 ,  H01L21/31111 ,  H01L21/764

Abstract: According to one embodiment, the plurality of charge storage films are separated in a stacking direction with a second air gap interposed. The plurality of insulating films are provided on side surfaces of electrode layers opposing the charge storage films, on portions of surfaces of the electrode layers continuous from the side surfaces and opposing a first air gap between the electrode layers, and on corners of the electrode layers between the portions and the side surfaces. The plurality of insulating films are divided in the stacking direction with a third air gap interposed and without the charge storage films being interposed. The third air gap communicates with the first air gap and the second air gap between the first air gap and the second air gap.

公开(公告)号：US20180308598A1

公开(公告)日：2018-10-25

申请号：US16017437

申请日：2018-06-25

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Hirofumi OKABE ,  Masaaki KANEKO ,  Tatsuaki SATO ,  Tetsuo MOTOHASHI ,  Toshiaki SUGIMORI ,  Rie ARAI ,  Yohei SATO

IPC: G21F9/16 ,  G21F9/06 ,  C04B28/04

CPC classification number: G21F9/165 ,  C04B28/04 ,  C04B40/0039 ,  C04B2111/00767 ,  G21F9/06 ,  G21F9/08 ,  G21F9/162

Abstract: A method for processing a radioactive liquid waste containing boron of the present invention includes: a molar ratio control step of adding an alkali metal or an alkali metal compound to a radioactive liquid waste containing boron to control an alkali metal/boron molar ratio in the radioactive liquid waste to be 0.8 or more; a drying step of drying the radioactive liquid waste having the controlled molar-ratio using a dryer to form a powdered waste; a dissolving step of mixing the powdered waste with kneading water to prepare a solution; and a kneading step of adding a hydraulic inorganic solidifying material to the solution, and kneading the hydraulic inorganic solidifying material and the solution for solidification.