公开(公告)号：US20130200041A1

公开(公告)日：2013-08-08

申请号：US13831007

申请日：2013-03-14

Applicant: Kabushiki Kaisha Toshiba

Inventor： Yoshiyuki KAMATA ,  Akira KIKITSU

IPC: G11B3/70

CPC classification number: G11B3/70 ,  B82Y10/00 ,  C03B11/082 ,  G11B5/743 ,  G11B5/746 ,  G11B5/82 ,  G11B5/855 ,  G11B5/865

Abstract: A method for manufacturing a glass stamper includes the following steps. First, a diamond film is formed on a substrate. A resist is applied onto the diamond film and a pattern is formed by performing electron beam lithography and development. The diamond film is etched with any one of oxygen and Ar gas using the pattern on the resist as a mask, thereby transferring the pattern to the diamond film. The resist and the substrate are removed to fabricate a diamond mold. Then, a glass stamper is manufactured by glass molding using the diamond mold.

Abstract translation: 一种制造玻璃压模的方法包括以下步骤。 首先，在基板上形成金刚石膜。 将抗蚀剂施加到金刚石膜上，并通过进行电子束光刻和显影形成图案。 使用抗蚀剂上的图案作为掩模，用氧气和Ar气体中的任何一种蚀刻金刚石膜，从而将图案转移到金刚石膜。 去除抗蚀剂和基材以制造金刚石模具。 然后，使用金刚石模具通过玻璃成型制造玻璃压模。

公开(公告)号：US20140138354A1

公开(公告)日：2014-05-22

申请号：US14083592

申请日：2013-11-19

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Yasuaki OOTERA ,  Yoshiyuki KAMATA ,  Naoko KIHARA ,  Yoshiaki KAWAMONZEN

IPC: B29C59/02

CPC classification number: B29C59/026 ,  G03F7/0002 ,  G03F7/027 ,  G03F7/038

Abstract: An imprint method according to this embodiment includes preparing a mold having a recessed portion, filling the recessed portion with a mold non-reactive material, pressing the mold against a resist which is applied on a base material, curing the resist in a state that the mold is pressed, and separating the mold from the base material. The mold non-reactive material is a material which does not chemically react with a material of the mold. By curing of the resist, the resist and the mold non-reactive material are coupled. When the mold is separated from the base material, the resist and the mold non-reactive material are left on the base material.

Abstract translation: 根据本实施例的压印方法包括制备具有凹陷部分的模具，用模具非反应性材料填充凹部，将模具压在施加在基材上的抗蚀剂上，使该抗蚀剂在 模具被压制，并将模具与基材分离。 模具非反应性材料是不与模具的材料发生化学反应的材料。 通过固化抗蚀剂，抗蚀剂和模具非反应性材料被连接。 当模具与基材分离时，抗蚀剂和模具非反应性材料留在基材上。

公开(公告)号：US20140030554A1

公开(公告)日：2014-01-30

申请号：US13912519

申请日：2013-06-07

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Akira KIKITSU ,  Naoko KIHARA ,  Yoshiyuki KAMATA ,  Hiroyuki HIEDA

IPC: G11B5/82 ,  G11B5/84

CPC classification number: G11B5/84 ,  G11B5/743 ,  G11B5/746 ,  G11B5/82 ,  G11B5/855

Abstract: In one embodiment, there are provided: a substrate; a data area disposed on the substrate and having a plurality of first magnetic dots arrayed in lines in mutually different first, second, and third directions; and a boundary magnetic part having a plurality of first magnetic portions arrayed in a line in the third direction and each having a length longer than that of the first magnetic dot in the third direction, and a second magnetic dot disposed between the first magnetic portions and disposed on extensions in the first and second directions of the first magnetic dots, and disposed along with the data area on the substrate.

Abstract translation: 在一个实施例中，提供：衬底; 数据区域，设置在所述基板上，并且具有在相互不同的第一，第二和第三方向上排列成行的多个第一磁性点; 以及边界磁性部分，具有多个第一磁性部分，沿着第三方向排成一行，并且每个第一磁性部分的长度都大于第三方向上的第一磁性点的长度;以及第二磁性点，设置在第一磁性部分和 设置在第一磁性点的第一和第二方向上的延伸部上，并与数据区域一起设置在基板上。

公开(公告)号：US20140374380A1

公开(公告)日：2014-12-25

申请号：US14167464

申请日：2014-01-29

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Masahiro KANAMARU ,  Yoshiyuki KAMATA ,  Ryosuke YAMAMOTO ,  Takeshi OKINO ,  Akira KIKITSU ,  Katsuya SUGAWARA ,  Yasuaki OOTERA ,  Tomoyuki MAEDA

IPC: B29C59/02

CPC classification number: G11B5/855 ,  B29C33/00 ,  B29C33/3857 ,  B29C45/372 ,  B29C2033/426 ,  G03F7/0002 ,  G11B5/746 ,  G11B5/82 ,  H01L21/76817

Abstract: A stamper of an embodiment includes: a base portion having a main surface; and a plurality of guides arranged on the main surface in mutually different first and second directions and serving as references of arrangement of a plurality of self-assembled dots. A distance between the guides in a third direction is within a range of an integer m1±0.05 times of a pitch of the plural self-assembled dots. The third direction corresponds to a third vector obtained by combining a first vector corresponding to the arrangement of the guides in the first direction and a second vector corresponding to the arrangement of the guides in the second direction. A distance between the plural guides in the first direction falls out of a range of an integer m2±0.15 times of the pitch of the plural self-assembled dots.

Abstract translation: 实施例的压模包括：具有主表面的基部; 以及在相互不同的第一和第二方向上布置在主表面上的多个引导件，并且用作多个自组装点的布置的参考。 导向件之间的距离在第三方向上在多个自组装点的间距的整数m1±0.05倍的范围内。 第三方向对应于通过组合与第一方向上的引导件的布置相对应的第一矢量和对应于第二方向上的引导件的布置的第二矢量而获得的第三矢量。 第一方向上的多个引导件之间的距离落在多个自组装点的间距的整数m2±0.15倍的范围内。

公开(公告)号：US20150102008A1

公开(公告)日：2015-04-16

申请号：US14576001

申请日：2014-12-18

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Akira KIKITSU ,  Naoko KIHARA ,  Yoshiyuki KAMATA ,  Hiroyuki HIEDA

IPC: G11B5/84 ,  G11B5/74 ,  G11B5/855

CPC classification number: G11B5/84 ,  G11B5/743 ,  G11B5/746 ,  G11B5/82 ,  G11B5/855

Abstract: In one embodiment, there are provided: a substrate; a data area disposed on the substrate and having a plurality of first magnetic dots arrayed in lines in mutually different first, second, and third directions; and a boundary magnetic part having a plurality of first magnetic portions arrayed in a line in the third direction and each having a length longer than that of the first magnetic dot in the third direction, and a second magnetic dot disposed between the first magnetic portions and disposed on extensions in the first and second directions of the first magnetic dots, and disposed along with the data area on the substrate.

Abstract translation: 在一个实施例中，提供：衬底; 数据区域，设置在所述基板上，并且具有在相互不同的第一，第二和第三方向上以行排列的多个第一磁性点; 以及边界磁性部分，具有多个第一磁性部分，沿着第三方向排成一行，并且每个第一磁性部分的长度都大于第三方向上的第一磁性点的长度，以及设置在第一磁性部分和 设置在第一磁性点的第一和第二方向上的延伸部上，并与数据区域一起设置在基板上。

公开(公告)号：US20140097152A1

公开(公告)日：2014-04-10

申请号：US13930262

申请日：2013-06-28

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Hiroyuki HIEDA ,  Yoshiyuki KAMATA ,  Naoko KIHARA ,  Akira KIKITSU ,  Ryosuke YAMAMOTO

IPC: G03F7/34

CPC classification number: G03F7/343 ,  G03F7/0002

Abstract: A self-assembled pattern forming method in an embodiment includes: forming a guide pattern on a substrate; forming a layer of a first polymer; filling a first block copolymer; and phase-separating the first block copolymer. The guide pattern includes a first recessed part having a depth T and a diameter D smaller than the depth T, and a second recessed part having a width larger than double of the diameter D. The first block copolymer has the first polymer and a second polymer which are substantially the same in volume fraction. By phase-separating the first block copolymer, a cylinder structure and a lamellar structure are obtained.

Abstract translation: 实施方式中的自组装图案形成方法包括：在基板上形成引导图案; 形成第一聚合物层; 填充第一嵌段共聚物; 并分相第一嵌段共聚物。 引导图案包括具有深度T和直径D小于深度T的第一凹陷部分，以及具有大于直径D的两倍的宽度的第二凹陷部分。第一嵌段共聚物具有第一聚合物和第二聚合物 其体积分数基本相同。 通过相分离第一嵌段共聚物，获得圆筒结构和层状结构。