公开(公告)号：US20210297600A1

公开(公告)日：2021-09-23

申请号：US17195614

申请日：2021-03-08

Applicant: KLA Corporation

Inventor： Bryant Mantiply ,  Xiumei Liu ,  Matthew Giusti ,  Kai Cao ,  Richard Wallingford

IPC: H04N5/232 ,  G06T7/00

Abstract: Methods and systems for determining focus settings for use in a specimen scan are provided. One method includes generating a focus map defined as values of best focus as a function of position on a specimen using output generated in one or more pre-focus swaths scanned on the specimen by an output acquisition subsystem configured to direct energy to a specimen, to detect energy from the specimen, and to generate output responsive to the detected energy. The method also includes interpolating the focus map to generate focus settings for a scan performed on the specimen during a process and storing information for the generated focus settings for use in the scan performed on the specimen during the process.

公开(公告)号：US11330164B2

公开(公告)日：2022-05-10

申请号：US17195614

申请日：2021-03-08

Applicant: KLA Corporation

Inventor： Bryant Mantiply ,  Xiumei Liu ,  Matthew Giusti ,  Kai Cao ,  Richard Wallingford

IPC: H04N5/232 ,  G06T7/00

Abstract: Methods and systems for determining focus settings for use in a specimen scan are provided. One method includes generating a focus map defined as values of best focus as a function of position on a specimen using output generated in one or more pre-focus swaths scanned on the specimen by an output acquisition subsystem configured to direct energy to a specimen, to detect energy from the specimen, and to generate output responsive to the detected energy. The method also includes interpolating the focus map to generate focus settings for a scan performed on the specimen during a process and storing information for the generated focus settings for use in the scan performed on the specimen during the process.