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公开(公告)号：US11899338B2
公开(公告)日：2024-02-13
申请号：US17991198
申请日：2022-11-21
Applicant: KLA Corporation
Inventor： Yung-Ho Alex Chuang , Kelly Mauser , Baigang Zhang , Xuefeng Liu , John Fielden , Yinying Xiao-Li , Elena Loginova
CPC classification number: G02F1/3534 , G01N21/4738 , G02F1/3507 , G02F1/3542 , G02F1/3548 , G02F1/3551 , G02F1/37 , G02F1/392 , G01N21/9501 , G01N2201/06113 , G02F2203/11 , H01S3/1625 , H01S3/1636
Abstract: A nonlinear crystal including stacked strontium tetraborate SrB4O7 (SBO) crystal plates that are cooperatively configured to create a periodic structure for quasi-phase-matching (QPM) is used in the final frequency doubling stage of a laser assembly to generate laser output light having a wavelength in the range of about 180 nm to 200 nm. One or more fundamental laser beams are frequency doubled, down-converted and/or summed using one or more frequency conversion stages to generate an intermediate frequency light with a corresponding wavelength in the range of about 360 nm to 400 nm, and then the final frequency converting stage utilizes the nonlinear crystal to double the frequency of the intermediate frequency light to generate the desired laser output light at high power. Methods, inspection systems, lithography systems and cutting systems incorporating the laser assembly are also described.
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公开(公告)号：US20240426021A1
公开(公告)日：2024-12-26
申请号：US18588822
申请日：2024-02-27
Applicant: KLA Corporation
Inventor： Kelly Mauser , Yung-Ho Alex Chuang , Baigang Zhang , Xuefeng Liu , John Fielden , Elena Loginova Casey
Abstract: A method for growing a periodically-poled nonlinear crystal may include placing a seed crystal into a melt to form a seed crystal melt mixture, where the seed crystal may include at least one of strontium tetraborate (SBO) or lithium triborate (LBO), and where the melt includes at least one of a mixture of Sr, B, and O or a mixture of Li, B, and O. The method may further include heating the seed crystal melt mixture to a predetermined temperature until the periodically-poled nonlinear crystal forms.
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公开(公告)号：US20230185158A1
公开(公告)日：2023-06-15
申请号：US17991198
申请日：2022-11-21
Applicant: KLA Corporation
Inventor： Yung-Ho Alex Chuang , Kelly Mauser , Baigang Zhang , Xuefeng Liu , John Fielden , Yinying Xiao-Li , Elena Loginova
CPC classification number: G02F1/3534 , G01N21/4738 , G02F1/37 , G02F1/392 , G02F1/3507 , G02F1/3542 , G02F1/3548 , G02F1/3551 , H01S3/1625
Abstract: A nonlinear crystal including stacked strontium tetraborate SrB4O7 (SBO) crystal plates that are cooperatively configured to create a periodic structure for quasi-phase-matching (QPM) is used in the final frequency doubling stage of a laser assembly to generate laser output light having a wavelength in the range of about 180 nm to 200 nm. One or more fundamental laser beams are frequency doubled, down-converted and/or summed using one or more frequency conversion stages to generate an intermediate frequency light with a corresponding wavelength in the range of about 360 nm to 400 nm, and then the final frequency converting stage utilizes the nonlinear crystal to double the frequency of the intermediate frequency light to generate the desired laser output light at high power. Methods, inspection systems, lithography systems and cutting systems incorporating the laser assembly are also described.
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