公开(公告)号：US20230185158A1

公开(公告)日：2023-06-15

申请号：US17991198

申请日：2022-11-21

申请人： KLA Corporation

发明人： Yung-Ho Alex Chuang ,  Kelly Mauser ,  Baigang Zhang ,  Xuefeng Liu ,  John Fielden ,  Yinying Xiao-Li ,  Elena Loginova

IPC分类号： G02F1/35 ,  G02F1/355 ,  G02F1/39 ,  G02F1/37 ,  G01N21/47

CPC分类号： G02F1/3534 ,  G01N21/4738 ,  G02F1/37 ,  G02F1/392 ,  G02F1/3507 ,  G02F1/3542 ,  G02F1/3548 ,  G02F1/3551 ,  H01S3/1625

摘要： A nonlinear crystal including stacked strontium tetraborate SrB4O7 (SBO) crystal plates that are cooperatively configured to create a periodic structure for quasi-phase-matching (QPM) is used in the final frequency doubling stage of a laser assembly to generate laser output light having a wavelength in the range of about 180 nm to 200 nm. One or more fundamental laser beams are frequency doubled, down-converted and/or summed using one or more frequency conversion stages to generate an intermediate frequency light with a corresponding wavelength in the range of about 360 nm to 400 nm, and then the final frequency converting stage utilizes the nonlinear crystal to double the frequency of the intermediate frequency light to generate the desired laser output light at high power. Methods, inspection systems, lithography systems and cutting systems incorporating the laser assembly are also described.

公开(公告)号：US11899338B2

公开(公告)日：2024-02-13

申请号：US17991198

申请日：2022-11-21

申请人： KLA Corporation

发明人： Yung-Ho Alex Chuang ,  Kelly Mauser ,  Baigang Zhang ,  Xuefeng Liu ,  John Fielden ,  Yinying Xiao-Li ,  Elena Loginova

IPC分类号： G02F1/35 ,  G02F1/355 ,  G02F1/39 ,  G02F1/37 ,  G01N21/47 ,  G01N21/95 ,  H01S3/16

CPC分类号： G02F1/3534 ,  G01N21/4738 ,  G02F1/3507 ,  G02F1/3542 ,  G02F1/3548 ,  G02F1/3551 ,  G02F1/37 ,  G02F1/392 ,  G01N21/9501 ,  G01N2201/06113 ,  G02F2203/11 ,  H01S3/1625 ,  H01S3/1636

摘要： A nonlinear crystal including stacked strontium tetraborate SrB4O7 (SBO) crystal plates that are cooperatively configured to create a periodic structure for quasi-phase-matching (QPM) is used in the final frequency doubling stage of a laser assembly to generate laser output light having a wavelength in the range of about 180 nm to 200 nm. One or more fundamental laser beams are frequency doubled, down-converted and/or summed using one or more frequency conversion stages to generate an intermediate frequency light with a corresponding wavelength in the range of about 360 nm to 400 nm, and then the final frequency converting stage utilizes the nonlinear crystal to double the frequency of the intermediate frequency light to generate the desired laser output light at high power. Methods, inspection systems, lithography systems and cutting systems incorporating the laser assembly are also described.