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公开(公告)号：US20220268710A1
公开(公告)日：2022-08-25
申请号：US17672832
申请日：2022-02-16
Applicant: KLA Corporation
Inventor： Xuefeng Liu , Jenn-Kuen Leong , Yung-Ho Alex Chuang , John Fielden
Abstract: An inspection system may include an illumination source to generate an illumination beam, illumination optics to direct the illumination beam to a sample at an off-axis angle along an illumination direction, and collection optics to collect scattered light from the sample in a dark-field mode, where the scattered light from the sample includes surface haze associated with light scattered from a surface of the sample, and where at least a at least a portion of the surface haze has elliptical polarizations. The system may further include pupil-plane optics to convert the polarizations of the surface haze across the pupil to linear polarization that is aligned parallel to a selected haze orientation direction. The system may include a linear polarizer to reject the surface haze aligned parallel to this haze orientation direction and a detector to generate a dark-field image of the sample based on light passed by the linear polarizer.
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公开(公告)号：US20210164918A1
公开(公告)日：2021-06-03
申请号：US17175179
申请日：2021-02-12
Applicant: KLA Corporation
Inventor： Xuefeng Liu , Jenn-Kuen Leong , Daniel Kavaldjiev , John Fielden
IPC: G01N21/95 , G01N21/956 , G01N21/21 , H01L21/66 , G01N21/88
Abstract: A system may include illumination optics to direct an illumination beam to a sample at an off-axis angle, collection optics to collect scattered light from the sample, and a phase mask located at a first pupil plane to provide different phase shifts for light in two or more pupil regions of a collection area to reshape a point spread function of light scattered from one or more particles on a surface of the sample. The system may further include a polarization rotator located at a second pupil plane, where the polarization rotator provides a spatially-varying polarization rotation angle selected to rotate light scattered from the surface of the sample to a selected polarization angle, a polarizer to reject light polarized along the selected polarization angle, and a detector to generate a dark-field image of the sample based on light passed by the polarizer.
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公开(公告)号：US20240426021A1
公开(公告)日：2024-12-26
申请号：US18588822
申请日：2024-02-27
Applicant: KLA Corporation
Inventor： Kelly Mauser , Yung-Ho Alex Chuang , Baigang Zhang , Xuefeng Liu , John Fielden , Elena Loginova Casey
Abstract: A method for growing a periodically-poled nonlinear crystal may include placing a seed crystal into a melt to form a seed crystal melt mixture, where the seed crystal may include at least one of strontium tetraborate (SBO) or lithium triborate (LBO), and where the melt includes at least one of a mixture of Sr, B, and O or a mixture of Li, B, and O. The method may further include heating the seed crystal melt mixture to a predetermined temperature until the periodically-poled nonlinear crystal forms.
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公开(公告)号：US11879853B2
公开(公告)日：2024-01-23
申请号：US17672832
申请日：2022-02-16
Applicant: KLA Corporation
Inventor： Xuefeng Liu , Jenn-Kuen Leong , Yung-Ho Alex Chuang , John Fielden
CPC classification number: G01N21/9501 , G01N21/47 , G02B27/281 , G02B27/283 , H04N23/56 , H04N23/75
Abstract: An inspection system may include an illumination source to generate an illumination beam, illumination optics to direct the illumination beam to a sample at an off-axis angle along an illumination direction, and collection optics to collect scattered light from the sample in a dark-field mode, where the scattered light from the sample includes surface haze associated with light scattered from a surface of the sample, and where at least a at least a portion of the surface haze has elliptical polarizations. The system may further include pupil-plane optics to convert the polarizations of the surface haze across the pupil to linear polarization that is aligned parallel to a selected haze orientation direction. The system may include a linear polarizer to reject the surface haze aligned parallel to this haze orientation direction and a detector to generate a dark-field image of the sample based on light passed by the linear polarizer.
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公开(公告)号：US20230185158A1
公开(公告)日：2023-06-15
申请号：US17991198
申请日：2022-11-21
Applicant: KLA Corporation
Inventor： Yung-Ho Alex Chuang , Kelly Mauser , Baigang Zhang , Xuefeng Liu , John Fielden , Yinying Xiao-Li , Elena Loginova
CPC classification number: G02F1/3534 , G01N21/4738 , G02F1/37 , G02F1/392 , G02F1/3507 , G02F1/3542 , G02F1/3548 , G02F1/3551 , H01S3/1625
Abstract: A nonlinear crystal including stacked strontium tetraborate SrB4O7 (SBO) crystal plates that are cooperatively configured to create a periodic structure for quasi-phase-matching (QPM) is used in the final frequency doubling stage of a laser assembly to generate laser output light having a wavelength in the range of about 180 nm to 200 nm. One or more fundamental laser beams are frequency doubled, down-converted and/or summed using one or more frequency conversion stages to generate an intermediate frequency light with a corresponding wavelength in the range of about 360 nm to 400 nm, and then the final frequency converting stage utilizes the nonlinear crystal to double the frequency of the intermediate frequency light to generate the desired laser output light at high power. Methods, inspection systems, lithography systems and cutting systems incorporating the laser assembly are also described.
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Patent Agency Ranking
公开(公告)号：US20230161221A1
公开(公告)日：2023-05-25
申请号：US18087236
申请日：2022-12-22
Applicant: KLA Corporation
Inventor： Yung-Ho Alex Chuang , Yinying Xiao-Li , Elena Loginova , John Fielden , Baigang Zhang , Xuefeng Liu , Kelly Ann Weekley Mauser
CPC classification number: G02F1/354 , G02F1/3551 , G02F1/3548 , G02F1/3507 , G02F1/3503
Abstract: A nonlinear crystal grating assembly including two integral nonlinear crystal grating structures having inverted crystal axes and having parallel spaced-apart mesas with predetermined mesa widths arranged such that, when assembled in an interdigitated configuration, the mesas of the two grating structures form an alternating grating pattern that is aligned with a propagation direction of input light, thereby creating a periodic structure for quasi-phase-matching (QPM). The nonlinear crystal grating structures are formed using strontium tetraborate, lithium triborate or another nonlinear crystal material. The nonlinear crystal grating assembly is utilized in a laser assembly in which fundamental wavelengths are doubled and/or summed using intermediate frequency conversion stages, and then a final frequency converting stage utilizes the nonlinear crystal grating assembly to double or sum one or more intermediate light beam frequencies to generate laser output light at high power and photon energy levels. A method and inspection system are also described.
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公开(公告)号：US10948423B2
公开(公告)日：2021-03-16
申请号：US16577326
申请日：2019-09-20
Applicant: KLA Corporation
Inventor： Xuefeng Liu , Jenn-Kuen Leong , Daniel Kavaldjiev , John Fielden
IPC: G01N21/95 , H01L21/66 , G01N21/21 , G01N21/956 , G01N21/88
Abstract: A dark-field inspection system may include an illumination source to generate an illumination beam, illumination optics configured to direct the illumination beam to a sample at an off-axis angle along an illumination direction, collection optics to collect scattered light from the sample in response to the illumination beam in a dark-field mode, a polarization rotator located at a pupil plane of the one or more collection optics, where the polarization rotator provides a spatially-varying polarization rotation angle selected to rotate light scattered from a surface of the sample to a selected polarization angle, a polarizer aligned to reject light polarized along the selected polarization angle to reject the light scattered from a surface of the sample, and a detector to generate a dark-field image of the sample based on scattered light from the sample passed by the polarizer.
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8.发明申请公开(公告)号：US20200264109A1
公开(公告)日：2020-08-20
申请号：US16577326
申请日：2019-09-20
Applicant: KLA Corporation
Inventor： Xuefeng Liu , Jenn-Kuen Leong , Daniel Kavaldjiev , John Fielden
IPC: G01N21/95 , G01N21/956 , G01N21/21 , H01L21/66
Abstract: A dark-field inspection system may include an illumination source to generate an illumination beam, illumination optics configured to direct the illumination beam to a sample at an off-axis angle along an illumination direction, collection optics to collect scattered light from the sample in response to the illumination beam in a dark-field mode, a polarization rotator located at a pupil plane of the one or more collection optics, where the polarization rotator provides a spatially-varying polarization rotation angle selected to rotate light scattered from a surface of the sample to a selected polarization angle, a polarizer aligned to reject light polarized along the selected polarization angle to reject the light scattered from a surface of the sample, and a detector to generate a dark-field image of the sample based on scattered light from the sample passed by the polarizer.
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公开(公告)号：US11815784B2
公开(公告)日：2023-11-14
申请号：US18087236
申请日：2022-12-22
Applicant: KLA Corporation
Inventor： Yung-Ho Alex Chuang , Yinying Xiao-Li , Elena Loginova , John Fielden , Baigang Zhang , Xuefeng Liu , Kelly Ann Weekley Mauser
CPC classification number: G02F1/354 , G02F1/3503 , G02F1/3507 , G02F1/3548 , G02F1/3551
Abstract: A nonlinear crystal grating assembly including two integral nonlinear crystal grating structures having inverted crystal axes and having parallel spaced-apart mesas with predetermined mesa widths arranged such that, when assembled in an interdigitated configuration, the mesas of the two grating structures form an alternating grating pattern that is aligned with a propagation direction of input light, thereby creating a periodic structure for quasi-phase-matching (QPM). The nonlinear crystal grating structures are formed using strontium tetraborate, lithium triborate or another nonlinear crystal material. The nonlinear crystal grating assembly is utilized in a laser assembly in which fundamental wavelengths are doubled and/or summed using intermediate frequency conversion stages, and then a final frequency converting stage utilizes the nonlinear crystal grating assembly to double or sum one or more intermediate light beam frequencies to generate laser output light at high power and photon energy levels. A method and inspection system are also described.
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公开(公告)号：US11567391B1
公开(公告)日：2023-01-31
申请号：US17555404
申请日：2021-12-18
Applicant: KLA Corporation
Inventor： Yung-Ho Alex Chuang , Yinying Xiao-Li , Elena Loginova , John Fielden , Baigang Zhang , Xuefeng Liu , Kelly Ann Weekley Mauser
Abstract: A nonlinear crystal grating assembly including two integral nonlinear crystal grating structures having inverted crystal axes and having parallel spaced-apart mesas with predetermined mesa widths arranged such that, when assembled in an interdigitated configuration, the mesas of the two grating structures form an alternating grating pattern that is aligned with a propagation direction of input light, thereby creating a periodic structure for quasi-phase-matching (QPM). The nonlinear crystal grating structures are formed using strontium tetraborate, lithium triborate or another nonlinear crystal material. The nonlinear crystal grating assembly is utilized in a laser assembly in which fundamental wavelengths are doubled and/or summed using intermediate frequency conversion stages, and then a final frequency converting stage utilizes the nonlinear crystal grating assembly to double or sum one or more intermediate light beam frequencies to generate laser output light at high power and photon energy levels. A method and inspection system are also described.
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