公开(公告)号：US20240012195A1

公开(公告)日：2024-01-11

申请号：US18255148

申请日：2020-12-04

Applicant: NATIONAL RESEARCH COUNCIL OF CANADA

Inventor： Cyril HNATOVSKY ,  Nurmemet ABDUKERIM ,  Dan GROBNIC ,  Robert WALKER ,  Stephen MIHAILOV ,  Ping LU ,  Huimin DING ,  David COULAS ,  Kasthuri DE SILVA

IPC: G02B6/02 ,  G01D5/353 ,  G03F7/00

CPC classification number: G02B6/02138 ,  G01D5/35316 ,  G03F7/0005 ,  H01S3/1625

Abstract: A method and apparatus for inscribing a high-temperature stable Bragg grating in an optical waveguide, comprising the steps of: providing the optical waveguide; providing electromagnetic radiation from an ultrashort pulse duration laser, wherein the wavelength of the electromagnetic radiation has a characteristic wavelength in the wavelength range from 150 nanometers (nm) to 2.0 micrometers (μm); providing cylindrical focusing optics; providing a diffractive optical element that when exposed to the focused ultrashort laser pulse, creates an interference pattern on the optical waveguide, wherein the irradiation step comprises irradiating a surface of the diffractive optical element with the focused electromagnetic radiation, the electromagnetic radiation incident on the optical waveguide, from the diffractive optical element, being sufficiently intensive to cause permanent (Type II) change in the index of refraction within multiple Bragg grating planes in the core of the optical waveguide resulting from at least one micropore.

公开(公告)号：US11799263B2

公开(公告)日：2023-10-24

申请号：US16624574

申请日：2018-06-13

Applicant: M SQUARED LASERS LIMITED

Inventor： Gareth Thomas Maker ,  Graeme Peter Alexander Malcolm ,  Simon Munro

IPC: H01S3/108 ,  H01S3/08022 ,  H01S3/08036 ,  H01S3/081 ,  H01S3/106 ,  H01S3/107 ,  H01S3/16 ,  H01S3/0941

CPC classification number: H01S3/108 ,  H01S3/0816 ,  H01S3/08027 ,  H01S3/08036 ,  H01S3/107 ,  H01S3/1062 ,  H01S3/1625 ,  H01S3/1636 ,  H01S3/0941

Abstract: An electro-optic modulator (EOM) for altering an optical path length of an optical field is described. The EOM comprises first and second Brewster-angle cut nonlinear crystals having a first and second optical axis. The optical axes are orientated relative to each other such that when an optical field propagates through the nonlinear crystals it experiences no overall deviation. The nonlinear crystals are also arranged to be opposite handed relative to the optical field. The EOM has the advantage that its optical losses are lower when compared with those EOMs known in the art. In addition, the EOM can be inserted into, or removed from, an optical system without any deviation being imparted onto the optical field. This reduces the levels of skill and effort required on the part of an operator. The described method and apparatus for mounting the nonlinear crystals also suppresses problematic piezo-electric resonances within the nonlinear crystals.

公开(公告)号：US20230185158A1

公开(公告)日：2023-06-15

申请号：US17991198

申请日：2022-11-21

Applicant: KLA Corporation

Inventor： Yung-Ho Alex Chuang ,  Kelly Mauser ,  Baigang Zhang ,  Xuefeng Liu ,  John Fielden ,  Yinying Xiao-Li ,  Elena Loginova

IPC: G02F1/35 ,  G02F1/355 ,  G02F1/39 ,  G02F1/37 ,  G01N21/47

CPC classification number: G02F1/3534 ,  G01N21/4738 ,  G02F1/37 ,  G02F1/392 ,  G02F1/3507 ,  G02F1/3542 ,  G02F1/3548 ,  G02F1/3551 ,  H01S3/1625

Abstract: A nonlinear crystal including stacked strontium tetraborate SrB4O7 (SBO) crystal plates that are cooperatively configured to create a periodic structure for quasi-phase-matching (QPM) is used in the final frequency doubling stage of a laser assembly to generate laser output light having a wavelength in the range of about 180 nm to 200 nm. One or more fundamental laser beams are frequency doubled, down-converted and/or summed using one or more frequency conversion stages to generate an intermediate frequency light with a corresponding wavelength in the range of about 360 nm to 400 nm, and then the final frequency converting stage utilizes the nonlinear crystal to double the frequency of the intermediate frequency light to generate the desired laser output light at high power. Methods, inspection systems, lithography systems and cutting systems incorporating the laser assembly are also described.

公开(公告)号：US20190097376A1

公开(公告)日：2019-03-28

申请号：US16200132

申请日：2018-11-26

Applicant: FUJIFILM Corporation

Inventor： Hiroyasu ISHII ,  Takatsugu WADA ,  Keiji TSUBOTA

IPC: H01S3/02 ,  H01S3/06 ,  H01S3/11 ,  H01S3/106 ,  H01S3/04 ,  H01S3/042 ,  H01S3/16 ,  H01S3/092

CPC classification number: H01S3/025 ,  H01S3/0407 ,  H01S3/042 ,  H01S3/061 ,  H01S3/0615 ,  H01S3/0623 ,  H01S3/0805 ,  H01S3/08054 ,  H01S3/092 ,  H01S3/0933 ,  H01S3/106 ,  H01S3/11 ,  H01S3/1611 ,  H01S3/1623 ,  H01S3/1625 ,  H01S3/1633 ,  H01S3/1636

Abstract: Provided is a solid-state laser device in which a linear resonator including an output mirror and a rear mirror, a laser rod, and optical members are provided on a common base and are contained in a housing having the base as a portion. A holding part is provided to hold an excitation light source that extends parallel to the laser rod on a side of the laser rod opposite to the base. The optical members including a Q-switch are disposed between the laser rod and the rear mirror. An upper end position of the output mirror is at a position lower than a lower end position of the excitation light source held by the holding part, with the base as a reference. The holding part holds the excitation light source so as to be capable of being inserted and extracted with respect to the output mirror side in a longitudinal direction of the excitation light source.

公开(公告)号：US20190089122A1

公开(公告)日：2019-03-21

申请号：US16084978

申请日：2016-07-08

Applicant: DAHENG NEW EPOCH TECHNOLOGY INC.

Inventor： Yi ZHANG ,  Meng LIU ,  Haitao FAN ,  Siyi YAO

IPC: H01S3/11 ,  H01S3/094 ,  H01S3/16 ,  H01S3/105

CPC classification number: H01S3/1109 ,  H01S3/094 ,  H01S3/10092 ,  H01S3/105 ,  H01S3/1112 ,  H01S3/1625 ,  H01S3/1636

Abstract: A femtosecond laser oscillator includes a 532 nm pump laser light, a Ti-doped sapphire, a laser resonator, and a dispersion compensation element, etc. The 532 nm pump laser light is radiated via a pump laser light guide device to the Ti-doped sapphire and generates stimulated radiation, the stimulated radiation light oscillates back and forth in the laser resonator and thereby is amplified, and continuous light is outputted. The dispersion compensation element is disposed in the resonator to compensate the dispersion of the outputted laser light resulted from oscillation of the laser light in the resonator to attain a mode locking condition. The mode locking means of the laser against disturbance is implemented in a form of return light outside the resonator, specifically, the emitted continuous light is returned to a femtosecond laser partially and thereby mode locking is achieved, and output of femtosecond pulses is realized.

公开(公告)号：US09899798B2

公开(公告)日：2018-02-20

申请号：US14816166

申请日：2015-08-03

Applicant: University of Central Florida Research Foundation, Inc.

Inventor： Zenghu Chang ,  Yi Wu ,  Eric Cunningham

IPC: H01S3/16 ,  H01S3/04 ,  H01S5/10 ,  H01S3/02 ,  H01S5/022 ,  H01S3/042 ,  H01S3/06

CPC classification number: H01S5/1078 ,  H01S3/025 ,  H01S3/0405 ,  H01S3/042 ,  H01S3/0604 ,  H01S3/061 ,  H01S3/1625 ,  H01S3/1636 ,  H01S5/0226 ,  H01S2301/02

Abstract: Apparatus and methods that enable the suppression of amplified spontaneous emission (ASE) and prevention against parasitic lasing in cryogenically-cooled laser amplifier systems, thus allowing sustainable extraction efficiency when increasing the pump power and suitable for large-scale, high average-power laser systems employing large-aperture gain media. A gain medium having a known index of refraction for operation in an evacuated, cryogenic environment includes an ASE-absorbing epoxy composition on the perimetrical edge of the gain medium, wherein the epoxy composition has an index of refraction that substantially matches the index of refraction of the gain medium.

公开(公告)号：US20170133812A1

公开(公告)日：2017-05-11

申请号：US14954843

申请日：2015-11-30

Applicant: Shanghai Jiao Tong University

Inventor： Liejia QIAN ,  Jingui MA ,  Jing WANG ,  Peng YUAN ,  Guoqiang XIE

IPC: H01S3/00 ,  H01S3/109 ,  H01S3/13 ,  H01S3/23 ,  G02F1/37 ,  G02F1/355 ,  H01S3/11 ,  H01S3/16

CPC classification number: G02F1/39 ,  G02F1/3551 ,  G02F1/37 ,  G02F2001/392 ,  H01S3/0092 ,  H01S3/1611 ,  H01S3/1625 ,  H01S3/1636 ,  H01S3/1643 ,  H01S3/2316 ,  H01S3/2391

Abstract: Quasi-parametric chirped-pulse amplifier comprising a signal path, a pump path, and an amplifier. A dedicated nonlinear crystal doped with rare-earth-ions is used which has strong absorption around the idler waveband. Both the chirped signal pulse and the pump pulse incident into the amplifier, where energy continuously transfers from the pump pulse to the signal pulse and a newly generated idler pulse. The energy of the generated idler pulse is continually absorbed by the rare-earth ions doped in the amplifier.

公开(公告)号：US09585570B2

公开(公告)日：2017-03-07

申请号：US14306390

申请日：2014-06-17

Applicant: CANON KABUSHIKI KAISHA

Inventor： Koichi Suzuki

IPC: H01S3/04 ,  A61B5/00 ,  H01S3/13 ,  H01S3/092 ,  H01S3/131 ,  H01S3/16 ,  H01S3/106 ,  H01S3/115 ,  A61B5/145

CPC classification number: A61B5/0095 ,  A61B5/14542 ,  H01S3/0404 ,  H01S3/0407 ,  H01S3/042 ,  H01S3/092 ,  H01S3/106 ,  H01S3/115 ,  H01S3/1305 ,  H01S3/1317 ,  H01S3/1625 ,  H01S3/1633 ,  H01S3/1636

Abstract: An object information acquiring apparatus is used which includes: a laser medium; a temperature controlling unit for controlling a temperature of the laser medium; an excitation unit for exciting the laser medium; a control unit for controlling the temperature controlling unit and the excitation unit; a probe for receiving acoustic waves that are generated when an object is irradiated with a laser beam from the laser medium; and a processing unit for acquiring characteristic information relating to the object from the acoustic waves, wherein the control unit does not operate the excitation unit until the temperature of the laser medium falls within a predetermined range.

Abstract translation: 使用的物体信息获取装置包括：激光介质; 温度控制单元，用于控制激光介质的温度; 用于激发激光介质的激励单元; 用于控制温度控制单元和激励单元的控制单元; 用于接收当用激光介质激光束照射物体时产生的声波的探针; 以及处理单元，用于从声波获取与物体相关的特性信息，其中，在激光介质的温度落在预定范围内之前，控制单元不操作激励单元。

公开(公告)号：US09425581B2

公开(公告)日：2016-08-23

申请号：US14615301

申请日：2015-02-05

Applicant: KM Labs Inc.

Inventor： Sterling Backus ,  Charles G. Durfee ,  Matthew S. Kirchner

IPC: H01S3/098 ,  H01S3/11 ,  H01S3/081 ,  H01S3/094 ,  H01S3/0941 ,  H01S5/024 ,  H01S3/08 ,  H01S5/40 ,  H01S3/16 ,  H01S3/102

CPC classification number: H01S3/1112 ,  H01S3/08018 ,  H01S3/0811 ,  H01S3/094049 ,  H01S3/09415 ,  H01S3/1022 ,  H01S3/11 ,  H01S3/1106 ,  H01S3/1625 ,  H01S3/1636 ,  H01S3/1696 ,  H01S5/02415 ,  H01S5/4025

Abstract: Apparatus and methods for anisotropic pumping of a Kerr lens modelocked laser. Direct diode laser pumping of an ultrafast Kerr lens modelocked laser oscillator is accomplished. Diode lasers generate severely anisotropic beams, meaning the pump beam has a higher-beam-quality dimension and a lower-beam-quality dimension. By spatially overlap of the pump beam higher-beam-quality dimension and the KLM laser mode, KLM operation is accomplished. Multiple laser diode pump beams are combined in counterpropagating and same-side configurations.

公开(公告)号：US09287112B2

公开(公告)日：2016-03-15

申请号：US14418500

申请日：2013-08-01

Applicant: Martin A. Stuart ,  Stephen L. Cunningham

Inventor： Martin A. Stuart ,  Stephen L. Cunningham

IPC: H01S3/08 ,  H01S3/091 ,  H01S3/092 ,  H01L21/02 ,  H01L21/3205 ,  H01S3/06 ,  H01S3/04 ,  H01S3/042 ,  H01S3/093 ,  H01S3/16 ,  H01S3/23 ,  H01S3/11 ,  H01L31/024 ,  H01L31/18 ,  C23C16/27 ,  G02B6/122

CPC classification number: H01S3/0606 ,  C23C14/02 ,  C23C14/28 ,  C23C16/27 ,  G02B6/1223 ,  H01L21/02115 ,  H01L21/02181 ,  H01L21/02183 ,  H01L21/02194 ,  H01L21/02266 ,  H01L21/3205 ,  H01L31/024 ,  H01L31/18 ,  H01S3/0071 ,  H01S3/0407 ,  H01S3/042 ,  H01S3/0615 ,  H01S3/0621 ,  H01S3/08027 ,  H01S3/08086 ,  H01S3/08095 ,  H01S3/0915 ,  H01S3/092 ,  H01S3/093 ,  H01S3/11 ,  H01S3/1601 ,  H01S3/1623 ,  H01S3/1625 ,  H01S3/163 ,  H01S3/1633 ,  H01S3/1636 ,  H01S3/1666 ,  H01S3/23 ,  H01S3/2316 ,  H01S3/2333

Abstract: A slab laser and its method of use for high power applications including the manufacture of semiconductors and deposition of diamond and/or diamond-like-carbon layers, among other materials. A lamp driven slab design with a face-to-face beam propagation scheme and an end reflection that redirects the amplified radiation back out the same input surface is utilized. A side-to-side amplifier configuration permitting very high average and peak powers having scalability is also disclosed. Cavity filters adjacent to pump lamps convert the normally unusable UV portion of the pump lamp spectrum into light in the absorption band of the slab laser, thereby increasing the overall pump efficiency. The angle of the end reflecting surface is changed to cause the exit beam to be at a different angle than the inlet beam, thereby eliminating the costly need to separate the beams external to the laser with the subsequent loss of power.

Abstract translation: 平板激光器及其用于大功率应用的方法，包括半导体的制造和金刚石和/或类金刚石碳层的沉积等。 利用具有面对面波束传播方案的灯驱动平板设计和将放大的辐射重定向到相同的输入表面的端反射。 还公开了允许具有可扩展性的非常高的平均和峰值功率的侧向放大器配置。 与泵浦灯相邻的腔过滤器将泵灯光谱的通常不可用的UV部分转换成板激光器的吸收带中的光，从而提高整体泵效率。 改变端部反射表面的角度以使出射光束与入射光束处于不同的角度，从而消除了将激光外部的光束分离成随后的功率损耗的昂贵的需要。