公开(公告)号：US10832396B2

公开(公告)日：2020-11-10

申请号：US16364161

申请日：2019-03-25

Applicant: KLA-Tencor Corporation

Inventor： Brian Duffy ,  Martin Plihal ,  Santosh Bhattacharyya ,  Gordon Rouse ,  Chris Maher ,  Erfan Soltanmohammadi

IPC: G03F1/84 ,  G06T7/00 ,  H01L21/66 ,  G06T7/11 ,  G03F7/20 ,  G01R31/308

Abstract: Methods and systems for setting up inspection of a specimen with design and noise based care areas are provided. One system includes one or more computer subsystems configured for generating a design-based care area for a specimen. The computer subsystem(s) are also configured for determining one or more output attributes for multiple instances of the care area on the specimen, and the one or more output attributes are determined from output generated by an output acquisition subsystem for the multiple instances. The computer subsystem(s) are further configured for separating the multiple instances of the care area on the specimen into different care area sub-groups such that the different care area sub-groups have statistically different values of the output attribute(s) and selecting a parameter of an inspection recipe for the specimen based on the different care area sub-groups.

公开(公告)号：US20200126212A1

公开(公告)日：2020-04-23

申请号：US16364161

申请日：2019-03-25

Applicant: KLA-Tencor Corporation

Inventor： Brian Duffy ,  Martin Plihal ,  Santosh Bhattacharyya ,  Gordon Rouse ,  Chris Maher ,  Erfan Soltanmohammadi

IPC: G06T7/00 ,  H01L21/66 ,  G06T7/11 ,  G01R31/308 ,  G03F7/20

Abstract: Methods and systems for setting up inspection of a specimen with design and noise based care areas are provided. One system includes one or more computer subsystems configured for generating a design-based care area for a specimen. The computer subsystem(s) are also configured for determining one or more output attributes for multiple instances of the care area on the specimen, and the one or more output attributes are determined from output generated by an output acquisition subsystem for the multiple instances. The computer subsystem(s) are further configured for separating the multiple instances of the care area on the specimen into different care area sub-groups such that the different care area sub-groups have statistically different values of the output attribute(s) and selecting a parameter of an inspection recipe for the specimen based on the different care area sub-groups.

公开(公告)号：US10387601B2

公开(公告)日：2019-08-20

申请号：US15358888

申请日：2016-11-22

Applicant: KLA-Tencor Corporation

Inventor： Thirupurasundari Jayaraman ,  Srikanth Kandukuri ,  Gordon Rouse ,  Anil Raman ,  Kenong Wu ,  Praveen Gunasekaran ,  Aravindh Balaji ,  Ankit Jain

IPC: G06F17/50

Abstract: Systems and methods are disclosed for storing dynamic layer content in a design file. A design file is received having design data corresponding to a plurality of process layers. A geometric operation formula is also received. A processor generates a polygon having dynamic layer content that is formed by applying the geometric operation formula on two or more of the plurality of process layers. The updated design file is stored, the design file now having a polygon having dynamic layer content.

公开(公告)号：US20170154147A1

公开(公告)日：2017-06-01

申请号：US15358888

申请日：2016-11-22

Applicant: KLA-Tencor Corporation

Inventor： Thirupurasundari Jayaraman ,  Srikanth Kandukuri ,  Gordon Rouse ,  Anil Raman ,  Kenong Wu ,  Praveen Gunasekaran ,  Aravindh Balaji

IPC: G06F17/50

CPC classification number: G06F17/5072 ,  G06F17/5068 ,  G06F17/5081

Abstract: Systems and methods are disclosed for storing dynamic layer content in a design file. A design file is received having design data corresponding to a plurality of process layers. A geometric operation formula is also received. A processor generates a polygon having dynamic layer content that is formed by applying the geometric operation formula on two or more of the plurality of process layers. The updated design file is stored, the design file now having a polygon having dynamic layer content.