公开(公告)号：US20160139032A1

公开(公告)日：2016-05-19

申请号：US14668879

申请日：2015-03-25

Applicant: KLA-Tencor Corporation

Inventor： Claudio Rampoldi ,  Barry Blasenheim ,  Alexander Kuznetsov ,  Shankar Krishnan ,  Andrei V. Shchegrov

IPC: G01N21/21 ,  G01N21/55 ,  G01N21/47

CPC classification number: G01N21/211 ,  G01B11/0625 ,  G01B11/0641 ,  G01B2210/56 ,  G01N21/9501 ,  G01N2021/213

Abstract: An inspection system is provided that can include a reflectometer having a light source for projecting light, and a light splitter for receiving the light projected by the light source, transforming at least one aspect of the light, and projecting the light once transformed. The reflectometer further has an off-axis unobscured objective lens through which the light transformed by the light splitter passes to contact a fabricated component, and has a detector for detecting a result of the transformed light contacting the fabricated component. The inspection system can additionally, or alternatively, include an ellipsometer having a light source similar to the reflectometer, and further a polarizing element to polarize the light of the light splitter. The polarized light passes through an off-axis unobscured objective lens to contact a fabricated component, and a detector detects a result of the polarized light contacting the fabricated component.

Abstract translation: 提供了一种检查系统，其可以包括具有用于投射光的光源的反射计，以及用于接收由光源投影的光的光分离器，转化至少一个方面的光，并且一旦转换就投射光。 反射计进一步具有离轴未遮蔽的物镜，由光分离器变换的光穿过该物镜接触制造的部件，并具有检测器，用于检测与制造的部件接触的变形光的结果。 检查系统可另外地或替代地包括具有类似于反射计的光源的椭圆计，还有一个使光分离器的光偏振的偏振元件。 偏振光通过离轴未遮蔽的物镜接触制造的部件，并且检测器检测与制造的部件接触的偏振光的结果。