公开(公告)号：US20160289813A1

公开(公告)日：2016-10-06

申请号：US14787132

申请日：2014-04-25

Applicant: KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY

Inventor： Seungyong SHIN ,  Kyoungil MOON ,  Juhyun Sun ,  Changhun LEE

IPC: C23C14/00 ,  C23C14/14 ,  H01J37/34 ,  C22C16/00 ,  B82Y30/00 ,  C22F1/18 ,  B22F9/08 ,  B22D18/00 ,  B22D13/06 ,  C23C14/34 ,  C22C1/00

CPC classification number: C23C14/0036 ,  B22D13/06 ,  B22D18/00 ,  B22D21/005 ,  B22D21/06 ,  B22F9/082 ,  B22F2009/0848 ,  B82B1/00 ,  B82Y30/00 ,  C22C1/002 ,  C22C16/00 ,  C22C45/10 ,  C22F1/186 ,  C23C14/0688 ,  C23C14/14 ,  C23C14/165 ,  C23C14/34 ,  C23C14/3414 ,  H01J37/3429 ,  H01M8/0208

Abstract: The purpose of the present invention is to provide a nanostructured composite thin film showing low friction properties and a method for manufacturing same, and a member with low friction properties and a method for manufacturing same, wherein the thin film shows an exceptionally low value of friction coefficient but also shows high hardness and adhesion in comparison with conventional thin films, and the member has such a nanostructured composite thin film formed on the surface thereof. Provided, according to one aspect of the present invention, is a nanostructured composite thin film having low friction properties which has a composite structure in which a nitride phase comprising Zr and Al as a nitride component and at least one metallic phase are mixed, and has the size of a crystal grain in the range of 5 nm to 30 nm. Here, the nitride phase has a crystal structure of Zr nitride, and the metallic phase can comprise one or more selected from Cu and Ni.

Abstract translation: 本发明的目的是提供一种显示低摩擦性能的纳米结构复合薄膜及其制造方法，以及具有低摩擦特性的部件及其制造方法，其中该薄膜显示出非常低的摩擦系数 系数，与现有的薄膜相比，显示出高的硬度和粘合性，而且在其表面上形成有这样的纳米结构复合薄膜。 根据本发明的一个方面，提供一种具有低摩擦特性的纳米结构复合薄膜，其具有复合结构，其中混合包含Zr和Al作为氮化物组分的氮化物相和至少一个金属相，并且具有 晶粒尺寸在5nm至30nm的范围内。 这里，氮化物相具有Zr氮化物的晶体结构，金属相可以包含选自Cu和Ni中的一种以上。