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1.
公开(公告)号:US20180076084A1
公开(公告)日:2018-03-15
申请号:US15416727
申请日:2017-01-26
Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
Inventor: Hyung-Jun KIM , Sanghyeon KIM , Jae-Phil SHIM , Yeon-Su KIM , Heejeong LIM
IPC: H01L21/762 , H01L21/02 , H01L29/06 , H01L29/16
Abstract: A method for manufacturing a semiconductor device includes: forming a sacrificial layer on a first substrate, the sacrificial layer being made of a material whose lattice constant is different from that of germanium (Ge) by a preset threshold or below; forming a germanium (Ge) layer on the sacrificial layer; forming an insulation layer on a second substrate; bonding the germanium (Ge) layer onto the insulation layer; and removing the sacrificial layer and the first substrate by etching the sacrificial layer in a state where the germanium (Ge) layer is bonded to the insulation layer. In this method, a germanium-on-insulator (GeOI) structure having various surface orientations may be formed by means of epitaxial lift-off (ELO), and a strain may be applied to the germanium (Ge) layer using a lattice constant of the sacrificial layer.
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公开(公告)号:US20140264514A1
公开(公告)日:2014-09-18
申请号:US14052129
申请日:2013-10-11
Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
Inventor: Hyun Cheol KOO , Hyung-Jun KIM , Joon Yeon CHANG , Jun Woo CHOI , Suk Hee HAN
IPC: H01L27/092 , H01L27/22
CPC classification number: H01L29/0673 , H01L29/41725 , H01L29/4238 , H01L29/66984
Abstract: A complementary device including a gate electrode, a channel, a source electrode connected to the gate electrode and the channel, and a first drain electrode and a second drain electrode connected to the gate electrode and the channel is provided. The first/second drain electrode is formed so that, in accordance with a voltage applied to the gate electrode, electron spins injected into the source electrode are moved from the source electrode to the first/second drain electrode through the channel while rotating in a first/second direction. Directions of the electron spins that reach the first drain electrode and the second drain electrode are opposite to each other.
Abstract translation: 提供了包括栅电极,沟道,连接到栅电极和沟道的源电极以及连接到栅电极和沟道的第一漏电极和第二漏电极的互补器件。 第一/第二漏极形成为使得根据施加到栅电极的电压,注入到源电极的电子自旋通过沟道从源电极移动到第一/第二漏电极,同时在第一 /第二个方向。 到达第一漏电极和第二漏电极的电子自旋的方向彼此相反。
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