Vacuum transfer for nano indenter and sample measurement method using the same

    公开(公告)号:US12038356B2

    公开(公告)日:2024-07-16

    申请号:US17326337

    申请日:2021-05-21

    CPC classification number: G01N1/286 G01N35/00029 G01N2035/00059

    Abstract: There are provided a vacuum transfer system installed in an microscope to prevent oxidation of a sample and a sample measurement method using the vacuum transfer system. The vacuum transfer system according to an embodiment is a vacuum transfer system installed in an microscope to prevent oxidation of a sample, and includes a housing having an open surface, wherein the surface has a coupling element for attaching or detaching to/from the microscope, and an inside of the housing is kept closed from outside as the housing is coupled with the microscope through the coupling element, a gas inlet through which an inert gas is introduced into the housing, a gas outlet through which an active gas in the housing exits with the introduction of the inert gas into the housing, and at least one glove formed to be connected with the inside of the housing.

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