公开(公告)号：US11846882B2

公开(公告)日：2023-12-19

申请号：US16923965

申请日：2020-07-08

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Maesoon Im ,  Byung Chul Lee ,  Young Jun Yoon ,  Jin Soo Park ,  Seung Min Kwak

IPC: G03F7/004 ,  A61N1/05 ,  A61B5/24

CPC classification number: G03F7/0041 ,  A61B5/24 ,  A61N1/0529 ,  A61B2562/125

Abstract: Disclosed is a method for manufacturing a high-density neural probe including needles having various forms. The method, in which only a photolithography process and an etching process are used, simplifies a manufacturing process of the neural probe, minimizes changes in the characteristics of the neural probe depending on process equipment or conditions, and may thus ensure a high yield, thereby being advantageous in terms of commercialization. In addition, various forms of needles may be manufactured depending on the shape of patterns included in a mask, the height of the needles may be controlled by adjusting the size of the patterns and the gap between the patterns, and thereby, a neural probe having a plurality of needles having different heights may be manufactured.