-
公开(公告)号：US11355377B2
公开(公告)日：2022-06-07
申请号：US16629709
申请日：2018-05-15
Applicant: KSM COMPONENT CO., LTD.
Inventor： Yun Ho Kim , Joo Hwan Kim
IPC: H01L21/683 , C04B35/581 , C04B35/645 , C04B35/626
Abstract: One embodiment of the present invention discloses an electrostatic chuck made of an aluminum nitride sintered body, wherein the aluminum nitride sintered body comprises aluminum nitride and a composite oxide formed along the grain boundaries of the aluminum nitride, wherein the composite oxide comprises at least two kinds of rare earth metals which have a solid-solution relationship with each other, and wherein the composite oxide comprises a collection area having a higher oxygen content than a surrounding area.
-
公开(公告)号：US20150173127A1
公开(公告)日：2015-06-18
申请号：US14401762
申请日：2013-05-10
Applicant: KSM COMPONENT CO., LTD
Inventor： Yun Ho Kim
CPC classification number: H05B3/283 , H01L21/67103 , H05B3/16 , H05B3/18 , H05B3/748 , H05B2203/014
Abstract: Provided is a heating wire arrangement for a ceramic heater, which is an arrangement of a heating wire on a ceramic substrate in a ceramic heater and emits heat. The heating wire arrangement for the ceramic heater includes a heating wire that is a metal wire member extending in a longitudinal direction and is two-dimensionally arranged on a virtual two-dimensional (2D) plane that is substantially parallel to a top surface of the ceramic substrate.Thus, a uniform heat density may be maintained and a rapid temperature ramp-up may be enabled, unlike a conventional heating wire of a three-dimensional (3D) type.
Abstract translation: 提供一种用于陶瓷加热器的加热丝布置，陶瓷加热器是陶瓷加热器中的陶瓷基板上的加热丝布置，并且发热。 用于陶瓷加热器的加热线布置包括：加热丝，其是在纵向方向上延伸的金属丝构件，并且二维布置在基本上平行于陶瓷的顶表面的虚拟二维（2D）平面上 基质。 因此，与三维（3D）类型的常规加热丝不同，可以保持均匀的热密度并且可以实现快速的温度上升。
-
公开(公告)号：US11251061B2
公开(公告)日：2022-02-15
申请号：US16973112
申请日：2019-10-31
Applicant: KSM COMPONENT CO., LTD. , FLOWSERVE KSM CO., LTD.
Inventor： Yun Ho Kim , Joo Hwan Kim , Ki Ryong Lee
IPC: H01L21/02 , C04B35/111 , H01L21/683 , H01L21/687 , C04B35/645 , C04B35/117
Abstract: Disclosed are: an electrostatic chuck having a high volume resistivity so as to reduce a leakage current, thereby improving the adsorption and desorption response characteristics of a semiconductor wafer; and a manufacturing method therefor. The electrostatic chuck is a sintered body in which an electrode is impregnated so as to fix a semiconductor wafer by electrostatic force, and comprises alumina, a sintering aid, and a rare earth composite oxide comprising two to five different rare earth metals, has adsorption and desorption response characteristics of a semiconductor wafer of two seconds or less, and has a volume resistivity at room temperature of 1.0E+16 Ω·cm to 1.0E+17 Ω·cm.
-
公开(公告)号：US10004113B2
公开(公告)日：2018-06-19
申请号：US14401762
申请日：2013-05-10
Applicant: KSM COMPONENT CO., LTD
Inventor： Yun Ho Kim
CPC classification number: H05B3/283 , H01L21/67103 , H05B3/16 , H05B3/18 , H05B3/748 , H05B2203/014
Abstract: Provided is a heating wire arrangement for a ceramic heater, which is an arrangement of a heating wire on a ceramic substrate in a ceramic heater and emits heat. The heating wire arrangement for the ceramic heater includes a heating wire that is a metal wire member extending in a longitudinal direction and is two-dimensionally arranged on a virtual two-dimensional (2D) plane that is substantially parallel to a top surface of the ceramic substrate.Thus, a uniform heat density may be maintained and a rapid temperature ramp-up may be enabled, unlike a conventional heating wire of a three-dimensional (3D) type.
-
-
-
Search Results
4
records
(took 0.022 seconds)
