公开(公告)号：US12040158B2

公开(公告)日：2024-07-16

申请号：US17908797

申请日：2021-03-04

Applicant: KYOSAN ELECTRIC MFG. CO., LTD.

Inventor： Takeshi Fujiwara ,  Hiroyuki Kojima ,  Satoshi Kawai

IPC: H01J37/32

CPC classification number: H01J37/32146 ,  H01J37/32174

Abstract: Provided are a high-frequency power supply device and an output control method therefor which are capable of constantly keeping the phase of the outputted high-frequency pulse uniform even in a structure in which the synchronizing pulse and the clock pulse are generated separately. A high-frequency power supply device and an output control method therefor for outputting a high-frequency pulse to a target device on the basis of a synchronizing pulse and a clock pulse, wherein: the period interval of one period of the synchronizing pulse is detected; the phase difference between the synchronizing pulse and the clock pulse during the previous one period is determined; the number of pulses and oscillation frequency of oscillation in the subsequent period is calculated on the basis of the period interval and the phase difference; a clock pulse is generated on the basis of the oscillation frequency signal; and a number of pulses and oscillation frequency for the subsequent period which will cancel the phase difference in the previous one period are determined in a manner such that the phase remains constant after the period interval of the subsequent period elapses when forming a high-frequency pulse on the basis of the period reference signal, the level setting signal, the pulse number signal and the clock pulse.

公开(公告)号：US12014899B2

公开(公告)日：2024-06-18

申请号：US17911174

申请日：2021-03-04

Applicant: KYOSAN ELECTRIC MFG. CO., LTD.

Inventor： Takeshi Fujiwara ,  Yuya Yasuda ,  Ryuhei Katafuchi ,  Hiroyuki Kojima

IPC: H01J37/32

CPC classification number: H01J37/32146 ,  H01J37/32174 ,  H01J2237/327

Abstract: A high-frequency power supply device, which outputs high-frequency pulses to a target device on the basis of a synchronous pulse and a clock pulse, and the output control method therefor are such that a period reference signal is generated from output timing information pertaining to the synchronous pulse, an output level signal is generated from output level information, an output stop time is timed on the basis of the period reference signal and an output stop signal is generated, and, when the period reference signal, the output level signal, and the clock pulse are received and a high-frequency pulse is formed on the basis of these signals, transmission of the output level signal is stopped while the output stop signal is being received.

公开(公告)号：US20230124064A1

公开(公告)日：2023-04-20

申请号：US17911174

申请日：2021-03-04

Applicant: KYOSAN ELECTRIC MFG. CO., LTD.

Inventor： Takeshi Fujiwara ,  Yuya Yasuda ,  Ryuhei Katafuchi ,  Hiroyuki Kojima

IPC: H01J37/32

Abstract: A high-frequency power supply device, which outputs high-frequency pulses to a target device on the basis of a synchronous pulse and a clock pulse, and the output control method therefor are such that a period reference signal is generated from output timing information pertaining to the synchronous pulse, an output level signal is generated from output level information, an output stop time is timed on the basis of the period reference signal and an output stop signal is generated, and, when the period reference signal, the output level signal, and the clock pulse are received and a high-frequency pulse is formed on the basis of these signals, transmission of the output level signal is stopped while the output stop signal is being received.

公开(公告)号：US20230134559A1

公开(公告)日：2023-05-04

申请号：US17908797

申请日：2021-03-04

Applicant: KYOSAN ELECTRIC MFG. CO., LTD.

Inventor： Takeshi Fujiwara ,  Hiroyuki Kojima ,  Satoshi Kawai

IPC: H01J37/32

Abstract: Provided are a high-frequency power supply device and an output control method therefor which are capable of constantly keeping the phase of the outputted high-frequency pulse uniform even in a structure in which the synchronizing pulse and the clock pulse are generated separately. A high-frequency power supply device and an output control method therefor for outputting a high-frequency pulse to a target device on the basis of a synchronizing pulse and a clock pulse, wherein: the period interval of one period of the synchronizing pulse is detected; the phase difference between the synchronizing pulse and the clock pulse during the previous one period is determined; the number of pulses and oscillation frequency of oscillation in the subsequent period is calculated on the basis of the period interval and the phase difference; a clock pulse is generated on the basis of the oscillation frequency signal; and a number of pulses and oscillation frequency for the subsequent period which will cancel the phase difference in the previous one period are determined in a manner such that the phase remains constant after the period interval of the subsequent period elapses when forming a high-frequency pulse on the basis of the period reference signal, the level setting signal, the pulse number signal and the clock pulse.

公开(公告)号：US10594220B2

公开(公告)日：2020-03-17

申请号：US16473770

申请日：2017-02-23

Applicant: KYOSAN ELECTRIC MFG. CO., LTD.

Inventor： Itsuo Yuzurihara ,  Takeshi Fujiwara ,  Ryosuke Ohma ,  Hiroshi Kunitama ,  Satoshi Kawai ,  Ryota Suzuki

IPC: H02M3/335 ,  H02M3/158 ,  H02M3/42

Abstract: A chopper section of a power supply device includes a plurality of step-down chopper circuits, and multiphase control of the step-down chopper circuits is performed using gate signals having phases displaced from each other. This shortens the period with which output signals of the step-down chopper circuits are changed. Shortening the period reduces the amount of jitter resulting from a gap between the occurrence of a command signal and a sampling point that is a point in time at which a gate signal is generated. The number of phases of the gate signals equals the number of phases of the step-down chopper circuits. The control of the gate signal generator is asynchronous to feedback control by the controller. Points in time (sampling points) at which gate signals are generated are points in time of generation (sampling points) after a point in time at which the controller calculates a manipulated value.

公开(公告)号：US20190341851A1

公开(公告)日：2019-11-07

申请号：US16473770

申请日：2017-02-23

Applicant: KYOSAN ELECTRIC MFG. CO., LTD.

Inventor： Itsuo Yuzurihara ,  Takeshi Fujiwara ,  Ryosuke Ohma ,  Hiroshi Kunitama ,  Satoshi Kawai ,  Ryota Suzuki

IPC: H02M3/158 ,  H02M3/42

Abstract: A chopper section of a power supply device includes a plurality of step-down chopper circuits, and multiphase control of the step-down chopper circuits is performed using gate signals having phases displaced from each other. This shortens the period with which output signals of the step-down chopper circuits are changed. Shortening the period reduces the amount of jitter resulting from a gap between the occurrence of a command signal and a sampling point that is a point in time at which a gate signal is generated. The number of phases of the gate signals equals the number of phases of the step-down chopper circuits. The control of the gate signal generator is asynchronous to feedback control by the controller. Points in time (sampling points) at which gate signals are generated are points in time of generation (sampling points) after a point in time at which the controller calculates a manipulated value.