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公开(公告)号：US08974682B2
公开(公告)日：2015-03-10
申请号：US13930262
申请日：2013-06-28
CPC分类号： G03F7/343 , G03F7/0002
摘要： A self-assembled pattern forming method in an embodiment includes: forming a guide pattern on a substrate; forming a layer of a first polymer; filling a first block copolymer; and phase-separating the first block copolymer. The guide pattern includes a first recessed part having a depth T and a diameter D smaller than the depth T, and a second recessed part having a width larger than double of the diameter D. The first block copolymer has the first polymer and a second polymer which are substantially the same in volume fraction. By phase-separating the first block copolymer, a cylinder structure and a lamellar structure are obtained.
摘要翻译： 实施方式中的自组装图案形成方法包括：在基板上形成引导图案; 形成第一聚合物层; 填充第一嵌段共聚物; 并分相第一嵌段共聚物。 引导图案包括具有深度T和直径D小于深度T的第一凹陷部分，以及具有大于直径D的两倍的宽度的第二凹陷部分。第一嵌段共聚物具有第一聚合物和第二聚合物 其体积分数基本相同。 通过相分离第一嵌段共聚物，获得圆筒结构和层状结构。
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公开(公告)号：US09269387B2
公开(公告)日：2016-02-23
申请号：US14576001
申请日：2014-12-18
发明人： Akira Kikitsu , Naoko Kihara , Yoshiyuki Kamata , Hiroyuki Hieda
摘要： In one embodiment, there are provided: a substrate; a data area disposed on the substrate and having a plurality of first magnetic dots arrayed in lines in mutually different first, second, and third directions; and a boundary magnetic part having a plurality of first magnetic portions arrayed in a line in the third direction and each having a length longer than that of the first magnetic dot in the third direction, and a second magnetic dot disposed between the first magnetic portions and disposed on extensions in the first and second directions of the first magnetic dots, and disposed along with the data area on the substrate.
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3.发明授权公开(公告)号：US09053733B2
公开(公告)日：2015-06-09
申请号：US13863119
申请日：2013-04-15
发明人： Hiroyuki Hieda
摘要： According to one embodiment, a magnetic recording medium includes a data region and a servo region adjacent to the data region and including a magnetic recording layer, the magnetic recording layer including first and second patterned regions adjacent to each other, the first patterned region including a first nonmagnetic matrix and first magnetic particles dispersed in the first nonmagnetic matrix and having magnetization oriented in a first direction, the second patterned region includes a second nonmagnetic matrix and second magnetic particles dispersed in the second nonmagnetic matrix and having magnetization oriented in a second direction opposite to the first direction, sizes of the first magnetic particles being smaller than sizes of the second magnetic particles.
摘要翻译： 根据一个实施例，磁记录介质包括与数据区相邻并包括磁记录层的数据区和伺服区，磁记录层包括彼此相邻的第一和第二图案区，第一图案区包括 第一非磁性基质和第一磁性颗粒分散在第一非磁性基质中并且具有沿第一方向取向的磁化，第二图案化区域包括分散在第二非磁性矩阵中的第二非磁性基质和第二磁性颗粒，并且在相反的第二方向上具有磁化方向 朝向第一方向，第一磁性颗粒的尺寸小于第二磁性颗粒的尺寸。
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公开(公告)号：US08958177B2
公开(公告)日：2015-02-17
申请号：US13912519
申请日：2013-06-07
发明人： Akira Kikitsu , Naoko Kihara , Yoshiyuki Kamata , Hiroyuki Hieda
摘要： In one embodiment, there are provided: a substrate; a data area disposed on the substrate and having a plurality of first magnetic dots arrayed in lines in mutually different first, second, and third directions; and a boundary magnetic part having a plurality of first magnetic portions arrayed in a line in the third direction and each having a length longer than that of the first magnetic dot in the third direction, and a second magnetic dot disposed between the first magnetic portions and disposed on extensions in the first and second directions of the first magnetic dots, and disposed along with the data area on the substrate.
摘要翻译： 在一个实施例中，提供：衬底; 数据区域，设置在所述基板上，并且具有在相互不同的第一，第二和第三方向上以行排列的多个第一磁性点; 以及边界磁性部分，具有多个第一磁性部分，沿着第三方向排成一行，并且每个第一磁性部分的长度都大于第三方向上的第一磁性点的长度;以及第二磁性点，设置在第一磁性部分和 设置在第一磁性点的第一和第二方向上的延伸部上，并与数据区域一起设置在基板上。
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公开(公告)号：US08865010B2
公开(公告)日：2014-10-21
申请号：US13750086
申请日：2013-01-25
发明人： Naoko Kihara , Hiroyuki Hieda , Akiko Yuzawa , Norikatsu Sasao , Ryosuke Yamamoto , Yoshiyuki Kamata
CPC分类号： B44C1/227 , B05D1/185 , B05D3/108 , B82Y10/00 , B82Y40/00 , G03F7/00 , G03F7/0002 , G03F7/0017 , G03F7/168 , G03F7/405 , G11B5/746 , G11B5/855
摘要： In one embodiment, a pattern forming method includes: forming a functional layer having a functional group to cross-link a first polymer on a substrate; forming a diblock copolymer layer having the first polymer and a second polymer on the functional layer; self-assembling the diblock copolymer layer to form a self-assembled layer, the self-assembled layer having a first domain corresponding to the first polymer, and a plurality of second domains corresponding to the second polymer and surrounded by or interposed in the first domain; cross-linking the first polymer in the self-assembled layer with the functional group in the functional layer to form a bonding layer disposed in the self-assembled layer and bonded to the functional layer; and washing or etching the self-assembled layer to remain the bonding layer.
摘要翻译： 在一个实施方案中，图案形成方法包括：形成具有官能团的功能层以在基底上交联第一聚合物; 在功能层上形成具有第一聚合物和第二聚合物的二嵌段共聚物层; 自组装二嵌段共聚物层以形成自组装层，所述自组装层具有对应于第一聚合物的第一域，以及对应于第二聚合物的多个第二域，并被第一域包围或插入 ; 将所述自组装层中的所述第一聚合物与所述功能层中的官能团交联，以形成设置在所述自组装层中并结合到所述功能层的接合层; 并且洗涤或蚀刻自组装层以保持结合层。
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公开(公告)号：US20130256263A1
公开(公告)日：2013-10-03
申请号：US13750086
申请日：2013-01-25
发明人： Naoko KIHARA , Hiroyuki Hieda , Akiko Yuzawa , Norikatsu Sasao , Ryosuke Yamamoto , Yoshiyuki Kamata
CPC分类号： B44C1/227 , B05D1/185 , B05D3/108 , B82Y10/00 , B82Y40/00 , G03F7/00 , G03F7/0002 , G03F7/0017 , G03F7/168 , G03F7/405 , G11B5/746 , G11B5/855
摘要： In one embodiment, a pattern forming method includes: forming a functional layer having a functional group to cross-link a first polymer on a substrate; forming a diblock copolymer layer having the first polymer and a second polymer on the functional layer; self-assembling the diblock copolymer layer to form a self-assembled layer, the self-assembled layer having a first domain corresponding to the first polymer, and a plurality of second domains corresponding to the second polymer and surrounded by or interposed in the first domain; cross-linking the first polymer in the self-assembled layer with the functional group in the functional layer to form a bonding layer disposed in the self-assembled layer and bonded to the functional layer; and washing or etching the self-assembled layer to remain the bonding layer.
摘要翻译： 在一个实施方案中，图案形成方法包括：形成具有官能团的功能层以在基底上交联第一聚合物; 在功能层上形成具有第一聚合物和第二聚合物的二嵌段共聚物层; 自组装二嵌段共聚物层以形成自组装层，所述自组装层具有对应于第一聚合物的第一域，以及对应于第二聚合物的多个第二域，并被第一域包围或插入 ; 将所述自组装层中的所述第一聚合物与所述功能层中的官能团交联，以形成设置在所述自组装层中并结合到所述功能层的接合层; 并且洗涤或蚀刻自组装层以保持结合层。
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