公开(公告)号：US20180076080A1

公开(公告)日：2018-03-15

申请号：US15449255

申请日：2017-03-03

申请人： KABUSHIKI KAISHA TOSHIBA

发明人： Shinya ITO ,  Hiroshi SANDA ,  Eiichi NAGUMO ,  Makoto SAITO

IPC分类号： H01L21/683

CPC分类号： H01L21/6833

摘要： An electrostatic chuck includes a first electrode provided in a first plane, a second electrode provided in a second plane parallel to the first plane, and an insulator. The second electrode includes a plurality of portions which intersect with an intersection line between a region in which the first electrode is orthogonally projected to the second plane and a third plane vertical to the second plane. The insulator is provided between the first and second electrodes.

公开(公告)号：US20150069437A1

公开(公告)日：2015-03-12

申请号：US14328048

申请日：2014-07-10

申请人： Kabushiki Kaisha Toshiba

发明人： Hideyuki TOMIZAWA ,  Akihiro KOJIMA ,  Miyoko SHIMADA ,  Yosuke AKIMOTO ,  Hideko MUKAIDA ,  Mitsuyoshi ENDO ,  Hideto FURUYAMA ,  Yoshiaki SUGIZAKI ,  Kazuo FUJIMURA ,  Shinya ITO ,  Shinji NUNOTANI

IPC分类号： H01L33/50 ,  H01L33/00

CPC分类号： H01L33/54 ,  H01L33/0079 ,  H01L33/46 ,  H01L33/505 ,  H01L33/60 ,  H01L2933/0025 ,  H01L2933/005

摘要： According to one embodiment, a semiconductor light emitting device includes a semiconductor layer, a sealing member configured to cover a lower surface of the semiconductor layer and a side surface of the semiconductor layer to protrude to be higher than an upper surface of the semiconductor layer at a side of the semiconductor layer, a fluorescer layer provided above the semiconductor layer and the sealing member, and an insulating film provided between the sealing member and the semiconductor layer and between the sealing member and the fluorescer layer. A corner of a protruding portion of the sealing member is rounded.

摘要翻译： 根据一个实施例，半导体发光器件包括半导体层，被配置为覆盖半导体层的下表面的密封构件和半导体层的侧表面突出成高于半导体层的上表面的侧表面 半导体层的一侧，设置在半导体层上方的荧光层和密封构件，以及设置在密封构件和半导体层之间以及密封构件和荧光层之间的绝缘膜。 密封构件的突出部分的角部是圆形的。