System and method for optically sensing defects in OPC devices
    1.
    发明授权
    System and method for optically sensing defects in OPC devices 失效
    用于光学检测OPC设备缺陷的系统和方法

    公开(公告)号:US06963076B1

    公开(公告)日:2005-11-08

    申请号:US09629204

    申请日:2000-07-31

    IPC分类号: G01N21/88 G01N21/952

    CPC分类号: G01N21/952

    摘要: A system for optically sensing manufacturing defects in organic photo conductor (OPC) devices. The system comprising an illumination source for illuminating the OPC device; at least one optical sensor positioned to view the illuminated device; and a controller connectable to the optical sensor, the controller comprising a threshold detector for determining manufacturing defects.

    摘要翻译: 用于光学感测有机光导体(OPC)器件中的制造缺陷的系统。 该系统包括用于照亮OPC装置的照明源; 定位成观察照明装置的至少一个光学传感器; 以及可连接到所述光学传感器的控制器,所述控制器包括用于确定制造缺陷的阈值检测器。

    System using on-line liquid characterization apparatus
    3.
    发明授权
    System using on-line liquid characterization apparatus 失效
    系统采用在线液相鉴定仪

    公开(公告)号:US06195443B1

    公开(公告)日:2001-02-27

    申请号:US09079791

    申请日:1998-05-15

    IPC分类号: A61B500

    CPC分类号: G01N21/85

    摘要: A manufacturing system including: (a) a vessel for holding a liquid; (b) a first member and a second member, each having a flat surface, wherein the flat surface of the first member faces and is spaced from the flat surface of the second member, thereby defining a gap region between the two flat surfaces, wherein a section of the first member is transparent through the thickness of the first member; (c) a liquid delivery system connected to the vessel and the gap region which delivers the liquid to the gap region and the liquid flows in the gap region in view of the transparent section of the first member; (d) a camera positioned to view through the transparent section of the first member; (e) image processing means coupled to the camera for determining the homogeneity of the liquid in the gap region; and (f) liquid dispensing equipment connected to the liquid delivery system.

    摘要翻译: 一种制造系统,包括:(a)容纳液体的容器; (b)第一构件和第二构件,每个具有平坦表面,其中第一构件的平坦表面面向并与第二构件的平坦表面间隔开,从而在两个平坦表面之间限定间隙区域,其中 所述第一构件的一部分通过所述第一构件的厚度是透明的; (c)连接到容器的液体输送系统和将液体输送到间隙区域的间隙区域,并且液体在第一构件的透明区域中在间隙区域中流动; (d)定位成通过第一构件的透明部分观察的照相机; (e)耦合到相机的图像处理装置,用于确定间隙区域中液体的均匀性; 和(f)连接到液体输送系统的液体分配设备。

    Chuck assembly with a radial spring
    4.
    发明授权
    Chuck assembly with a radial spring 失效
    卡盘组件带径向弹簧

    公开(公告)号:US5829760A

    公开(公告)日:1998-11-03

    申请号:US829738

    申请日:1997-03-31

    摘要: There is disclosed a chuck assembly for internally holding a hollow substrate having an open end including: (a) a body including an end section having a width narrower than that of the inner width of the substrate to permit insertion of the end section through the substrate open end into the substrate interior; and (b) a compressible spring coiled around a portion of the end section, wherein prior to compression the spring has an outer width larger than that of the inner width of the substrate, wherein upon insertion of the end section of the body into the substrate the spring is compressed by contact with the substrate inner surface resulting in the chuck assembly holding the substrate by the force generated against the substrate inner surface by the spring in opposition to the compression.

    摘要翻译: 公开了一种用于内部保持具有开口​​端的中空基板的卡盘组件,其包括:(a)主体,其包括具有比基板的内部宽度窄的宽度的端部的端部,以允许端部部分穿过基板 开口端进入衬底内部; 和(b)围绕所述端部的一部分卷绕的可压缩弹簧,其中在压缩之前,所述弹簧的外部宽度大于所述基底的内部宽度的外部宽度,其中当将所述主体的端部插入到所述基底中时 弹簧通过与基板内表面接触而被压缩,导致卡盘组件通过与压缩相反的弹簧相对于基板内表面产生的力而保持基板。

    Substrate carrier system
    5.
    发明授权
    Substrate carrier system 失效
    基板载体系统

    公开(公告)号:US5755473A

    公开(公告)日:1998-05-26

    申请号:US695044

    申请日:1996-08-09

    IPC分类号: H01L21/00 B66C1/56

    CPC分类号: H01L21/6715

    摘要: There is disclosed a carrier system for carrying a substrate batch including: (a) a heat treated, integral pallet having a pallet thickness, a top surface, and a bottom surface, wherein the pallet defines a plurality of passageways extending completely through the pallet thickness to form a first plurality of openings on the top surface and the bottom surface, wherein the pallet also defines a plurality of chambers extending through at least a portion of the pallet thickness to form a second plurality of openings on the bottom surface; and (b) a plurality of chuck assemblies partially disposed in the plurality of the chambers and adapted to engage the substrate batch, wherein the pallet has sufficient structural rigidity such that while the carrier system is carrying the substrate batch, even when the carrier system is subjected to an elevated temperature, there is absent any appreciable bending and twisting of the pallet.

    摘要翻译: 公开了一种用于承载衬底批次的载体系统,包括:(a)具有托盘厚度,顶表面和底表面的经热处理的整体托盘,其中托盘限定完全延伸穿过托盘厚度的多个通道 以在所述顶表面和所述底表面上形成第一多个开口,其中所述托盘还限定延伸穿过所述托盘厚度的至少一部分的多个室,以在所述底表面上形成第二多个开口; 和(b)多个卡盘组件,其部分地设置在所述多个室中并且适于接合所述基底批次,其中所述托盘具有足够的结构刚性,使得当所述载体系统承载所述基底批次时,即使所述载体系统 受到高温的影响,没有任何明显的弯曲和扭曲的托盘。

    Chuck assembly
    8.
    发明授权
    Chuck assembly 失效
    卡盘装配

    公开(公告)号:US5829759A

    公开(公告)日:1998-11-03

    申请号:US395214

    申请日:1995-02-27

    IPC分类号: F16B2/04 B65G47/90 B66C1/56

    摘要: There is disclosed a chuck assembly for engaging the inner surface of a hollow substrate comprising: (a) a housing having an open end and defining a passageway in communication with the open end; (b) a partially hollow elastic boot defining an entry hole and an inner surface wherein the boot when stretched decreases in cross-sectional dimension, and wherein the boot engages the housing, whereby the hollow portion of the boot is in communication with the passageway; and (c) a movable, boot stretching member disposed in the passageway and adapted to engage the inner surface of the boot, wherein movement of the member in a direction to stretch the boot decreases the cross-sectional dimension of the boot, thereby permitting insertion of the boot into the substrate, and wherein movement of the member in the opposite direction increases the cross-sectional dimension of the boot, thereby permitting engagement of the boot against the inner surface of the substrate.

    摘要翻译: 公开了一种卡盘组件,用于接合中空基板的内表面,包括:(a)具有开口端并限定与开口端连通的通道的壳体; (b)限定入口孔和内表面的部分中空的弹性靴,其中当拉伸时的靴子的横截面尺寸减小,并且其中靴子与壳体接合,由此靴子的中空部分与通道连通; 以及(c)设置在所述通道中并且适于接合所述护罩的内表面的可移动的护罩拉伸构件,其中所述构件沿着拉伸所述护套的方向的移动减小所述护罩的横截面尺寸,从而允许插入 靴子进入衬底中,并且其中构件沿相反方向的移动增加了护罩的横截面尺寸,从而允许护罩与衬底的内表面接合。

    Dip coating method having intermediate bead drying step
    10.
    发明授权
    Dip coating method having intermediate bead drying step 失效
    具有中间珠干燥步骤的浸涂方法

    公开(公告)号:US5667928A

    公开(公告)日:1997-09-16

    申请号:US659552

    申请日:1996-06-06

    IPC分类号: B05C3/10 G03G5/05 G03G5/00

    CPC分类号: G03G5/0525 B05C3/10

    摘要: A method is disclosed including: (a) dip coating a batch of substrates, each substrate defining an end region, a center region, and a top region, with a first coating solution including a solvent to deposit a first layer on the end region, the center region, and optionally on a part of the top region of each substrate, wherein the first layer includes a wet coating solution bead formed at the end region of each substrate, thereby resulting in a plurality of wet coating solution beads; (b) directing a gas simultaneously at the entire plurality of the wet coating solution beads to remove a portion of the solvent in each bead, wherein the gas fails to disrupt the coating uniformity of the part of the first layer over the center region of each substrate; and (c) dip coating the batch of the substrates subsequent to (b) with a second coating solution to deposit a second layer over the first layer, wherein the portion of the solvent removed from each bead in (b) is sufficient to prevent contamination of the second coating solution by the first layer.

    摘要翻译: 公开了一种方法,包括:(a)将一批衬底浸渍涂覆,每个衬底限定端部区域,中心区域和顶部区域,其中第一涂布溶液包括溶剂以在端部区域上沉积第一层, 中心区域和任选地在每个基底的顶部区域的一部分上,其中第一层包括在每个基底的端部区域形成的湿涂层溶液珠,从而得到多个湿涂布溶液珠; (b)在整个多个湿涂布溶液珠中同时引导气体以除去每个珠粒中的一部分溶剂,其中气体不能破坏第一层的部分在每个珠粒的中心区域上的涂层均匀性 基质; 和(c)在(b)之后用第二涂层溶液浸渍一批基底以在第一层上沉积第二层,其中从(b)中的每个珠粒去除的部分溶剂足以防止污染 的第二涂层溶液。