公开(公告)号：US06040552A

公开(公告)日：2000-03-21

申请号：US794217

申请日：1997-01-30

申请人： Kanti Jain ,  Thomas J. Dunn ,  Nestor O. Farmiga ,  Carl Weisbecker ,  Carl C. Kling

发明人： Kanti Jain ,  Thomas J. Dunn ,  Nestor O. Farmiga ,  Carl Weisbecker ,  Carl C. Kling

IPC分类号： B23K26/06 ,  B23K26/067 ,  B23K26/38 ,  H05K3/00 ,  B23K26/00

CPC分类号： B23K26/0676 ,  B23K26/066 ,  B23K26/067 ,  B23K26/384 ,  H05K3/0026 ,  H05K2203/0557 ,  H05K2203/1545 ,  H05K3/0032

摘要： Economical production of laser-drilled high-precision, ultra-miniature multiple-via-hole patterns is accomplished by multiplexing the homogenized, shaped, nearly-collimated output of a high-power excimer laser into a modular set of condenser lens/mask/projection lens beamlines. A substrate delivery subsystem provides a continuous supply of film substrate segments as blanks during production. Functional modularization permits the building and easy retooling of a hard-tooling multiple-beamline system powered by a high-power laser. Vertical modularization permits the building of a single-beamline soft-tooling pilot system, which may be used to demonstrate a production technique, or may be used for short production runs, and which may later be incremented with additional vertical subassemblies for additional beamlines. Multiplexing of the laser output beam into the set of beamlines is accomplished by an illumination module, which may be implemented as a single 100%-reflective fold mirror for a single-beamline pilot system, and can also be implemented as a single-block echelon mirror, or implemented as a multi-beamsplitter set of decreasing-reflectivity mirrors as mirror position approaches the beam source. The resulting product is a film blank with a via-pattern of precise micro-vias, useful as an aerosol nozzle or filter.

摘要翻译： 激光钻孔的高精度，超微型多通孔图案的经济生产通过将大功率准分子激光器的均匀化，成形，几乎准直的输出复合成模块化的聚光透镜/掩模/投影组合来实现 透镜光束。 基板输送子系统在生产期间提供作为空白的薄膜基底段的连续供应。 功能模块化允许建立并容易地重新组装由大功率激光器供电的硬工具多光束线系统。 垂直模块化允许构建单束线软工具导引系统，其可用于演示生产技术，或者可用于短生产运行，并且随后可以通过用于附加束线的附加垂直子组件来增加。 将激光输出光束复用到光束集合中由照明模块实现，照明模块可被实现为用于单光束导引系统的单个100％反射折叠反射镜，并且还可以被实现为单块梯形图 反射镜或实现为多分束器组的减少反射镜，因为镜位置接近光束源。 所得产品是具有精确微通孔的通孔图案的薄膜坯料，可用作气溶胶喷嘴或过滤器。

公开(公告)号：US6018383A

公开(公告)日：2000-01-25

申请号：US915130

申请日：1997-08-20

申请人： Thomas J. Dunn ,  Nestor O. Farmiga ,  Marc Zemel ,  Carl Weisbecker ,  Kanti Jain

发明人： Thomas J. Dunn ,  Nestor O. Farmiga ,  Marc Zemel ,  Carl Weisbecker ,  Kanti Jain

IPC分类号： G02F1/13 ,  G03B27/48 ,  G03B27/42 ,  G03B27/54

CPC分类号： G03F7/2035 ,  G02F1/13 ,  G03F1/60 ,  G03F7/703 ,  G03F7/70791

摘要： In the manufacturing of flexible, large-area electronic modules such as flat-panel displays (FPDs), the high cost and low yields of currently available patterning equipment represent a significant barrier to cost-effective production. This invention provides a projection imaging system that can pattern very large, flexible substrates at very high exposure speeds with almost any desired image resolution. The master pattern to be imprinted on the substrate is contained on a mask which, similar to the substrate, is made of a flexible material The mask and substrate are scanned by rollers through the object and the image field, respectively, of a 1:1 projection lens. All of the rollers are driven by identical drive systems linked to a common motor; therefore, the scanning of the mask and substrate is perfectly synchronized. Both the mask and the substrate, along with their rollers, are mounted on a linear translation stage. The translation stage scans continuously at a velocity which is chosen such that, for every complete rotation of the mask and substrate, the linear stage will move by the effective scan width. The entire substrate is patterned using one continuous helical scan. Suitable overlap between complementary intensity profiles produced by a hexagonal illumination configuration ensures seamless joining of the scans. The use of rollers significantly enhances the throughput and effectively reduces the payload and footprint of the scanning stage leading to substantial system cost savings.

摘要翻译： 在制造柔性的大面积电子模块如平板显示器（FPD）时，目前可用的图案设备的高成本和低产量是成本有效的生产的重要障碍。 本发明提供了一种投影成像系统，其可以以非常高的曝光速度以几乎任何所需的图像分辨率对非常大的柔性基板进行图案化。 要印在基板上的主图案被包含在与基板类似的由柔性材料制成的掩模上。掩模和基板分别通过对象和图像场的辊子被扫描1：1 投影镜头 所有的滚筒均由与普通马达相连的驱动系统驱动; 因此，掩模和基底的扫描完全同步。 掩模和基板以及它们的滚子都安装在线性平移台上。 平移阶段以选择的速度连续扫描，使得对于掩模和衬底的每次完全旋转，线性平台将移动有效扫描宽度。 使用一个连续的螺旋扫描对整个基板进行图案化。 通过六边形照明配置产生的互补强度分布之间的合适重叠确保了扫描的无缝连接。 滚筒的使用显着提高了产量，有效地减少了扫描阶段的有效载荷和占地面积，从而节省了大量的系统成本。