公开(公告)号：US06040552A

公开(公告)日：2000-03-21

申请号：US794217

申请日：1997-01-30

申请人： Kanti Jain ,  Thomas J. Dunn ,  Nestor O. Farmiga ,  Carl Weisbecker ,  Carl C. Kling

发明人： Kanti Jain ,  Thomas J. Dunn ,  Nestor O. Farmiga ,  Carl Weisbecker ,  Carl C. Kling

IPC分类号： B23K26/06 ,  B23K26/067 ,  B23K26/38 ,  H05K3/00 ,  B23K26/00

CPC分类号： B23K26/0676 ,  B23K26/066 ,  B23K26/067 ,  B23K26/384 ,  H05K3/0026 ,  H05K2203/0557 ,  H05K2203/1545 ,  H05K3/0032

摘要： Economical production of laser-drilled high-precision, ultra-miniature multiple-via-hole patterns is accomplished by multiplexing the homogenized, shaped, nearly-collimated output of a high-power excimer laser into a modular set of condenser lens/mask/projection lens beamlines. A substrate delivery subsystem provides a continuous supply of film substrate segments as blanks during production. Functional modularization permits the building and easy retooling of a hard-tooling multiple-beamline system powered by a high-power laser. Vertical modularization permits the building of a single-beamline soft-tooling pilot system, which may be used to demonstrate a production technique, or may be used for short production runs, and which may later be incremented with additional vertical subassemblies for additional beamlines. Multiplexing of the laser output beam into the set of beamlines is accomplished by an illumination module, which may be implemented as a single 100%-reflective fold mirror for a single-beamline pilot system, and can also be implemented as a single-block echelon mirror, or implemented as a multi-beamsplitter set of decreasing-reflectivity mirrors as mirror position approaches the beam source. The resulting product is a film blank with a via-pattern of precise micro-vias, useful as an aerosol nozzle or filter.

摘要翻译： 激光钻孔的高精度，超微型多通孔图案的经济生产通过将大功率准分子激光器的均匀化，成形，几乎准直的输出复合成模块化的聚光透镜/掩模/投影组合来实现 透镜光束。 基板输送子系统在生产期间提供作为空白的薄膜基底段的连续供应。 功能模块化允许建立并容易地重新组装由大功率激光器供电的硬工具多光束线系统。 垂直模块化允许构建单束线软工具导引系统，其可用于演示生产技术，或者可用于短生产运行，并且随后可以通过用于附加束线的附加垂直子组件来增加。 将激光输出光束复用到光束集合中由照明模块实现，照明模块可被实现为用于单光束导引系统的单个100％反射折叠反射镜，并且还可以被实现为单块梯形图 反射镜或实现为多分束器组的减少反射镜，因为镜位置接近光束源。 所得产品是具有精确微通孔的通孔图案的薄膜坯料，可用作气溶胶喷嘴或过滤器。

公开(公告)号：US6018383A

公开(公告)日：2000-01-25

申请号：US915130

申请日：1997-08-20

申请人： Thomas J. Dunn ,  Nestor O. Farmiga ,  Marc Zemel ,  Carl Weisbecker ,  Kanti Jain

发明人： Thomas J. Dunn ,  Nestor O. Farmiga ,  Marc Zemel ,  Carl Weisbecker ,  Kanti Jain

IPC分类号： G02F1/13 ,  G03B27/48 ,  G03B27/42 ,  G03B27/54

CPC分类号： G03F7/2035 ,  G02F1/13 ,  G03F1/60 ,  G03F7/703 ,  G03F7/70791

摘要： In the manufacturing of flexible, large-area electronic modules such as flat-panel displays (FPDs), the high cost and low yields of currently available patterning equipment represent a significant barrier to cost-effective production. This invention provides a projection imaging system that can pattern very large, flexible substrates at very high exposure speeds with almost any desired image resolution. The master pattern to be imprinted on the substrate is contained on a mask which, similar to the substrate, is made of a flexible material The mask and substrate are scanned by rollers through the object and the image field, respectively, of a 1:1 projection lens. All of the rollers are driven by identical drive systems linked to a common motor; therefore, the scanning of the mask and substrate is perfectly synchronized. Both the mask and the substrate, along with their rollers, are mounted on a linear translation stage. The translation stage scans continuously at a velocity which is chosen such that, for every complete rotation of the mask and substrate, the linear stage will move by the effective scan width. The entire substrate is patterned using one continuous helical scan. Suitable overlap between complementary intensity profiles produced by a hexagonal illumination configuration ensures seamless joining of the scans. The use of rollers significantly enhances the throughput and effectively reduces the payload and footprint of the scanning stage leading to substantial system cost savings.

摘要翻译： 在制造柔性的大面积电子模块如平板显示器（FPD）时，目前可用的图案设备的高成本和低产量是成本有效的生产的重要障碍。 本发明提供了一种投影成像系统，其可以以非常高的曝光速度以几乎任何所需的图像分辨率对非常大的柔性基板进行图案化。 要印在基板上的主图案被包含在与基板类似的由柔性材料制成的掩模上。掩模和基板分别通过对象和图像场的辊子被扫描1：1 投影镜头 所有的滚筒均由与普通马达相连的驱动系统驱动; 因此，掩模和基底的扫描完全同步。 掩模和基板以及它们的滚子都安装在线性平移台上。 平移阶段以选择的速度连续扫描，使得对于掩模和衬底的每次完全旋转，线性平台将移动有效扫描宽度。 使用一个连续的螺旋扫描对整个基板进行图案化。 通过六边形照明配置产生的互补强度分布之间的合适重叠确保了扫描的无缝连接。 滚筒的使用显着提高了产量，有效地减少了扫描阶段的有效载荷和占地面积，从而节省了大量的系统成本。

公开(公告)号：USRE38190E1

公开(公告)日：2003-07-22

申请号：US09867620

申请日：2001-05-30

申请人： Kanti Jain ,  Marc Zemel ,  Nestor O. Farmiga ,  Carl C. Kling

发明人： Kanti Jain ,  Marc Zemel ,  Nestor O. Farmiga ,  Carl C. Kling

IPC分类号： G02B508

CPC分类号： B60R1/087

摘要： This single-actuator-and-cam, remotely adjustable, exterior vehicle rear-view mirror provides the driver with glare-free viewing toward the rear of the vehicle, by switching between a high-reflectivity position and a low-reflectivity position at the same view adjustment. The exterior rear-view mirrors are repositioned with only a single motor working with a rotary cam to scan all possible mirror positions. The single-motor mechanism increases the reliability of the mirror system. The single motor accomplishes both the directional alignment and the day/night reflectivity adjustment of the mirror by use of a cam which has positions for all predicted view positions, with two reflectivity positions for each view. This invention works equally well with flat wedge mirrors and wide-angle convex wedge mirrors. Since each position is unique, each directional/reflectivity position can be assigned a set of digital coordinates which can be stored for each vehicle driver and each glare condition, for an initial setting which can be easily, or even automatically, adjusted for changes as the driver desires. Customizing features include manual and vehicle driver identification controlled override, start-up reset, and glare threshold setting.

摘要翻译： 这种单执行器和凸轮，可远程调节的外部车辆后视镜，通过在高反射率位置和低反射率位置之间切换，为驾驶员提供朝向车辆后方的无眩光观察 视图调整。 外部后视镜仅用单个电动机重新定位，与旋转凸轮一起工作以扫描所有可能的镜子位置。 单电机机构提高了镜面系统的可靠性。 单个电动机通过使用具有用于所有预测视图位置的位置的凸轮，并且对于每个视图具有两个反射率位置来实现反射镜的方向对准和日夜反射率调节。 本发明同样适用于平楔形镜和广角凸楔镜。 由于每个位置是唯一的，所以每个方向/反射率位置可以被分配一组可以为每个车辆驾驶员存储的数字坐标和每个眩光条件，用于初始设置，其可以容易地或甚至自动地调整为如 司机欲望 自定义功能包括手动和车辆驾驶员识别控制超驰，启动重置和眩光阈值设置。

公开(公告)号：US6142638A

公开(公告)日：2000-11-07

申请号：US404634

申请日：1999-09-23

申请人： Marc Zemel ,  Carl C Kling ,  Kanti Jain ,  Nestor O Farmiga

发明人： Marc Zemel ,  Carl C Kling ,  Kanti Jain ,  Nestor O Farmiga

IPC分类号： B60R1/08 ,  G02B27/00

CPC分类号： B60R1/087

摘要： This single-actuator-and-cam, remotely adjustable, exterior vehicle rear-view mirror provides the driver with glare-free viewing toward the rear of the vehicle, by switching between a high-reflectivity position and a low-reflectivity position at the same view adjustment. The exterior rear-view mirrors are repositioned with only a single motor working with a rotary cam to scan all possible mirror positions. The single-motor mechanism increases the reliability of the mirror system. The single motor accomplishes both the directional alignment and the day/night reflectivity adjustment of the mirror by use of a cam which has positions for all predicted view positions, with two reflectivity positions for each view. This invention works equally well with flat wedge mirrors and wide-angle convex wedge mirrors. Since each position is unique, each directional/reflectivity position can be assigned a set of digital coordinates which can be stored for each vehicle driver and each glare condition, for an initial setting which can be easily, or even automatically, adjusted for changes as the driver desires. Customizing features include manual and vehicle driver identification controlled override, start-up reset, and glare threshold setting.

摘要翻译： 这种单执行器和凸轮，可远程调节的外部车辆后视镜，通过在高反射率位置和低反射率位置之间切换，为驾驶员提供朝向车辆后方的无眩光观察 视图调整。 外部后视镜仅用单个电动机重新定位，与旋转凸轮一起工作以扫描所有可能的镜子位置。 单电机机构提高了镜面系统的可靠性。 单个电动机通过使用具有用于所有预测视图位置的位置的凸轮，并且对于每个视图具有两个反射率位置来实现反射镜的方向对准和日夜反射率调整。 本发明同样适用于平楔形镜和广角凸楔镜。 由于每个位置是唯一的，所以每个方向/反射率位置可以被分配一组可以为每个车辆驾驶员存储的数字坐标和每个眩光条件，用于初始设置，其可以容易地或甚至自动地调整为如 司机欲望 自定义功能包括手动和车辆驾驶员识别控制超驰，启动重置和眩光阈值设置。

公开(公告)号：US5969870A

公开(公告)日：1999-10-19

申请号：US932687

申请日：1997-09-18

申请人： Kanti Jain ,  Marc Zemel ,  Teik-Meng Lee ,  Nestor O. Farmiga ,  Carl C. Kling

发明人： Kanti Jain ,  Marc Zemel ,  Teik-Meng Lee ,  Nestor O. Farmiga ,  Carl C. Kling

IPC分类号： B60R1/08 ,  G02B5/08 ,  G02B17/00

CPC分类号： B60R1/087

摘要： This single-actuator-and-cam, remotely adjustable, exterior vehicle rear-view mirror provides the driver with glare-free viewing toward the rear of the vehicle, by switching between a high-reflectivity position and a low-reflectivity position at the same view adjustment. The exterior rear-view mirrors are repositioned with only a single motor working with a rotary cam to scan all possible mirror positions. The single-motor mechanism increases the reliability of the mirror system. The single motor accomplishes both the directional alignment and the day/night reflectivity adjustment of the mirror by use of a cam which has positions for all predicted view positions, with two reflectivity positions for each view. This invention works equally well with flat wedge mirrors and wide-angle convex wedge mirrors. Since each position is unique, each directional/reflectivity position can be assigned a set of digital coordinates which can be stored for each vehicle driver and each glare condition, for an initial setting which can be easily, or even automatically, adjusted for changes as the driver desires. Customizing features include manual and vehicle driver identification controlled override, start-up reset, and glare threshold setting.

公开(公告)号：US5897986A

公开(公告)日：1999-04-27

申请号：US864160

申请日：1997-05-28

申请人： Thomas J. Dunn ,  Nestor O. Farmiga ,  Kanti Jain

发明人： Thomas J. Dunn ,  Nestor O. Farmiga ,  Kanti Jain

IPC分类号： G03F7/20 ,  G03F7/22

CPC分类号： G03F7/707 ,  G03F7/70358 ,  G03F7/70475 ,  G03F7/70716 ,  G03F7/70791

摘要： A large-format substrate patterning system, for microelectronics manufacturing, utilizes a substrate docking fixture to enable relative motion between the substrate stage and the substrate. This enables exposure of a large-format substrate which has been partitioned into different modules where each module contains an entire pattern transferred from a mask. This projection system enables patterning of a large multi-module substrate using a stage whose range of travel is smaller than the size of the substrate and using a mask whose area is smaller than the size of the substrate. This is accomplished by repositioning the substrate to expose each module sequentially. In order to reposition the substrate, its location is maintained fixed in space by a substrate docking fixture while the movable stage of the lithography system is repositioned to position a different module of the substrate in the image field of the lithography tool. This allows the use of a mask whose size is determined by the size of each substrate module, and the use of a scanning stage whose required range of travel is determined by the size of the substrate module, and not by the size of the entire substrate. This eliminates the size limitation of the substrate from dependence on the range of travel of the stage, and permits the repetitive use of a small mask or series of small masks to produce a composite multi-module pattern on the substrate.

摘要翻译： 用于微电子制造的大幅面衬底图案化系统利用衬底对接固定器来实现衬底台和衬底之间的相对运动。 这使得能够将已经被划分成不同模块的大格式衬底曝光，其中每个模块包含从掩模转印的整个图案。 该投影系统能够使用其行程范围小于基板的尺寸并使用面积小于基板尺寸的掩模的大型多模块基板的图案化。 这通过重新定位衬底以顺序地暴露每个模块来实现。 为了重新定位衬底，其位置通过衬底对接固定件保持固定在空间中，而光刻系统的可移动平台被重新定位以将衬底的不同模块定位在光刻工具的图像场中。 这允许使用尺寸由每个基板模块的尺寸确定的掩模，并且使用其所需行程范围由基板模块的尺寸确定的扫描台，而不是由整个基板的尺寸 。 这消除了基板的尺寸限制依赖于载物台的行进范围，并且允许重复使用小掩模或一系列小掩模以在基底上产生复合多模块图案。

公开(公告)号：US06201597B1

公开(公告)日：2001-03-13

申请号：US09245700

申请日：1999-02-05

申请人： Thomas J. Dunn ,  Nestor O. Farmiga ,  Kanti Jain

发明人： Thomas J. Dunn ,  Nestor O. Farmiga ,  Kanti Jain

IPC分类号： G03B2742

CPC分类号： G03F7/707 ,  G03F7/70358 ,  G03F7/70475 ,  G03F7/70716 ,  G03F7/70791

摘要： A large-format substrate patterning system, for microelectronics manufacturing, utilizes a substrate docking fixture to enable relative motion between the substrate stage and the substrate. This enables exposure of a large-format substrate which has been partitioned into different modules where each module contains an entire pattern transferred from a mask. This projection system enables patterning of a large multi-module substrate using a stage whose range of travel is smaller than the size of the substrate and using a mask whose area is smaller than the size of the substrate. This is accomplished by repositioning the substrate to expose each module sequentially In order to reposition the substrate, its location is maintained fixed in space by a substrate docking fixture while the movable stage of the lithography system is repositioned to position a different module of the substrate in the image field of the lithography tool. This allows the use of a mask whose size is determined by the size of each substrate module, and the use of a scanning stage whose required range of travel is determined by the size of the substrate module, and not by the size of the entire substrate. This eliminates the size limitation of the substrate from dependence on the range of travel of the stage, and permits the repetitive use of a small mask or series of small masks to produce a composite multi-module pattern on the substrate.

摘要翻译： 用于微电子制造的大幅面衬底图案化系统利用衬底对接固定器来实现衬底台和衬底之间的相对运动。 这使得能够将已经被划分成不同模块的大格式衬底曝光，其中每个模块包含从掩模转印的整个图案。 该投影系统能够使用其行程范围小于基板的尺寸并使用面积小于基板尺寸的掩模的大型多模块基板的图案化。 这是通过重新定位衬底以顺序地暴露每个模块来实现的。为了重新定位衬底，其位置通过衬底对接固定装置保持固定在空间中，而光刻系统的可移动平台被重新定位以将衬底的不同模块定位在 光刻工具的图像场。 这允许使用尺寸由每个基板模块的尺寸确定的掩模，并且使用其所需行程范围由基板模块的尺寸确定的扫描台，而不是由整个基板的尺寸 。 这消除了基板的尺寸限制依赖于载物台的行进范围，并且允许重复使用小掩模或一系列小掩模以在基底上产生复合多模块图案。

公开(公告)号：US06515257B1

公开(公告)日：2003-02-04

申请号：US09818013

申请日：2001-03-26

申请人： Kanti Jain ,  Nestor O. Farmiga

发明人： Kanti Jain ,  Nestor O. Farmiga

IPC分类号： B23K2606

CPC分类号： B23K26/0676 ,  B23K26/067 ,  B23K26/382 ,  B23K26/389 ,  B23K26/40 ,  B23K2101/42 ,  B23K2103/16 ,  B23K2103/42 ,  B23K2103/50 ,  B23K2103/52 ,  H05K3/0026

摘要： High-performance microelectronic modules, such as chip-scale packages, flip-chip modules, integrated micro-opto-electronic boards, fine-line printed circuits, and system-on-a-package modules, span a range of sizes and interconnect densities. Current technologies for via generation are not optimized for the varied cost considerations of different manufacturing requirements—direct-write tools address low-volume needs, whereas mask-projection systems are designed for very high via-density products. The system disclosed here will be highly cost-efficient for producing a wide range of modules. Its desirable features are high-speed via generation for different via densities, full via-pattern programmability, capability to drill high-threshold photo-ablation substrates, and full and efficient utilization of available high-power excimer lasers. A high-power laser beam is divided into multiple beamlets which are simultaneously directed to different via sites by a spatial light modulator array. Beamlets not needed for via generation are returned to the illumination system and recycled with the beamlets that reach via generation sites. A control system uses via site information and material characteristics to direct necessary numbers of laser pulses to selected via sites for optimum via generation efficiency.

摘要翻译： 高性能微电子模块，如芯片级封装，倒装芯片模块，集成微型光电子板，细线印刷电路和封装系统模块，均涵盖了一系列尺寸和互连密度 。 针对不同制造要求的不同成本考虑，目前的通孔生成技术并未进行优化 - 直写式工具可满足低容量需求，而掩模投影系统则设计用于非常高的通孔密度产品。 这里公开的系统对于生产广泛的模块将是非常具有成本效益的。 其期望的特征是针对不同的通孔密度，全通孔图案可编程性，钻孔高阈值光消融基板的能力以及可用的大功率准分子激光器的全面有效利用的高速通路产生。 大功率激光束被分成多个子束，其通过空间光调制器阵列同时被引导到不同的通路位置。 通过生成不需要的光束返回到照明系统，并通过发生位置到达的小束回收。 控制系统通过现场信息和材料特性将必要数量的激光脉冲引导到选定的通道，以获得最佳的通过发电效率。

公开(公告)号：US5825558A

公开(公告)日：1998-10-20

申请号：US708209

申请日：1996-08-06

申请人： Nestor O. Farmiga ,  Kanti Jain

发明人： Nestor O. Farmiga ,  Kanti Jain

IPC分类号： G02B7/00 ,  G02B7/02

CPC分类号： G02B7/00

摘要： A three-dimensional Universal Mounting Component (UMC) system of UMC blocks provides general mounting for use in optical research in constructing layouts for experiments and breadboard-type prototypes. In such optical layouts laser beams or other light beams are directed about complex paths, often on several planes or levels. Use of the invention overcomes the problem of creating three-dimensional optical layouts with less standardized, and much more expensive, mounting adapters and posts. An economical, standardized set of UMC blocks, each with a number of holes in grid configurations, enables users to construct custom three-dimensional optical layouts. Each UMC block is a right rectangular solid of substantial standardized thickness sufficient to support it on edge. Each UMC block has a set of smooth counterbored holes from front to back and has another set of such holes from back to front. These holes allow the UMC blocks to be bolted to each other and to optical breadboards with full recessing of mounting bolts for flush connections. Each UMC block also has a set of tapped holes extending through from front to back to accommodate the direct mounting of optical components. Each UMC block also has at least one set of tapped edge holes for accepting connecting bolts in L- and T-configurations to matching counterbored holes in another appropriately sized UMC block.

摘要翻译： UMC块的三维通用安装组件（UMC）系统提供了一般安装，用于光学研究中，用于构建实验和面包板型原型的布局。 在这种光学布局中，激光束或其他光束经常在多个平面或水平上围绕复杂路径引导。 使用本发明克服了创建三维光学布局的问题，其具有较少的标准化和更昂贵的安装适配器和柱。 一个经济，标准化的UMC块，每个块都具有多个网格配置孔，使用户能够构建定制的三维光学布局。 每个UMC块是具有足以在边缘上支撑它的基本标准化厚度的正方形矩形固体。 每个UMC块具有从前到后的一组平滑的沉孔，并且从后到后具有另一组这样的孔。 这些孔允许UMC块彼此螺栓连接，并具有完全凹陷的安装螺栓用于冲洗连接的光学面包板。 每个UMC块还具有一组从前到后延伸的螺纹孔，以适应光学部件的直接安装。 每个UMC块还具有至少一组分接边缘孔，用于接收L和T构型中的连接螺栓，以匹配另一适当大小的UMC块中的沉孔。

公开(公告)号：US06577380B1

公开(公告)日：2003-06-10

申请号：US09621043

申请日：2000-07-21

申请人： Robert S. Sposili ,  Nestor O. Farmiga ,  Kanti Jain

发明人： Robert S. Sposili ,  Nestor O. Farmiga ,  Kanti Jain

IPC分类号： G03B2754

CPC分类号： H01L21/02686 ,  B23K26/06 ,  B23K26/064 ,  B23K26/0643 ,  B23K26/0648 ,  B23K26/066 ,  B23K26/0665 ,  B23K2101/40 ,  H01L21/02678 ,  H01L21/2026

摘要： A materials-processing system based on projection irradiation using a pulsed-laser source is disclosed. The salient features include a novel illumination system containing a homogenizer that produces a self-luminous light beam of selected cross-section, spatially uniform intensity, and selected numerical aperture, as well as a novel high-efficiency, energy-recycling exposure system that provides pulse-duration extension. The output of the pulsed-laser source is shaped, optionally attenuated, and homogenized, and the pulse duration is extended by the illumination system, including beam-shaping optics, homogenizer, and optionally a condenser lens or pulse-extender-plate (PEP). The illumination is imaged either onto the mask, which is in turn imaged onto the substrate, or the illumination is imaged onto the substrate directly. The high-fluence irradiation effects a desired physical change in the material, for example melting and solidification as required in the sequential lateral solidification (SLS) process. Concurrently, the substrate and/or mask are translated, in a manner precisely coordinated with the laser pulses, as dictated by the particular process being conducted. The high efficiency of the illumination system, combined with the ability to shape the homogeneous illumination into a variety of shapes, such as a high-aspect-ratio rectangle, for example, and the pulse-duration extension, renders the system uniquely capable of executing various materials-processing operations, such as SLS, post-doping annealing, and ablation in a high-throughput manner.

摘要翻译： 公开了一种基于使用脉冲激光源的投射照射的材料处理系统。 显着的特征包括一种新颖的照明系统，其包含产生选择的横截面，空间均匀强度的自发光光束和选择的数值孔径的均匀器，以及一种新颖的高效能量循环曝光系统，其提供 脉冲持续时间延长。 脉冲激光源的输出被成形，任选地衰减和均化，并且通过照明系统延长脉冲持续时间，包括光束整形光学元件，均化器和任选的聚光透镜或脉冲扩展板（PEP） 。 照明成像到掩模上，掩模又成像到基底上，或者照明被直接成像到基底上。 高通量照射影响材料中所需的物理变化，例如根据顺序横向固化（SLS）工艺所要求的熔融和固化。 同时，根据正在进行的具体过程所指示的方式，以与激光脉冲精确协调的方式平移衬底和/或掩模。 照明系统的高效率以及将均匀照明形成各种形状（例如高纵横比矩形）和脉冲持续时间扩展的能力，使系统独特地执行 各种材料加工操作，如SLS，后掺杂退火和高通量方式的消融。