公开(公告)号：US4775317A

公开(公告)日：1988-10-04

申请号：US59820

申请日：1987-06-09

申请人： Karl A. Schulke ,  Christopher J. Bayne ,  Geoffrey Hayward

发明人： Karl A. Schulke ,  Christopher J. Bayne ,  Geoffrey Hayward

IPC分类号： C23C8/06 ,  C30B31/14 ,  H01L21/22 ,  F27B9/26

CPC分类号： C30B31/14 ,  Y10S414/14

摘要： An oven for the heat treatment of semiconductor substrates, especially a diffusion oven, having an upright, heatable quartz tube and a support system made of up rods or tubes into which one or more diffusion racks can be inserted which accommodate the wafer-like substrates separated from one another and substantially parallel to one another. To create a vertically operated oven having a rheologically efficient construction in which the support system for holding the diffusion racks will be highly variable, the support system has at least two vertical supports arranged parallel to one another, on which at least one rack rest 9 is disposed, on which rack rest the diffusion rack is placed such that the substrate wafers 8 stand substantially on edge during the treatment.

摘要翻译： 一种用于热处理半导体衬底，特别是扩散炉的烘箱，其具有直立的可加热石英管和由升高的杆或管制成的支撑系统，一个或多个扩散架可以插入其中，以容纳分离的晶片状衬底 彼此并且基本上彼此平行。 为了创建具有流变学有效结构的垂直操作的烤箱，其中用于保持扩散机架的支撑系统将是高度可变的，支撑系统具有彼此平行布置的至少两个垂直支撑件，至少一个支架9 被放置在其上放置扩散架的机架上，使得在处理过程中基片8基本上位于边缘上。

公开(公告)号：US5178534A

公开(公告)日：1993-01-12

申请号：US860560

申请日：1992-03-30

申请人： Christopher J. Bayne ,  Harold C. Guiver

发明人： Christopher J. Bayne ,  Harold C. Guiver

IPC分类号： C30B31/10 ,  C30B31/14 ,  C30B31/16

CPC分类号： C30B31/10 ,  C30B31/14 ,  C30B31/16

摘要： A controlled diffusion environment capsule system (10) is used with a conventional tubular high temperature furnace (12) as employed in semiconductor manufacturing. The system (10) includes a cantilever boat loading apparatus (14) and a quartz diffusion capsule (16). Wafer carriers (20) support semiconductor wafers (22) concentrically with capsule (16) in closely spaced relationship for processing in the furnace (12). The diffusion capsule (16) is supported on a pair of quartz rods (24). A quartz injector tube (28) extends the length of the diffusion capsule (16). The injector tube (28) has three rows of high aspect-ratio apertures (30) extending along its length to disperse nitrogen or other inert gas uniformly across the sufaces (32) of the wafers (22). A quartz extender (34) is connected to the distal end of the diffusion capsule (16), through which reactant gases are supplied to the capsule (16) for diffusion and/or oxidation, from an inlet source (35) of the reactant gases on the furnace tube near the extender (34). The extender (34) has two apertured baffle plates (36) and (38) which have holes (40) and (42) in patterns that are offset relative to one another. A third plate (44) has a larger hole (46) at its center. The hole (46) focuses reactant gases into the capsule and the holes (40) and (42) provide turbulence to the reactant gas stream prior to its entry into the capsule (16) to assure uniform mixing.

摘要翻译： 与半导体制造中使用的常规管状高温炉（12）一起使用受控扩散环境胶囊系统（10）。 系统（10）包括悬臂舟装载装置（14）和石英扩散胶囊（16）。 晶片载体（20）以与密封件（16）同心的方式支撑半导体晶片（22），用于在炉子（12）中进行加工。 扩散胶囊（16）被支撑在一对石英棒（24）上。 石英注射管（28）延伸扩散胶囊（16）的长度。 注射管（28）具有三列沿其长度延伸的高纵横比孔（30），以将氮气或其它惰性气体均匀地分散在晶片（22）的表面（32）上。 石英延长器（34）连接到扩散胶囊（16）的远端，反应气体从反应物气体的入口源（35）向反应气体供给到胶囊（16）以进行扩散和/或氧化， 在炉管附近的扩展器（34）上。 扩展器（34）具有两个有孔的挡板（36）和（38），其具有相对于彼此偏移的图案中的孔（40）和（42）。 第三板（44）在其中心具有较大的孔（46）。 孔（46）将反应物气体聚集到胶囊中，并且孔（40）和（42）在其进入胶囊（16）之前向反应物气流提供湍流以确保均匀混合。

公开(公告)号：US07068925B2

公开(公告)日：2006-06-27

申请号：US10889305

申请日：2004-07-12

申请人： Christopher J. Bayne

发明人： Christopher J. Bayne

IPC分类号： F26B19/00

CPC分类号： H01L21/67178 ,  H01L21/67109 ,  H01L21/67754 ,  H01L21/67766

摘要： The present invention comprises a fully automated, fabrication compliant furnace with the advantages of the horizontal and most of the advantages of the vertical furnace. One embodiment of the present invention is that it implements a multi-degree motion robot arm to move wafers from a loading area to a WIP station where the wafers are then loaded into wafer boats on a rotating cantilever system or directly onto a specialized and reconfigurable paddle designed to hold wafers. The wafers may be loaded in the horizontal processing position as well as the vertical processing position. Multiple levels of the semi-toroidal horizontal processors allow for multiple batches of wafers to be loaded, processed, cooled and unloaded by the robot arm.The present invention reduces the footprint of the traditional horizontal or vertical furnaces, increases capacity and throughput, and allows for direct tube transfer.

摘要翻译： 本发明包括一种完全自动化的制造兼容炉，具有立式炉的水平和大部分优点的优点。 本发明的一个实施例是其实现多程度运动机器人臂以将晶片从装载区域移动到WIP站，其中晶片然后在旋转的悬臂系统上装载到晶片舟皿中或直接装载到专门和可重新配置的桨 旨在保存晶圆。 晶片可以被加载在水平处理位置以及垂直处理位置。 半环形水平处理器的多个级别允许多个批次的晶片由机器人手臂装载，加工，冷却和卸载。 本发明减少了传统的卧式或立式炉的占地面积，增加了容量和产量，并且允许直接的管传送。

公开(公告)号：US07584976B2

公开(公告)日：2009-09-08

申请号：US11529734

申请日：2006-09-29

申请人： Christopher J. Bayne ,  Stephen Barker

发明人： Christopher J. Bayne ,  Stephen Barker

IPC分类号： B62M1/14

CPC分类号： B62K3/16 ,  A61G5/023 ,  A61G5/025 ,  A61G5/1051 ,  A61G5/1075

摘要： The Trike's unique power source is provided by a rowing-type motion of the user rather than the less efficient “hand rim” grip or wrist propulsion. The rowing motion significantly reduces the chances for repetitive stress injuries, like carpal tunnel. Furthermore, the rowing motion and movements, are designed to facilitate efficient propulsion and steering in combination, to be effected simultaneously. The rowing motion allows the user's full arm strength and full range of motion to assist in the powering of the vehicle. The wheelchair also has a retractable fifth or propulsion wheel that allows the chair to be used in a confined space without sacrificing performance.

摘要翻译： Trike独特的动力源由用户的划船式运动提供，而不是效率较低的“手轮”握力或手腕推进。 划船运动显着降低了重复性压力伤害（如腕管）的机会。 此外，划船运动和运动被设计为有助于有效推进和转向组合，同时进行。 划船运动允许用户的全臂强度和全范围的运动来协助车辆的动力。 轮椅还具有可伸缩的第五或推进轮，允许椅子在狭窄的空间中使用，而不会牺牲性能。

公开(公告)号：US4431361A

公开(公告)日：1984-02-14

申请号：US297632

申请日：1981-08-31

申请人： Christopher J. Bayne

发明人： Christopher J. Bayne

IPC分类号： H01L21/677 ,  B65G65/04 ,  B65G65/30

CPC分类号： H01L21/67781 ,  Y10S414/138 ,  Y10S414/14

摘要： Articles, such as fragile, delicate semiconductor wafers, in a first carrier member are caused to pass nearly, but not quite wholly, into a second carrier member by being pushed--against gravity--thereinto. The carrier members are then subjected to a displacement, e.g. by inversion, and said articles are allowed to drop wholly into said second carrier member. The further distance travelled by the articles after rotational displacement of a housing retaining the carrier members is very small, e.g. about 2 mm.

摘要翻译： 在第一承载构件中的诸如脆弱的精细的半导体晶片之类的物品通过被推入其中而几乎而不完全地通过第二载体构件。 然后使载体构件进行位移，例如 通过反转，并且允许所述制品完全落入所述第二承载构件。 在保持载体构件的壳体的旋转位移之后，物品行进的距离非常小，例如， 约2毫米。

公开(公告)号：US20120187649A1

公开(公告)日：2012-07-26

申请号：US13263683

申请日：2010-04-07

申请人： Christopher J. Bayne ,  Stephen Barker

发明人： Christopher J. Bayne ,  Stephen Barker

IPC分类号： A61G5/02

CPC分类号： B62M1/12 ,  B62K5/025 ,  B62K2015/005 ,  B62M1/16

摘要： The present invention solves many of the problems for the wheelchair bound individual who wants an ergonomically sensible, convenient, yet powerful and stable wheelchair. The Trike's unique power source is provided by a rowing-type motion of the user rather than the less efficient “hand rim” grip or wrist propulsion. Power is generated both in the out rowing stroke and the in rowing stroke through a inventive power drive. The rowing motion significantly reduces the chances for repetitive stress injuries, like carpal tunnel. Furthermore, the rowing motion and movements are designed to facilitate efficient propulsion and steering in combination, to be effected simultaneously. The rowing motion allows the user's full arm strength and full range of motion to assist in the powering of the vehicle.

摘要翻译： 本发明解决了轮椅束缚的人想要符合人体工程学的理性，方便，强大和稳定的轮椅的许多问题。 Trike独特的动力源由用户的划船式运动提供，而不是效率较低的“手轮”握力或手腕推进。 通过本发明的动力驱动，在出赛艇和赛艇冲程中产生动力。 划船运动显着降低了重复性压力伤害（如腕管）的机会。 此外，划船运动和运动被设计成有助于有效推进和转向组合，同时进行。 划船运动允许用户的全臂强度和全范围的运动来协助车辆的动力。

公开(公告)号：US4911638A

公开(公告)日：1990-03-27

申请号：US354133

申请日：1989-05-18

申请人： Christopher J. Bayne ,  H. Chris Guiver

发明人： Christopher J. Bayne ,  H. Chris Guiver

IPC分类号： C30B31/10 ,  C30B31/14 ,  C30B31/16

CPC分类号： C30B31/10 ,  C30B31/14 ,  C30B31/16 ,  Y10S414/14

摘要： A controlled diffusion environment capsule system (10) is used with a conventional tubular high temperature furnace (12) as employed in semiconductor manufacturing. The system (10) includes a cantilever boat loading apparatus (14) and a quartz diffusion capsule (16). Wafer carriers (20) support semiconductor wafers (22) concentrically with capsule (16) in closely spaced relationship for processing in the furnace (12). The diffusion capsule (16) is supported on a pair of quartz rods (24). A quartz injector tube (28) extends the length of the diffusion capsule (16). The injector tube (28) has three rows of high aspect-ratio apertures (30) extending along its length to disperse nitrogen or other inert gas uniformly across the surfaces (32) of the wafers (22). A quartz extender (34) is connected to the distal end of the diffusion capsule (16), through which reactant gases are supplied to the capsule (16) for diffusion and/or oxidation, from an inlet source (35) of the reactant gases on the furnace tube near the extender (34). The extender (34) has two apertured baffle plates (36) and (38) which have holes (40) and (42) in patterns that are offset relative to one another. A third plate (44) has a larger hole (46) at its center. The hole (46) focuses reactant gases into the capsule and the holes (40) and (42) provide turbulence to the reactant gas stream prior to its entry into the capsule (16) to assure uniform mixing.

摘要翻译： 与半导体制造中使用的常规管状高温炉（12）一起使用受控扩散环境胶囊系统（10）。 系统（10）包括悬臂舟装载装置（14）和石英扩散胶囊（16）。 晶片载体（20）以与密封件（16）同心的方式支撑半导体晶片（22），用于在炉子（12）中进行加工。 扩散胶囊（16）被支撑在一对石英棒（24）上。 石英注射管（28）延伸扩散胶囊（16）的长度。 注射管（28）具有三列沿其长度延伸的高纵横比孔（30），以将氮气或其它惰性气体均匀地分散在晶片（22）的表面（32）上。 石英延长器（34）连接到扩散胶囊（16）的远端，反应气体从反应物气体的入口源（35）向反应气体供给到胶囊（16）以进行扩散和/或氧化， 在炉管附近的扩展器（34）上。 扩展器（34）具有两个有孔的挡板（36）和（38），其具有相对于彼此偏移的图案中的孔（40）和（42）。 第三板（44）在其中心具有较大的孔（46）。 孔（46）将反应物气体聚集到胶囊中，并且孔（40）和（42）在其进入胶囊（16）之前向反应物气流提供湍流以确保均匀混合。

公开(公告)号：US4523885A

公开(公告)日：1985-06-18

申请号：US483724

申请日：1983-04-11

申请人： Christopher J. Bayne ,  Joseph L. Lambert ,  Graham E. Collyer

发明人： Christopher J. Bayne ,  Joseph L. Lambert ,  Graham E. Collyer

IPC分类号： C30B31/10 ,  C30B33/00 ,  F27D5/00

CPC分类号： C30B31/103 ,  C30B33/005 ,  Y10S414/141

摘要： Apparatus for introducing silicon wafers in magazines into a process tube of a furnace or diffusion oven. At least two spaced silica tubes closed at the end next adjacent the process tube constitute supporting members for the loaded magazines and a clamping device holds and supports said members cantilever-fashion by that end thereof remote from the process tube. Motor means are associated with the clamping device for moving the supporting members with the loaded magazines thereon into and out of the process tube in a substantially horizontal direction in such a manner that the magazines and their supporting members remain entirely suspended throughout the loading, processing and unloading operations: thus no part thereof comes into contact with the interior wall of the process tube. The silica tubes preferably constitute a sheathing surrounding inserts in two or more sections fitting one within the other: the insert nearest the furnace is preferably silicon carbide and the insert remote from the furnace is preferably sintered alumina.

摘要翻译： 用于将杂志中的硅晶片引入炉或扩散炉的工艺管中的装置。 在靠近处理管的端部处封闭的至少两个隔开的二氧化硅管构成用于装载的盒的支撑构件，并且夹紧装置保持和支撑所述构件的悬臂方式，其远离工艺管的端部。 电动机装置与夹紧装置相关联，用于将支撑构件与装载的箱体在基本上水平的方向上移入和移出工艺管，使得杂志及其支撑构件在整个装载， 卸载操作：因此其任何部分都不会与处理管的内壁接触。 二氧化硅管优选构成在两个或更多个部分中的两个或多个部分中的护套围绕另一个安装：最接近炉的插入件优选为碳化硅，并且远离炉的刀片优选为烧结氧化铝。