公开(公告)号：US4653650A

公开(公告)日：1987-03-31

申请号：US790326

申请日：1985-10-23

申请人： Karl A. Schulke

发明人： Karl A. Schulke

IPC分类号： B65D85/38 ,  F27D5/00 ,  H01L21/67 ,  H01L21/673 ,  A47G19/08

CPC分类号： F27D5/0012 ,  Y10S206/833

摘要： A rack for supporting wafers has a pair of parallel struts with kerfs therealong for supporting the wafers. A dummy wafer is attached to the struts near each end of the struts to connect the struts structurally as the rack and serve as rack-handling handles. The dummy wafers are parallel to the adjacent kerfs and thus the wafers therein and dimensioned similarly to the wafers for providing favorable gas and heat distribution when a wafer loaded rack is placed in a furnace. This adapts the rack for diffusion treatment of semiconductor wafers.

摘要翻译： 用于支撑晶片的支架具有一对具有用于支撑晶片的切口的平行支柱。 将假晶片附接到支柱每个支柱附近的支柱，以将支柱结构地连接到支架上并用作支架处理手柄。 虚拟晶片平行于相邻的切口，因此平行于其中的晶片，并且其尺寸类似于晶片，以便当晶片加载的机架放置在炉中时提供有利的气体和热分布。 这适应了机架用于半导体晶片的扩散处理。

公开(公告)号：US4349203A

公开(公告)日：1982-09-14

申请号：US290885

申请日：1981-08-07

申请人： Karl A. Schulke

发明人： Karl A. Schulke

IPC分类号： F16L23/16 ,  F16L23/12 ,  F16L49/00 ,  F16J15/10

CPC分类号： F16L23/12 ,  Y10S285/911

摘要： To provide a flange connection between two materials of substantially different thermal coefficient of expansion, for example a glass, typically quartz glass or ceramic material and a metallic material, for example cast iron or steel, with an interposed sealing ring of an elastomer, for example rubber, the flange seating surfaces are formed at an angle of inclination with respect to the central axis of the tubes to define a shallow cone having a cone angle (.alpha.) defined by arc tan .mu..sub.O, in which .mu..sub.O is the coefficient of friction between the material of the sealing ring and the adjacent material which includes the theoretical core of the cone, typically the glass or ceramic element forming the connection, the maximum cone angle being 45.degree.. One of the elements, typically the metal element, can be formed with a groove to receive a portion of the sealing ring and locate it in position.

摘要翻译： 为了提供具有基本上不同的热膨胀系数的两种材料之间的法兰连接，例如玻璃，通常为石英玻璃或陶瓷材料以及金属材料，例如铸铁或钢，具有插入的弹性体密封环，例如 橡胶，凸缘座面形成为相对于管的中心轴线倾斜的角度，以限定具有由弧形tan mu O限定的锥角（α）的浅锥体，其中μO是摩擦系数 在密封环的材料和包括锥体的理论核心的相邻材料之间，通常是形成连接的玻璃或陶瓷元件，最大锥角为45°。 元件之一，通常是金属元件，可以形成有凹槽，以容纳密封环的一部分并将其定位。

公开(公告)号：US4778202A

公开(公告)日：1988-10-18

申请号：US53236

申请日：1987-05-22

申请人： Karl A. Schulke

发明人： Karl A. Schulke

IPC分类号： F16L23/02 ,  B01L3/04 ,  C30B25/08 ,  C30B31/10 ,  C30B35/00 ,  F16L47/14 ,  F16L49/00

CPC分类号： C30B35/002 ,  C30B31/10 ,  F16L47/14 ,  Y10S285/901 ,  Y10S285/911

摘要： Tubular components made out of quartz glass or fused quartz, such as tubes, bells, hoods, or pans, with a flange fused or welded onto them are known. To improve cooling such a tubular component, especially the sealing surfaces of the flange, heat conduction and heat radiation in the vicinity of the flange are extensively avoided and, to make it possible to create long-diameter tubular components, the flange is designed hollow and narrow-walled, whereby a coolant, preferably water or a gas, can be conveyed through the hollow space in one preferred embodiment for purposes of interior cooling or the hollow space can be packed with a heat-insulating material.

摘要翻译： 已知由石英玻璃或熔融石英制成的管状部件，例如管子，钟罩，罩子或平底锅，其中凸缘熔合或焊接在其上。 为了改进这种管状部件的冷却，特别是法兰的密封表面，在法兰附近的热传导和热辐射被广泛地避免，并且为了形成长直径的管状部件，凸缘被设计为空心的 在一个优选实施例中，为了内部冷却的目的，可以将冷却剂，优选水或气体输送通过中空空间，或者可以用隔热材料填充中空空间。

公开(公告)号：US4775317A

公开(公告)日：1988-10-04

申请号：US59820

申请日：1987-06-09

申请人： Karl A. Schulke ,  Christopher J. Bayne ,  Geoffrey Hayward

发明人： Karl A. Schulke ,  Christopher J. Bayne ,  Geoffrey Hayward

IPC分类号： C23C8/06 ,  C30B31/14 ,  H01L21/22 ,  F27B9/26

CPC分类号： C30B31/14 ,  Y10S414/14

摘要： An oven for the heat treatment of semiconductor substrates, especially a diffusion oven, having an upright, heatable quartz tube and a support system made of up rods or tubes into which one or more diffusion racks can be inserted which accommodate the wafer-like substrates separated from one another and substantially parallel to one another. To create a vertically operated oven having a rheologically efficient construction in which the support system for holding the diffusion racks will be highly variable, the support system has at least two vertical supports arranged parallel to one another, on which at least one rack rest 9 is disposed, on which rack rest the diffusion rack is placed such that the substrate wafers 8 stand substantially on edge during the treatment.

摘要翻译： 一种用于热处理半导体衬底，特别是扩散炉的烘箱，其具有直立的可加热石英管和由升高的杆或管制成的支撑系统，一个或多个扩散架可以插入其中，以容纳分离的晶片状衬底 彼此并且基本上彼此平行。 为了创建具有流变学有效结构的垂直操作的烤箱，其中用于保持扩散机架的支撑系统将是高度可变的，支撑系统具有彼此平行布置的至少两个垂直支撑件，至少一个支架9 被放置在其上放置扩散架的机架上，使得在处理过程中基片8基本上位于边缘上。

公开(公告)号：US4397897A

公开(公告)日：1983-08-09

申请号：US331938

申请日：1981-12-17

申请人： Karl A. Schulke

发明人： Karl A. Schulke

IPC分类号： C01B33/02 ,  C01B33/021 ,  C01B33/035 ,  C03B20/00 ,  C23C16/44 ,  C30B25/08 ,  H01L21/205 ,  H01L21/31 ,  B65D1/00

CPC分类号： C01B33/035 ,  C03B20/00 ,  C23C16/4404 ,  C23C16/4418 ,  Y10T428/1317 ,  Y10T428/24479

摘要： Bell of translucent fused silica having an inner layer of transparent fused silica for the precipitation of polysilicon. The thickness of the transparent fused silica layer increases continuously towards the open end of the bell while the total wall thickness of the bell is kept constant. The thickness increase of the transparent fused silica layer begins preferably beyond the center of the total length of the bell. The thickness of the transparent fused silica layer increases by at least half of the thickness which it has in the top part of the bell.

摘要翻译： 具有透明熔融二氧化硅内层的半透明熔融二氧化硅的钟，用于沉淀多晶硅。 透明熔融二氧化硅层的厚度朝着钟形的开口端连续增加，而钟的总壁厚保持恒定。 透明熔融二氧化硅层的厚度增加优选地超过钟的总长度的中心。 透明熔融二氧化硅层的厚度至少增加了其在顶部的厚度的一半。

公开(公告)号：US4370158A

公开(公告)日：1983-01-25

申请号：US225564

申请日：1981-01-16

申请人： Karl A. Schulke

发明人： Karl A. Schulke

IPC分类号： H01L21/205 ,  C30B31/10 ,  C30B31/18 ,  H01L21/22 ,  H01L21/324 ,  C03B32/00

CPC分类号： C30B31/10 ,  C30B31/18 ,  H01L21/324

摘要： An improved method for the heat treatment of quartz-glass tubes at temperatures above 1200.degree. C. is disclosed wherein a pressure is maintained within the glass tube which is 3 to 110 mm Hg higher than the pressure on the external surface of the quartz tube over the heated area of the tube for at least the length of time that a temperature of 1200.degree. C. is exceeded. The process is particularly useful for the treatment of quartz-glass tubes within which silicon wafers are disposed for the purpose of diffusing doping agent into silicon wafers or of depositing doped epitaxial layers on silicon wafers.

摘要翻译： 公开了一种用于在高于1200℃的温度下对石英玻璃管进行热处理的改进方法，其中在玻璃管内保持比石英管外表面上的压力高3至110mm Hg的压力， 管的加热面积至少超过1200℃的时间长度。 该方法对于处理其中设置硅晶片以将掺杂剂扩散到硅晶片或在硅晶片上沉积掺杂的外延层的目的的石英玻璃管特别有用。

公开(公告)号：US4488743A

公开(公告)日：1984-12-18

申请号：US401920

申请日：1982-07-26

申请人： Karl A. Schulke

发明人： Karl A. Schulke

IPC分类号： F16L23/024 ,  F16L23/026 ,  F16L23/028 ,  F16L49/04 ,  F16L17/06

CPC分类号： F16L49/04 ,  Y10S285/911

摘要： To connect together tubular elements, such as pipes and the like, made of materials which are difficult to machine and handle, and which are expensive, such as quartz glass, or quartz materials or quartz-ceramic goods used, for example, in laboratory or chemical processing apparatus, the end portions of the tubular elements are formed with a circumferential groove or recess in which a spring ring made of metal, fiber-reinforced plastic, or the like, is snapped, the spring ring (3) being clamped at its external, projecting surface by a conical surface (8) on a flange ring (4) and a similar conical surface (8) on a counter ring, the flange ring and the counter ring being clamped by connecting bolts (6); two such elements can be connected together by passing connecting bolts (10) through aligned openings (7) in the flange rings; preferably, the connecting bolts are spring-loaded (11). The engagement angles of the conical surfaces (8) on the rings are, for example, about 38.degree. each with respect to a plane passing transversely through the axis of the tubular quartz goods.

摘要翻译： 将由难以加工和处理的材料制成的管状元件（例如管道等）连接在一起，并且昂贵的诸如石英玻璃或石英材料或石英陶瓷制品，例如在实验室或 化学处理装置，管状元件的端部形成有圆周凹槽或凹槽，弹性环由金属，纤维增强塑料等制成，弹簧环（3）夹在其上 通过凸缘环（4）上的锥形表面（8）和对置环上的类似锥形表面（8）的外部突出表面，凸缘环和对置环由连接螺栓（6）夹紧; 通过将连接螺栓（10）穿过法兰环中的对准的开口（7）将两个这样的元件连接在一起; 优选地，连接螺栓是弹簧加载的（11）。 环上的锥形表面（8）的接合角度相对于穿过管状石英制品的轴线的平面相对于例如大约38度。

公开(公告)号：US4367768A

公开(公告)日：1983-01-11

申请号：US122089

申请日：1980-02-19

申请人： Karl A. Schulke

发明人： Karl A. Schulke

IPC分类号： H01L21/22 ,  C30B25/08 ,  C30B31/10 ,  C23C13/08

CPC分类号： C30B31/10 ,  C30B25/08 ,  Y10T137/7902 ,  Y10T137/7922

摘要： In a refractory protective tube for the heat treatment of semiconductor components which is constricted at one end and at such constricted end is provided with a treating or working gas inlet, said tube having opposite to said gas inlet a closed end provided with a gas outlet, the improvement for the prevention of back diffusion of ambient air wherein said closed end is closed by a cover which is fastened to a holding bracket which is movably suspended from the tube.

摘要翻译： 在用于热处理半导体部件的耐火保护管中，所述半导体部件在一端被收缩并且在这种收缩端处设置有处理或工作气体入口，所述管与所述气体入口相对，具有设置有气体出口的封闭端， 防止环境空气的背面扩散的改进，其中所述封闭端被固定到可移动地从管中悬挂的保持支架的盖封闭。

公开(公告)号：US4530818A

公开(公告)日：1985-07-23

申请号：US345513

申请日：1982-02-04

申请人： Alfons Gutermann ,  Heinz Herzog ,  Heinrich Mohn ,  Karl A. Schulke

发明人： Alfons Gutermann ,  Heinz Herzog ,  Heinrich Mohn ,  Karl A. Schulke

IPC分类号： C30B25/08 ,  H01L21/205 ,  H01L21/22 ,  H01L21/31

CPC分类号： C30B25/08

摘要： An epitaxy bell of transparent fused silica is provided with a flanged, thick-walled tubular piece of transparent fused silica on the side on which a process gas is exhausted. The wall thickness of the constricted portion of the bell is increased toward the transparent fused silica tubular piece.

摘要翻译： 透明熔融二氧化硅的外延钟在其上排出处理气体的一侧设置有带凸缘的厚壁管状透明熔融石英片。 喇叭的收缩部分的壁厚朝着透明熔融石英管状件增加。

公开(公告)号：US4497277A

公开(公告)日：1985-02-05

申请号：US467998

申请日：1983-02-18

申请人： Karl A. Schulke

发明人： Karl A. Schulke

IPC分类号： C01B33/035 ,  C23C14/56 ,  C23C16/44 ,  C23C13/08

CPC分类号： C23C16/4418 ,  C01B33/035 ,  C23C14/56 ,  C23C16/4404

摘要： A bell made of opaque fused silica and intended for use in the deposition of polycrystalline silicon is assembled from at least three individual sections. The sections are joined to one another at end flanges with gaskets between the flanges. The lengths of the individual sections are determined by the temperature distribution along the bell in use.

摘要翻译： 由不透明的熔融二氧化硅制成的并用于沉积多晶硅的钟由至少三个单独的部分组装。 这些部分在端部凸缘处彼此连接，在凸缘之间具有垫圈。 单个部分的长度由沿着使用的钟的温度分布确定。