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1.发明授权Semiconductor fabrication facility visualization system with performance optimization 有权半导体制造设备可视化系统，具有性能优化公开(公告)号：US08229587B2
公开(公告)日：2012-07-24
申请号：US12390395
申请日：2009-02-20
IPC分类号： G06F19/00
CPC分类号： G05B19/41885 , G05B2219/31334 , G05B2219/31466 , G05B2219/45031 , H01L21/67276 , Y02P90/16 , Y02P90/185 , Y02P90/26 , Y02P90/86
摘要： A semiconductor fabrication facility (fab) configuration module is defined to virtually model physical systems and attributes of a fab. A data acquisition module is defined to interface with the physical systems of the fab and gather operational data from the physical systems. A visualizer module is defined to collect and aggregate the operational data gathered from the physical systems. The visualizer module is further defined to process the operational data into a format suitable for visual rendering. The processed operational data is displayed within a visual context of the fab in a graphical user interface controlled by the visualizer module. An analyzer module is defined to analyze data collected by the visualizer module and to resolve queries regarding fab performance. An optimizer module is defined to control systems within the fab in response to data collected by the visualizer module, data generated by the analyzer module, or a combination thereof.
摘要翻译： 半导体制造设备（fab）配置模块被定义为虚拟模拟晶圆厂的物理系统和属性。 数据采集模块被定义为与物理系统的物理系统进行接口，并从物理系统收集操作数据。 定义了可视化模块，用于收集和汇总从物理系统收集的操作数据。 视觉化模块被进一步定义为将操作数据处理成适合于视觉呈现的格式。 经处理的操作数据显示在由可视化模块控制的图形用户界面中的晶圆厂的视觉上下文中。 分析器模块被定义为分析可视化模块收集的数据，并解析有关工厂性能的查询。 定义优化器模块以响应由可视化器模块收集的数据，由分析器模块生成的数据或其组合来控制晶圆厂内的系统。
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公开(公告)号：US20100023151A1
公开(公告)日：2010-01-28
申请号：US12390395
申请日：2009-02-20
CPC分类号： G05B19/41885 , G05B2219/31334 , G05B2219/31466 , G05B2219/45031 , H01L21/67276 , Y02P90/16 , Y02P90/185 , Y02P90/26 , Y02P90/86
摘要： A semiconductor fabrication facility (fab) configuration module is defined to virtually model physical systems and attributes of a fab. A data acquisition module is defined to interface with the physical systems of the fab and gather operational data from the physical systems. A visualizer module is defined to collect and aggregate the operational data gathered from the physical systems. The visualizer module is further defined to process the operational data into a format suitable for visual rendering. The processed operational data is displayed within a visual context of the fab in a graphical user interface controlled by the visualizer module. An analyzer module is defined to analyze data collected by the visualizer module and to resolve queries regarding fab performance. An optimizer module is defined to control systems within the fab in response to data collected by the visualizer module, data generated by the analyzer module, or a combination thereof.
摘要翻译： 半导体制造设备（fab）配置模块被定义为虚拟模拟晶圆厂的物理系统和属性。 数据采集模块被定义为与物理系统的物理系统进行接口，并从物理系统收集操作数据。 定义了可视化模块，用于收集和汇总从物理系统收集的操作数据。 视觉化模块被进一步定义为将操作数据处理成适合于视觉呈现的格式。 经处理的操作数据显示在由可视化模块控制的图形用户界面中的晶圆厂的视觉上下文中。 分析器模块被定义为分析可视化模块收集的数据，并解析有关工厂性能的查询。 定义优化器模块以响应由可视化器模块收集的数据，由分析器模块生成的数据或其组合来控制晶圆厂内的系统。
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