公开(公告)号：US20080291419A1

公开(公告)日：2008-11-27

申请号：US12187116

申请日：2008-08-06

申请人： Karl-Stefan Weissenrieder ,  Alexander Hirnet ,  Alexandra Pazidis ,  Karl-Heinz Schuster ,  Christoph Zaczek ,  Michael Lill ,  Patrick Scheible ,  Guenter Scheible ,  Harald Schink ,  Markus Brotsack ,  Ulrich Loering ,  Toralf Gruner ,  Sigrid Scheible

发明人： Karl-Stefan Weissenrieder ,  Alexander Hirnet ,  Alexandra Pazidis ,  Karl-Heinz Schuster ,  Christoph Zaczek ,  Michael Lill ,  Patrick Scheible ,  Guenter Scheible ,  Harald Schink ,  Markus Brotsack ,  Ulrich Loering ,  Toralf Gruner ,  Sigrid Scheible

IPC分类号： G03B27/54 ,  G03B27/32

CPC分类号： G03F7/70983 ,  G03F7/70341

摘要： In a projection objective provided for imaging a pattern arranged in an object plane of the projection objective into an image plane of the projection objective with the aid of an immersion medium arranged between a last optical element of the projection objective in the light path and the image plane, the last optical element has a transparent substrate and a protective layer system that is fitted to the substrate, is provided for contact with the immersion medium and serves for increasing the resistance of the last optical element to degradation caused by the immersion medium.

公开(公告)号：US20050286827A1

公开(公告)日：2005-12-29

申请号：US11130173

申请日：2005-05-17

申请人： Patrick Scheible ,  Guenter Scheible ,  Sigrid Scheible ,  Harald Schink ,  Alexander Hirnet

发明人： Patrick Scheible ,  Guenter Scheible ,  Sigrid Scheible ,  Harald Schink ,  Alexander Hirnet

IPC分类号： G02B1/02 ,  G02B1/10 ,  G02B1/11 ,  G02B3/00 ,  G02B5/08 ,  G02B5/10 ,  G02F1/295

CPC分类号： G02B5/0833 ,  G02B1/02 ,  G02B1/113 ,  G02B3/00 ,  G02B5/0891 ,  G02B5/10 ,  Y10S117/902

摘要： An optical component has a substrate, on which at least one curved substrate surface is formed that defines an optical axis of the optical component, wherein the substrate surface is coated with a multilayer coating that is active in the ultraviolet region at a design wavelength λ0 and includes a first layer, applied to the substrate surface, made from a first dielectric material and at least one second layer, applied to the first layer, made from a second dielectric material. The substrate consists essentially of a crystal material that has an axially parallel crystal direction, running parallel to the optical axis, and edge crystal directions perpendicular to edge regions of the curved substrate surface. An angle between the axially parallel crystal direction and the edge crystal directions is at least 17°, and the first layer has an essentially untextured layer structure. An anisotropy, caused by the substrate structure, in the optical properties of the multilayer coating can thereby be avoided.

摘要翻译： 光学部件具有基板，在该基板上形成限定光学部件的光轴的至少一个弯曲的基板表面，其中基板表面涂覆有多个涂层，该多层涂层在设计波长λ< 并且包括由第一介电材料制成的施加到基板表面的第一层和施加到由第二介电材料制成的第一层的至少一个第二层。 衬底基本上由具有平行于光轴的平行晶体方向和垂直于弯曲衬底表面的边缘区域的边缘晶体方向的晶体材料组成。 轴向平行晶体方向和边缘晶体方向之间的角度至少为17°，并且第一层具有基本上无纹理的层结构。 由此可以避免由基板结构引起的多层涂层的光学性质的各向异性。