利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

28 条记录 (耗时 0.044 秒)

    Micromirror arrangement having a coating and method for the production thereof
    8.
    发明授权
    Micromirror arrangement having a coating and method for the production thereof 有权
    具有涂层的微镜布置及其制造方法

    公开(公告)号：US08928980B2

    公开(公告)日：2015-01-06

    申请号：US13350719

    申请日：2012-01-13

    申请人： Karl-Stefan Weissenrieder ,  Roland Loercher ,  Alexandra Pazidis

    发明人： Karl-Stefan Weissenrieder ,  Roland Loercher ,  Alexandra Pazidis

    IPC分类号： G02B1/10 ,  G03F7/20

    CPC分类号： G03F7/70958 ,  G03F7/70291

    摘要： A micromirror arrangement (1) having: at least one micromirror (3) having a reflective surface (11) formed at a mirror substrate (2), and an antireflective coating (7) formed at the mirror substrate (2) outside the reflective surface (11). A reflective coating (8) is formed within the reflective surface (11) and has at least two layer subsystems, wherein the first layer subsystem has layers (8e, 8f) composed of a periodic sequence of alternate high and low refractive index layers composed of a nonmetallic material and is optimized with regard to the reflectivity in respect of a used wavelength of the micromirror arrangement, and wherein the second layer subsystem is optimized with regard to the reflectivity in respect of a measurement wavelength of the micromirror arrangement, said measurement wavelength deviating from the used wavelength.

    摘要翻译： 一种微镜装置（1），具有：具有形成在反射镜基板（2）上的反射表面（11）的至少一个微反射镜（3）和形成在所述反射镜基板（2）的反射表面外侧的抗反射涂层 （11）。 反射涂层（8）形成在反射表面（11）内，并且具有至少两个层子系统，其中第一层子系统具有层（8e，8f），层（8e，8f）由周期性序列组成，交替的高低折射率层由 非金属材料，并且关于微镜装置的使用波长的反射率被优化，并且其中关于微镜装置的测量波长的反射率优化第二层子系统，所述测量波长偏离 从使用的波长。

    Objective with crystal lenses
    9.
    发明申请
    Objective with crystal lenses 审中-公开
    目标水晶镜片

    公开(公告)号：US20070242250A1

    公开(公告)日：2007-10-18

    申请号：US11765200

    申请日：2007-06-19

    申请人： Aksel Goehnermeier ,  Alexandra Pazidis ,  Birgit Kuerz ,  Christoph Zaczek ,  Daniel Kraehmer

    发明人： Aksel Goehnermeier ,  Alexandra Pazidis ,  Birgit Kuerz ,  Christoph Zaczek ,  Daniel Kraehmer

    IPC分类号： G02B27/28 ,  G03B27/52 ,  H01L21/00

    CPC分类号： G02B1/02 ,  G02B1/08 ,  G02B5/3083 ,  G02B13/14 ,  G02B27/0043 ,  G02B27/286 ,  G03F7/70225 ,  G03F7/70241 ,  G03F7/70566 ,  G03F7/70958 ,  G03F7/70966

    摘要： Objective, in particular a projection objective for a microlithography projection-exposure installation, with at least one fluoride crystal lens. A reduction in the detrimental influence of birefringence is achieved if this lens is a (100)-lens with a lens axis which is approximately perpendicular to the {100} crystallographic planes or to the crystallographic planes equivalent thereto of the fluoride crystal. In the case of objectives with at least two fluoride crystal lenses, it is favorable if the fluoride crystal lenses are arranged such that they are rotated with respect to one another. The lens axes of the fluoride crystal lenses may in this case point not only in the crystallographic direction but also in the crystallographic direction or in the crystallographic direction. A further reduction in the detrimental influence of birefringence is achieved by the simultaneous use of groups with (100)-lenses rotated with respect to one another and groups with (111)-lenses or (110)-lenses rotated with respect to one another. A further reduction in the detrimental influence of birefringence is obtained by covering an optical element with a compensation coating.

    摘要翻译： 目的，特别是具有至少一种氟化物晶体透镜的微光刻投影曝光装置的投影物镜。 如果该透镜是具有近似垂直于{100}晶面的透镜轴或与氟化物晶体相当的结晶平面的透镜轴，则实现双折射的有害影响的减小。 在具有至少两个氟化物晶体透镜的物镜的情况下，如果将氟化物晶体透镜相对于彼此旋转布置是有利的。 在这种情况下，氟化物晶体透镜的透镜轴不仅在<100>晶体方向，而且在<111>晶体方向或<110>晶体方向。 双折射的有害影响的进一步减少是通过同时使用具有相对于彼此旋转的（100） - 相的组和具有相对于彼此旋转的（111） - 透镜或（110）相的组而实现的。 通过用补偿涂层覆盖光学元件来获得双折射的有害影响的进一步减少。