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    Optical component and coating system for coating substrates for optical components
    1.
    发明申请
    Optical component and coating system for coating substrates for optical components 有权
    用于光学部件涂覆基板的光学部件和涂层系统

    公开(公告)号：US20050146683A1

    公开(公告)日：2005-07-07

    申请号：US11052751

    申请日：2005-02-09

    申请人： Harry Bauer ,  Matthias Heller ,  Hans-Jochen Paul ,  Jens Ullmann ,  Patrick Scheible ,  Christoph Zaczek

    发明人： Harry Bauer ,  Matthias Heller ,  Hans-Jochen Paul ,  Jens Ullmann ,  Patrick Scheible ,  Christoph Zaczek

    IPC分类号： G02B1/11 ,  B05B13/02 ,  B05B15/04 ,  B05D1/32 ,  C03C17/245 ,  C23C14/04 ,  C23C14/50 ,  G02B1/10 ,  G02C7/02

    CPC分类号： G02B1/10 ,  C23C14/0021 ,  C23C14/044 ,  C23C14/505

    摘要： An optical component and a coating system for coating substrates for optical components with essentially rotationally symmetric coatings, the system having a planetary-drive system (1) that has a rotating planet carrier (2) and several planets (4), each of which carries a single substrate, that corotate both with the planet carrier and with respect to the primary carrier. In one embodiment a set of stationary first masks (20) that allow controlling the radial variation in physical film thickness is arranged between a source (8) of material situated beneath the planets and the substrates. A set of second masks that mask off evaporation angles exceeding a limiting evaporation or incidence angle (β max) for every substrate also corotate with the primary carrier (2), which allows depositing coatings having a prescribed radial film-thickness distribution and a virtually constant density of the coating material over their full radial extents for relatively low, and only slightly varying, evaporation angles.

    摘要翻译： 一种用于涂覆具有基本上旋转对称涂层的光学部件的基板的光学部件和涂层系统，该系统具有行星传动系统（1），其具有旋转的行星架（2）和几个行星（4），每个行星架 单个衬底，其与行星架相关并且相对于主载体共转。 在一个实施例中，允许控制物理膜厚度的径向变化的一组固定第一掩模（20）布置在位于行星下方的材料源（8）和基板之间。 掩盖每个底物超过限制蒸发或入射角（βmax）的蒸发角度的一组第二掩模也与主载体（2）一致，这允许沉积具有规定径向膜厚度分布和实际上恒定的涂层 在完全径向范围内涂层材料的密度相对较低且仅略微变化的蒸发角度。

    Method and coating system for coating substrates for optical components
    2.
    发明授权
    Method and coating system for coating substrates for optical components 有权
    用于光学元件涂覆基板的方法和涂层系统

    公开(公告)号：US06863398B2

    公开(公告)日：2005-03-08

    申请号：US10244419

    申请日：2002-09-17

    申请人： Harry Bauer ,  Matthias Heller ,  Hans-Jochen Paul ,  Jens Ullmann ,  Patrick Scheible ,  Christoph Zaczek

    发明人： Harry Bauer ,  Matthias Heller ,  Hans-Jochen Paul ,  Jens Ullmann ,  Patrick Scheible ,  Christoph Zaczek

    IPC分类号： G02B1/11 ,  B05B13/02 ,  B05B15/04 ,  B05D1/32 ,  C03C17/245 ,  C23C14/04 ,  C23C14/50 ,  G02B1/10 ,  G02C7/02 ,  B05D5/06

    CPC分类号： G02B1/10 ,  C23C14/0021 ,  C23C14/044 ,  C23C14/505

    摘要： A method for coating substrates (10) for optical components with essentially rotationally symmetric coatings employs a coating system equipped with a planetary-drive system (1) that has a rotating planet carrier (2) and several planets (4), each of which carries a single substrate, that corotate both with the planet carrier and with respect to the primary carrier. In one embodiment a set of stationary first masks (20) that allow controlling the radial variation in physical film thickness is arranged between a source (8) of material situated beneath the planets and the substrates. A set of second masks that mask off evaporation angles exceeding a limiting evaporation or incidence angle (β max) for every substrate also corotate with the primary carrier (2), which allows depositing coatings having a prescribed radial film-thickness distribution and a virtually constant density of the coating material over their full radial extents for relatively low, and only slightly varying, evaporation angles.

    摘要翻译： 用于涂覆具有基本旋转对称涂层的光学部件的基板（10）的方法使用配备有行星传动系统（1）的涂层系统，行星传动系统（1）具有旋转的行星架（2）和几个行星（4），每个行星架 单个衬底，其与行星架相关并且相对于主载体共转。 在一个实施例中，允许控制物理膜厚度的径向变化的一组固定第一掩模（20）布置在位于行星下方的材料源（8）和基板之间。 掩盖每个底物超过限制蒸发或入射角（βmax）的蒸发角度的一组第二掩模也与主载体（2）一致，这允许沉积具有规定径向膜厚度分布和实际上恒定的涂层 在完全径向范围内涂层材料的密度相对较低且仅略微变化的蒸发角度。

    Optical component and coating system for coating substrates for optical components
    3.
    发明授权
    Optical component and coating system for coating substrates for optical components 有权
    用于光学部件涂覆基板的光学部件和涂层系统

    公开(公告)号：US07093937B2

    公开(公告)日：2006-08-22

    申请号：US11052751

    申请日：2005-02-09

    申请人： Harry Bauer ,  Matthias Heller ,  Hans-Jochen Paul ,  Jens Ullmann ,  Patrick Scheible ,  Christoph Zaczek

    发明人： Harry Bauer ,  Matthias Heller ,  Hans-Jochen Paul ,  Jens Ullmann ,  Patrick Scheible ,  Christoph Zaczek

    IPC分类号： G02C7/02

    CPC分类号： G02B1/10 ,  C23C14/0021 ,  C23C14/044 ,  C23C14/505

    摘要： An optical component and a coating system for coating substrates for optical components with essentially rotationally symmetric coatings, the system having a planetary-drive system (1) that has a rotating planet carrier (2) and several planets (4), each of which carries a single substrate, that corotate both with the planet carrier and with respect to the primary carrier. In one embodiment a set of stationary first masks (20) that allow controlling the radial variation in physical film thickness is arranged between a source (8) of material situated beneath the planets and the substrates. A set of second masks that mask off evaporation angles exceeding a limiting evaporation or incidence angle (β max) for every substrate also corotate with the primary carrier (2), which allows depositing coatings having a prescribed radial film-thickness distribution and a virtually constant density of the coating material over their full radial extents for relatively low, and only slightly varying, evaporation angles.

    摘要翻译： 一种用于涂覆具有基本上旋转对称涂层的光学部件的基板的光学部件和涂层系统，该系统具有行星传动系统（1），其具有旋转的行星架（2）和几个行星（4），每个行星架 单个衬底，其与行星架相关并且相对于主载体共转。 在一个实施例中，允许控制物理膜厚度的径向变化的一组固定第一掩模（20）布置在位于行星下方的材料源（8）和基板之间。 掩盖每个底物超过限制蒸发或入射角（βmax）的蒸发角度的一组第二掩模也与主载体（2）一致，这允许沉积具有规定径向膜厚度分布和实际上恒定的涂层 在完全径向范围内涂层材料的密度相对较低且仅略微变化的蒸发角度。

    Optical component with a curved surface and a multilayer coating
    4.
    发明申请
    Optical component with a curved surface and a multilayer coating 有权
    具有弯曲表面和多层涂层的光学部件

    公开(公告)号：US20050286827A1

    公开(公告)日：2005-12-29

    申请号：US11130173

    申请日：2005-05-17

    申请人： Patrick Scheible ,  Guenter Scheible ,  Sigrid Scheible ,  Harald Schink ,  Alexander Hirnet

    发明人： Patrick Scheible ,  Guenter Scheible ,  Sigrid Scheible ,  Harald Schink ,  Alexander Hirnet

    IPC分类号： G02B1/02 ,  G02B1/10 ,  G02B1/11 ,  G02B3/00 ,  G02B5/08 ,  G02B5/10 ,  G02F1/295

    CPC分类号： G02B5/0833 ,  G02B1/02 ,  G02B1/113 ,  G02B3/00 ,  G02B5/0891 ,  G02B5/10 ,  Y10S117/902

    摘要： An optical component has a substrate, on which at least one curved substrate surface is formed that defines an optical axis of the optical component, wherein the substrate surface is coated with a multilayer coating that is active in the ultraviolet region at a design wavelength λ0 and includes a first layer, applied to the substrate surface, made from a first dielectric material and at least one second layer, applied to the first layer, made from a second dielectric material. The substrate consists essentially of a crystal material that has an axially parallel crystal direction, running parallel to the optical axis, and edge crystal directions perpendicular to edge regions of the curved substrate surface. An angle between the axially parallel crystal direction and the edge crystal directions is at least 17°, and the first layer has an essentially untextured layer structure. An anisotropy, caused by the substrate structure, in the optical properties of the multilayer coating can thereby be avoided.

    摘要翻译： 光学部件具有基板，在该基板上形成限定光学部件的光轴的至少一个弯曲的基板表面，其中基板表面涂覆有多个涂层，该多层涂层在设计波长λ< 并且包括由第一介电材料制成的施加到基板表面的第一层和施加到由第二介电材料制成的第一层的至少一个第二层。 衬底基本上由具有平行于光轴的平行晶体方向和垂直于弯曲衬底表面的边缘区域的边缘晶体方向的晶体材料组成。 轴向平行晶体方向和边缘晶体方向之间的角度至少为17°，并且第一层具有基本上无纹理的层结构。 由此可以避免由基板结构引起的多层涂层的光学性质的各向异性。