公开(公告)号：US06510707B2

公开(公告)日：2003-01-28

申请号：US09808719

申请日：2001-03-15

申请人： Katsuhiko Kemmochi ,  Takayuki Togawa ,  Robert Mosier ,  Paul Spencer

发明人： Katsuhiko Kemmochi ,  Takayuki Togawa ,  Robert Mosier ,  Paul Spencer

IPC分类号： C03B2000

CPC分类号： C30B15/10 ,  C03B19/095

摘要： Silica crucibles containing an inner layer which is substantially pure and substantially bubble-free and methods for making such crucibles. The inner layer is also substantially stable against roughening and spot devitrification. The inner layer is formed by making a web structure which is then converted to a continuous layer, thereby minimizing or eliminating bubble formation. The inner layer is also formed using a gettering agent which getters alkaline and alkaline-earth elements while the inner layer is formed. The alkaline and alkaline-earth elements are gettered on an innermost portion of the inner layer which is later removed, leaving an inner layer with relatively few impurities. When used in a CZ-crystal growing process, the inner surface of the crucible remains smooth and substantially no bubbles grow in the inner layer.

摘要翻译： 含有基本纯净且基本上无气泡的内层的二氧化硅坩埚以及制造这种坩埚的方法。 内层对于粗糙化和斑点失透也基本稳定。 内层通过制造网状结构形成，然后将其转化为连续层，从而最小化或消除气泡形成。 内层还使用吸附碱性和碱土元素的吸气剂形成，同时内层形成。 碱性和碱土元素在内层的最内部被吸收，后来被去除，留下相对较少杂质的内层。 当用于CZ晶体生长工艺时，坩埚的内表面保持平滑，并且在内层中基本上没有气泡生长。

公开(公告)号：US06641663B2

公开(公告)日：2003-11-04

申请号：US10021631

申请日：2001-12-12

申请人： Katsuhiko Kemmochi ,  Robert Mosier ,  Paul Spencer

发明人： Katsuhiko Kemmochi ,  Robert Mosier ,  Paul Spencer

IPC分类号： C30B3500

CPC分类号： C30B35/002 ,  C03B19/095 ,  C30B15/10 ,  Y10S65/08 ,  Y10S117/90 ,  Y10T117/10

摘要： A silica glass crucible is disclosed comprising a barium-doped inner wall layer. The crucible is made by introducing into a rotating crucible mold bulk silica grain to form a bulky wall. After heating the interior of the mold to fuse the bulk silica grains, an inner silica grain, doped with barium, is introduced. The heat at least partially melts the inner silica grain, allowing it to fuse to the wall to form an inner layer. The inner layer of the crucible crystallizes when used in a CZ process, extending the operating life of the crucible.

摘要翻译： 公开了一种二氧化硅玻璃坩埚，其包括掺杂钡的内壁层。 通过将坩埚引入旋转的坩埚模块体二氧化硅颗粒中以形成较大的壁，制成坩埚。 在加热模具内部以熔化体二氧化硅颗粒之后，引入掺杂有钡的内部二氧化硅颗粒。 热量至少部分地熔化内部二氧化硅颗粒，使其与壁融合以形成内层。 当在CZ工艺中使用时，坩埚的内层结晶，延长了坩埚的使用寿命。

公开(公告)号：US07383696B2

公开(公告)日：2008-06-10

申请号：US11223158

申请日：2005-09-08

申请人： Katsuhiko Kemmochi ,  Robert Mosier ,  Yasuo Ohama

发明人： Katsuhiko Kemmochi ,  Robert Mosier ,  Yasuo Ohama

IPC分类号： C30B35/00

CPC分类号： C03B19/095 ,  C30B15/10 ,  Y02P40/57 ,  Y10S65/08 ,  Y10S117/90 ,  Y10T117/10

摘要： A silica glass crucible includes a stable, bubble-free inner layer and an opaque outer layer, both layers demonstrating reduced bubble growth during a Czochralski process. When used in the CZ process, little volume change is observed in the crucible wall, and the crucible has little influence on melt level. The present crucible is especially suited for slow silicon ingot pulling with reduced crystalline defects. The fusion process of the present invention controls the dynamic gas balance at the fusion front where formed grain is melted to dense fused silica.

摘要翻译： 石英玻璃坩埚包括稳定的无气泡的内层和不透明的外层，两层都表明在切克劳斯基工艺过程中气泡生长减少。 当在CZ工艺中使用时，在坩埚壁中观察到很小的体积变化，并且坩埚对熔体水平几乎没有影响。 本坩埚特别适用于具有减少的晶体缺陷的缓慢的硅锭拉动。 本发明的融合方法控制熔融前沿处的动态气体平衡，其中形成的晶粒被熔化成致密的熔融二氧化硅。

公开(公告)号：US20070051296A1

公开(公告)日：2007-03-08

申请号：US11223158

申请日：2005-09-08

申请人： Katsuhiko Kemmochi ,  Robert Mosier ,  Yasuo Ohama

发明人： Katsuhiko Kemmochi ,  Robert Mosier ,  Yasuo Ohama

IPC分类号： C30B15/00 ,  C30B21/06 ,  C30B27/02 ,  C30B28/10 ,  C30B30/04

CPC分类号： C03B19/095 ,  C30B15/10 ,  Y02P40/57 ,  Y10S65/08 ,  Y10S117/90 ,  Y10T117/10

摘要： A silica glass crucible includes a stable, bubble-free inner layer and an opaque outer layer, both layers demonstrating reduced bubble growth during a Czochralski process. When used in the CZ process, little volume change is observed in the crucible wall, and the crucible has little influence on melt level. The present crucible is especially suited for slow silicon ingot pulling with reduced crystalline defects. The fusion process of the present invention controls the dynamic gas balance at the fusion front where formed grain is melted to dense fused silica.

摘要翻译： 石英玻璃坩埚包括稳定的无气泡的内层和不透明的外层，两层都表明在切克劳斯基工艺过程中气泡生长减少。 当在CZ工艺中使用时，在坩埚壁中观察到很小的体积变化，并且坩埚对熔体水平几乎没有影响。 本坩埚特别适用于具有减少的晶体缺陷的缓慢的硅锭拉动。 本发明的融合方法控制熔融前沿处的动态气体平衡，其中形成的晶粒被熔化成致密的熔融二氧化硅。