Method of manufacturing semiconductor device with polysilicon film
    1.
    发明授权
    Method of manufacturing semiconductor device with polysilicon film 有权
    制造具有多晶硅膜的半导体器件的方法

    公开(公告)号:US06677222B1

    公开(公告)日:2004-01-13

    申请号:US09637276

    申请日:2000-08-11

    IPC分类号: H01L2120

    摘要: A first layer made of polysilicon is formed on the surface of an underlying substrate. The surface of the first layer is exposed to an environment which etches silicon oxide. If the surface of the first layer is covered with a silicon oxide film, the silicon oxide film is removed. An energy is supplied to the first layer, the energy allowing silicon crystal to re-grow. Solid phase growth of silicon occurs in the first layer to planarize the surface thereof. A polysilicon film having small root mean square of roughness can be formed.

    摘要翻译: 在下面的衬底的表面上形成由多晶硅制成的第一层。 第一层的表面暴露于蚀刻氧化硅的环境中。 如果第一层的表面被氧化硅膜覆盖,则去除氧化硅膜。 能量被供应到第一层,能量允许硅晶体再生长。 在第一层中发生硅的固相生长以平坦化其表面。 可以形成具有小的粗糙度均方根的多晶硅膜。

    Method for fabricating semiconductor device, and method for fabricating display device
    2.
    发明授权
    Method for fabricating semiconductor device, and method for fabricating display device 有权
    制造半导体器件的方法及其制造方法

    公开(公告)号:US08951888B2

    公开(公告)日:2015-02-10

    申请号:US13703999

    申请日:2011-05-23

    申请人: Katsuyuki Suga

    发明人: Katsuyuki Suga

    IPC分类号: H01L21/00 H01L33/00 H01L27/12

    摘要: A method for fabricating a semiconductor device includes a first step of forming, on a first substrate, a first element region in which a plurality of elements are collectively arranged, a second step of relocating the plurality of elements formed on the first substrate to a holding member in the same arrangement as in the first element region to have the plurality of elements held on the holding member, a third step of rearranging the plurality of elements held on the holding member and having the plurality of elements held on an intermediate substrate, thereby forming a second element region having a shape different from a shape of the first element region on the intermediate substrate, and a fourth step of dispersing the plurality of elements held on the intermediate substrate and adhering the plurality of elements to a second substrate.

    摘要翻译: 一种制造半导体器件的方法包括:第一步骤,在第一衬底上形成集成了多个元件的第一元件区域;第二步骤,将形成在第一衬底上的多个元件重新定位到保持 构件以与第一元件区域相同的布置方式将多个元件保持在保持构件上;第三步骤,将保持在保持构件上的多个元件重新排列并且将多个元件保持在中间基板上,由此 形成具有与中间基板上的第一元件区域的形状不同的形状的第二元件区域,以及分散保持在中间基板上的多个元件并将多个元件粘附到第二基板的第四步骤。

    METHOD FOR FABRICATING SEMICONDUCTOR DEVICE, AND METHOD FOR FABRICATING DISPLAY DEVICE
    5.
    发明申请
    METHOD FOR FABRICATING SEMICONDUCTOR DEVICE, AND METHOD FOR FABRICATING DISPLAY DEVICE 有权
    用于制造半导体器件的方法,以及用于制造显示器件的方法

    公开(公告)号:US20130089933A1

    公开(公告)日:2013-04-11

    申请号:US13703999

    申请日:2011-05-23

    申请人: Katsuyuki Suga

    发明人: Katsuyuki Suga

    IPC分类号: H01L33/00

    摘要: A method for fabricating a semiconductor device includes a first step of forming, on a first substrate, a first element region in which a plurality of elements are collectively arranged, a second step of relocating the plurality of elements formed on the first substrate to a holding member in the same arrangement as in the first element region to have the plurality of elements held on the holding member, a third step of rearranging the plurality of elements held on the holding member and having the plurality of elements held on an intermediate substrate, thereby forming a second element region having a shape different from a shape of the first element region on the intermediate substrate, and a fourth step of dispersing the plurality of elements held on the intermediate substrate and adhering the plurality of elements to a second substrate.

    摘要翻译: 一种制造半导体器件的方法包括:第一步骤,在第一衬底上形成集成了多个元件的第一元件区域;第二步骤,将形成在第一衬底上的多个元件重新定位到保持 构件以与第一元件区域相同的布置方式将多个元件保持在保持构件上;第三步骤,将保持在保持构件上的多个元件重新排列并且将多个元件保持在中间基板上,由此 形成具有与中间基板上的第一元件区域的形状不同的形状的第二元件区域,以及分散保持在中间基板上的多个元件并将多个元件粘附到第二基板的第四步骤。

    DISPLAY PANEL AND DISPLAY DEVICE USING THE SAME
    6.
    发明申请
    DISPLAY PANEL AND DISPLAY DEVICE USING THE SAME 审中-公开
    显示面板和使用该显示面板的显示设备

    公开(公告)号:US20110157113A1

    公开(公告)日:2011-06-30

    申请号:US13062077

    申请日:2009-06-04

    IPC分类号: G09G5/00

    摘要: A display panel (100) is provided which allows optimization of the respective characteristics of different semiconductor elements without incurring an increase in manufacturing cost. The display panel (100) includes: pixel TFTs (11) disposed in a display section (101); scanning driver TFTs (12) disposed in a scanning driver (102); and data driver (13) disposed in a data driver (103). A polysilicon film of the pixel TFTs (11), the scanning driver TFTs (12), and the data driver TFTs (13) is polycrystallized by irradiation of laser light so as to have a crystal growth direction that goes along a scanning direction of the laser light. The pixel TFTs (11) are disposed so that the crystal growth direction of the polysilicon film is substantially perpendicular to the directions of current paths of the pixel TFTs (11). The scanning driver TFTs (12) and the data driver TFTs (13) are so that the crystal growth direction of the polysilicon film is substantially parallel to the directions of current paths of the scanning driver TFTs (12) and the data driver TFTs (13).

    摘要翻译: 提供了显示面板(100),其允许优化不同半导体元件的相应特性,而不会导致制造成本的增加。 显示面板(100)包括:设置在显示部(101)中的像素TFT(11); 设置在扫描驱动器(102)中的扫描驱动TFT(12); 和数据驱动器(13),其设置在数据驱动器(103)中。 像素TFT(11),扫描驱动器TFT(12)和数据驱动器TFT(13)的多晶硅膜通过激光的照射被多晶化,以具有沿着扫描方向的晶体生长方向 激光灯。 像素TFT(11)被布置成使得多晶硅膜的晶体生长方向基本上垂直于像素TFT(11)的电流路径的方向。 扫描驱动器TFT(12)和数据驱动器TFT(13)使得多晶硅膜的晶体生长方向基本上平行于扫描驱动TFT(12)和数据驱动器TFT(13)的电流路径的方向 )。