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    SINTERED OBJECTS AND PROCESSES FOR PRODUCING SAME
    1.
    发明申请
    SINTERED OBJECTS AND PROCESSES FOR PRODUCING SAME 有权
    烧结对象及其生产工艺

    公开(公告)号：US20120298910A1

    公开(公告)日：2012-11-29

    申请号：US13577585

    申请日：2011-02-08

    申请人： Katzuto Ando ,  Shintaro Hayashi ,  Hirokuni Kugimoto ,  Masayuki Ishizuka

    发明人： Katzuto Ando ,  Shintaro Hayashi ,  Hirokuni Kugimoto ,  Masayuki Ishizuka

    IPC分类号： C09K5/00 ,  C04B35/64 ,  B82Y99/00 ,  B82Y30/00

    CPC分类号： C04B35/505 ,  B82Y30/00 ,  C04B35/6263 ,  C04B35/62635 ,  C04B35/62695 ,  C04B35/64 ,  C04B35/645 ,  C04B35/803 ,  C04B2235/405 ,  C04B2235/5248 ,  C04B2235/526 ,  C04B2235/5264 ,  C04B2235/5268 ,  C04B2235/5288 ,  C04B2235/5436 ,  C04B2235/5445 ,  C04B2235/77 ,  C04B2235/85 ,  C04B2235/9607 ,  C04B2235/9692 ,  C09K5/00 ,  H01J37/32477 ,  H01J37/3255 ,  H01J37/32642

    摘要： Provided is a sintered object which has excellent resistance to corrosion by corrosive halogen gases and by the plasmas thereof and has excellent thermal conductivity and excellent electrical conductivity. Even when applied to members for use in various vacuum process devices, the sintered object has few limitations on design. The sintered object is usable in a wide range of applications, and is highly versatile. Also provided is a method for producing the sintered object. Furthermore provided is a high-frequency transmission material which has direct-current electrical conductivity for reducing fluctuations in plasma potential and has capacitive properties that enable the material to transmit high-frequency power necessary for plasma excitation, and which has no fear of causing contamination of a sample with a metal and has resistance to corrosion by plasmas. Still further provided are: a sintered object which has excellent resistance to corrosion by corrosive halogen gases and by the plasmas thereof and has no frequency dependence when a high-frequency voltage is applied thereto and with which it is possible to actualize the stability of a plasma; and a method for producing the sintered object.

    摘要翻译： 本发明提供一种烧结体，其具有优异的抗腐蚀性卤素气体及其等离子体的耐腐蚀性，并且具有优异的导热性和优异的导电性。 即使应用于各种真空处理装置中使用的构件，烧结体的设计也受到限制。 该烧结体可用于广泛的应用，并且具有高度的通用性。 还提供了一种烧结体的制造方法。 此外还提供了一种高频透射材料，其具有用于减小等离子体电位波动的直流电导率，并且具有使材料能够传输等离子体激发所需的高频功率的电容性质，并且不会引起污染 具有金属的样品并具有耐等离子体腐蚀性。 另外提供的是：通过腐蚀性卤素气体及其等离子体具有优异的耐腐蚀性且在施加高频电压时没有频率依赖性并且可以实现等离子体的稳定性的烧结体 ; 以及烧结体的制造方法。