公开(公告)号：US6121062A

公开(公告)日：2000-09-19

申请号：US606503

申请日：1996-02-23

申请人： Kazuaki Karasawa ,  Teru Nakanishi ,  Kaoru Hashimoto ,  Toshihiro Sakamura

发明人： Kazuaki Karasawa ,  Teru Nakanishi ,  Kaoru Hashimoto ,  Toshihiro Sakamura

IPC分类号： H01L21/60 ,  H01L21/66 ,  H01L23/485 ,  H05K3/34 ,  G01R31/26 ,  H01L21/44 ,  H01L21/48

CPC分类号： H01L24/13 ,  H01L24/11 ,  H01L24/81 ,  H01L22/12 ,  H01L2224/13099 ,  H01L2224/13109 ,  H01L2224/13111 ,  H01L2224/81136 ,  H01L2224/81801 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/0105 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/12042 ,  H01L2924/12043 ,  H05K3/3431

摘要： A bump forming step forms a predetermined number of bumps on at least a first one of two components. A height measuring step measures the heights of the predetermined number of bumps. A fixing step fixes the two components together by means of the bumps with the distance between the two components determined, using the result of the height measurement, so that all of the predetermined number of bumps should come in contact with the second one of the two components. An oxide-film removing step removes the oxide film formed on the predetermined number of bumps after the height measuring step and before the fixing step. The fixing step comprises a press fixing step for press fixing the two components at the above distance by means of a press fixing method, and a melting step for causing the bumps to melt in a predetermined atmosphere so that the bumps firmly join the two components together. The distance is established by at least one of the press fixing step and the melting step.

摘要翻译： 凸起形成步骤在两个部件中的至少第一个部件上形成预定数量的凸块。 高度测量步骤测量预定数量的凸块的高度。 固定步骤通过使用高度测量的结果确定的两个部件之间的距离通过凸块将两个部件固定在一起，使得所有预定数量的凸块应该与两个部件中的第二个部件接触 组件。 氧化膜去除步骤在高度测量步骤之后和定影步骤之前去除在预定数量的凸块上形成的氧化膜。 定影步骤包括用于通过压力定影方法将两个部件压在上述距离处的压力固定步骤，以及用于使凸起在预定的气氛中熔化的熔化步骤，使得凸块牢固地将两个部件连接在一起 。 通过压力固定步骤和熔融步骤中的至少一个来建立距离。