公开(公告)号：US06506544B1

公开(公告)日：2003-01-14

申请号：US09430179

申请日：1999-10-29

申请人： Kazuhiko Hori ,  Katsuya Machino ,  Manabu Toguchi ,  Masahiro Iguchi

发明人： Kazuhiko Hori ,  Katsuya Machino ,  Manabu Toguchi ,  Masahiro Iguchi

IPC分类号： G03C500

CPC分类号： G03F7/70466 ,  G03F7/70433 ,  G03F7/70791

摘要： In the exposure method of the invention, a first pattern and a second pattern are joined and exposed on a substrate using a mask having a pattern. The pattern on the mask has a common pattern for the first pattern and the second pattern, and a non-common pattern different from the common pattern and formed continuously with the common pattern. The common pattern and at least a part of the non-common pattern are selected to effect the joining and exposing. According to this method, the number of masks required for exposure processing accompanying screen synthesis can be reduced.

摘要翻译： 在本发明的曝光方法中，使用具有图案的掩模将第一图案和第二图案接合并暴露在基板上。 掩模上的图案具有用于第一图案和第二图案的共同图案，以及与公共图案不同且与公共图案连续形成的非共同图案。 选择共同图案和至少一部分非共同图案以实现接合和曝光。 根据该方法，可以减少伴随画面合成的曝光处理所需的掩模的数量。

公开(公告)号：US06873400B2

公开(公告)日：2005-03-29

申请号：US09772907

申请日：2001-01-31

申请人： Masaichi Murakami ,  Masaki Kato ,  Katsuya Machino ,  Manabu Toguchi

发明人： Masaichi Murakami ,  Masaki Kato ,  Katsuya Machino ,  Manabu Toguchi

IPC分类号： H01L21/027 ,  G03F7/20 ,  G03B27/42 ,  G03B27/54 ,  G03B27/72

CPC分类号： G03F7/70066 ,  G03F7/70275 ,  G03F7/70358 ,  G03F7/70475 ,  G03F7/70791

摘要： It is an object of the present invention to smoothly join divided patterns adjacent to each other in a synchronous moving direction when a mask and a substrate are moved in synchronization, and the divided patterns are joined and picture-synthesized on the substrate. According to the invention, when the mask and the substrate are moved in synchronization with respect to irradiation with an exposing light, the divided patterns of the mask are projected on the substrate, and a plurality of divided patterns adjacent on the substrate are joined and exposed, the divided patterns adjacent to each other in the synchronous moving direction partially overlap each other.

摘要翻译： 本发明的一个目的是在掩模和衬底同步移动的同时沿同步移动方向平滑地连接彼此相邻的分割图案，并且分割的图案在衬底上被接合和图像合成。 根据本发明，当掩模和衬底相对于曝光光的照射同步地移动时，掩模的划分图案被投射在衬底上，并且在衬底上相邻的多个分割图案被接合并暴露 在同步移动方向上彼此相邻的分割图案部分地重叠。

公开(公告)号：US5716458A

公开(公告)日：1998-02-10

申请号：US597106

申请日：1996-02-06

申请人： Katsuya Machino

发明人： Katsuya Machino

IPC分类号： B08B3/08 ,  C23G5/04 ,  F26B7/00 ,  G03F1/82 ,  H01L21/00 ,  H01L21/304 ,  H05K3/26 ,  B08B3/04 ,  B08B7/00

CPC分类号： H01L21/67057 ,  B08B3/08 ,  C23G5/04 ,  H01L21/67046 ,  H01L21/67051 ,  H05K3/26

摘要： An azeotropic liquid mixture comprising a first component (isopropyl alcohol) and a second component (water) is charged in the washing tank. A heater and a liquid temperature sensor are used to heat the azeotropic liquid mixture in the washing tank to the azeotropic point of the mixture so as to generate a vapor phase mixture forming a vapor layer. A master mask, which is an article to be cleaned, is exposed to the vapor phase mixture in the vapor layer for washing. The vapor phase mixture used for washing is condensed into a condensate, which is removed out of the washing tank through a condensate pan. The master mask is pulled up out of the vapor layer for water-removing and drying.

摘要翻译： 将包含第一组分（异丙醇）和第二组分（水）的共沸液体混合物装入洗涤槽中。 使用加热器和液体温度传感器将洗涤槽中的共沸混合物加热到混合物的共沸点，以产生形成蒸气层的气相混合物。 作为待清洁的制品的主掩模暴露于蒸气层中的气相混合物以进行洗涤。 用于洗涤的气相混合物被冷凝成冷凝物，冷凝物通过冷凝盘从洗涤槽中除去。 将主面罩从蒸气层中拉出以进行脱水和干燥。