公开(公告)号：US07499178B2

公开(公告)日：2009-03-03

申请号：US11819675

申请日：2007-06-28

申请人： Kazuhiko Kawasaki ,  Yoshimasa Suzuki ,  Reiya Ootao

发明人： Kazuhiko Kawasaki ,  Yoshimasa Suzuki ,  Reiya Ootao

IPC分类号： G01B9/02

CPC分类号： G01B9/02019 ,  G01B9/02022 ,  G01B9/02028 ,  G01B9/02057 ,  G01B2290/45 ,  G01B2290/70

摘要： An oblique incidence interferometer is provided for applying a light at a certain angle from the normal to a measurement surface of a target to be measured and measuring a light reflected from the target. A beam splitter element and beam synthesizer element splits the light from a light source into a measurement light to be applied to the target and a reference light serving as the measurement reference. It also orthogonalizes the polarization directions of the measurement light reflected from the target and the reference light and synthesizes the lights. A three-way split prism splits the synthesized light into a plurality of split lights. Imaging units are provided to capture a plurality of interference fringe images formed in accordance with the plurality of split lights. A ¼-waveplate is provided on either one of an entry side and an exit side of the three-way split prism. Polarizers are provided on imaging surfaces of the imaging units.

摘要翻译： 提供倾斜入射干涉仪，用于以与被测定目标的测量表面垂直的一定角度施加光并测量从目标反射的光。 分束器元件和光束合成器元件将来自光源的光分解成要施加到目标的测量光和用作测量基准的参考光。 它还使从目标反射的测量光和参考光的偏振方向正交化，并合成光。 三路分离棱镜将合成的光分解为多个分光。 提供成像单元以捕获根据多个分裂光形成的多个干涉条纹图像。 在三通分割棱镜的入口侧和出口侧的任一个上设置1/4波片。 在成像单元的成像表面上提供偏振器。

公开(公告)号：US20080002212A1

公开(公告)日：2008-01-03

申请号：US11819675

申请日：2007-06-28

申请人： Kazuhiko Kawasaki ,  Yoshimasa Suzuki ,  Reiya Ootao

发明人： Kazuhiko Kawasaki ,  Yoshimasa Suzuki ,  Reiya Ootao

IPC分类号： G01B11/02

CPC分类号： G01B9/02019 ,  G01B9/02022 ,  G01B9/02028 ,  G01B9/02057 ,  G01B2290/45 ,  G01B2290/70

摘要： An oblique incidence interferometer is provided for applying a light at a certain angle from the normal to a measurement surface of a target to be measured and measuring a light reflected from the target. A beam splitter element and beam synthesizer element splits the light from a light source into a measurement light to be applied to the target and a reference light serving as the measurement reference. It also orthogonalizes the polarization directions of the measurement light reflected from the target and the reference light and synthesizes the lights. A three-way split prism splits the synthesized light into a plurality of split lights. Imaging units are provided to capture a plurality of interference fringe images formed in accordance with the plurality of split lights. A ¼-waveplate is provided on either one of an entry side and an exit side of the three-way split prism. Polarizers are provided on imaging surfaces of the imaging units.

摘要翻译： 提供倾斜入射干涉仪，用于以与被测定目标的测量表面垂直的一定角度施加光并测量从目标反射的光。 分束器元件和光束合成器元件将来自光源的光分解成要施加到目标的测量光和用作测量基准的参考光。 它还使从目标反射的测量光和参考光的偏振方向正交化，并合成光。 三路分离棱镜将合成的光分解为多个分光。 提供成像单元以捕获根据多个分裂光形成的多个干涉条纹图像。 在三通分割棱镜的入口侧和出口侧的任一个上设置1/4波片。 在成像单元的成像表面上提供偏振器。

公开(公告)号：US20100014098A1

公开(公告)日：2010-01-21

申请号：US12458592

申请日：2009-07-16

申请人： Yoshimasa Suzuki ,  Reiya Ootao

发明人： Yoshimasa Suzuki ,  Reiya Ootao

IPC分类号： G01B9/02

CPC分类号： G01B9/02069 ,  G01B9/02022 ,  G01B11/2441 ,  G01B2290/35

摘要： An oblique incidence interferometer enlarges a measurement range without increasing a size of the apparatus. The oblique incidence interferometer includes a light source for emitting coherent light in an oblique direction to a measurement object; a light collimating unit for collimating the coherent light from the light source; a beam dividing unit for dividing the collimated beam from the light collimating unit into a measurement beam and a reference beam; a beam combining unit for combining the measurement beam reflected by the measurement object with the reference beam; and an image pickup device for picking up images of interference fringes representing a surface shape of the measurement object. The oblique incidence interferometer also includes a measurement range expanding device for enlarging a light measurement range on the measurement object in a lateral direction of the measurement range.

摘要翻译： 倾斜入射干涉仪放大测量范围而不增加设备的尺寸。 倾斜入射干涉仪包括用于沿与测量对象倾斜的方向发射相干光的光源; 光准直单元，用于准直来自光源的相干光; 光束分割单元，用于将来自光准直单元的准直光束分成测量光束和参考光束; 光束组合单元，用于将由测量对象反射的测量光束与参考光束组合; 以及用于拾取表示测量对象的表面形状的干涉条纹的图像的图像拾取装置。 斜入射干涉仪还包括用于在测量范围的横向上放大测量对象上的光测量范围的测量范围扩展装置。

公开(公告)号：US20110032536A1

公开(公告)日：2011-02-10

申请号：US12850189

申请日：2010-08-04

申请人： Yutaka Kuriyama ,  Reiya Ootao

发明人： Yutaka Kuriyama ,  Reiya Ootao

IPC分类号： G01B11/02

CPC分类号： G01B9/02081 ,  G01B9/02022 ,  G01B2290/45 ,  G01B2290/70

摘要： A grazing incidence interferometer includes: a beam splitting section configured to split a beam from a beam source section into a measuring beam emergent to a measurement surface and a reference beam serving as a measurement reference, and configured to cause the measuring beam to emerge obliquely to the measurement surface; a beam combining part configured to combine the reference beam and the measuring beam reflected at the measurement surface, to obtain a combined beam; a detecting section configured to detect a profile of the measurement surface based on an interference fringe formed by the combined beam; and an image inverting part configured to invert an orientation of a wave front of the measuring beam or the reference beam, the image inverting part being provided in an optical path of the measuring beam or the reference beam leading from the beam splitting section to the beam combining section.

摘要翻译： 放射入射干涉仪包括：分束部分，被配置为将来自光束源部分的光束分裂成测量光束到测量表面;以及参考光束，用作测量参考，并且被配置为使得测量光束倾斜地出射到 测量面; 光束组合部，被配置为组合所述参考光束和在所述测量表面处反射的所述测量光束，以获得组合光束; 检测部，被配置为基于由所述组合光束形成的干涉条纹来检测所述测量表面的轮廓; 以及图像反转部，被配置为反转所述测量光束或所述参考光束的波前的取向，所述图像反转部设置在所述测量光束或从所述分束部分引导到所述光束的参考光束的光路中 组合部分。

公开(公告)号：US08913250B2

公开(公告)日：2014-12-16

申请号：US13525748

申请日：2012-06-18

申请人： Reiya Ootao ,  Yutaka Kuriyama

发明人： Reiya Ootao ,  Yutaka Kuriyama

IPC分类号： G01B11/02 ,  G01B9/02 ,  G01B11/24

CPC分类号： G01B9/02022 ,  G01B9/02061 ,  G01B9/02071 ,  G01B9/02076 ,  G01B11/2441 ,  G01B2290/60

摘要： A grazing incidence interferometer includes a light source, a light beam divider configured to divide original light coming from the light source, an illuminator configured to apply measurement light to a measurement subject, a light beam combining module configured to combine the measurement light reflected from the measurement subject with reference light, and a photodetector configure to detect a combined light beam. The grazing incidence interferometer includes an interferometer main body, a stage configured to hold the measurement subject, a moving mechanism capable of moving the interferometer main body along the measurement subject, and an auxiliary reflector disposed on an extension of an axis of movement of the interferometer main body, an auxiliary light beam separator configured to separate auxiliary light from the original light and to apply the auxiliary light to the auxiliary reflector, and an auxiliary photodetector configured to detect the auxiliary light reflected by the auxiliary reflector.

摘要翻译： 放射入射干涉仪包括光源，被配置为分离来自光源的原始光的光束分配器，被配置为将测量光施加到测量对象的照明器;光束组合模块，被配置为将从所述光源反射的测量光 具有参考光的测量对象，以及用于检测组合光束的光电检测器。 掠入射干涉仪包括干涉仪主体，被配置为保持测量对象的台，沿测量对象移动干涉仪主体的移动机构，以及设置在干涉仪的移动轴的延伸部上的辅助反射器 主体，辅助光束分离器，被配置为将辅助光与原始光分离并将辅助光施加到辅助反射器;以及辅助光电检测器，被配置为检测由辅助反射器反射的辅助光。

公开(公告)号：US08441650B2

公开(公告)日：2013-05-14

申请号：US12850189

申请日：2010-08-04

申请人： Yutaka Kuriyama ,  Reiya Ootao

发明人： Yutaka Kuriyama ,  Reiya Ootao

IPC分类号： G01B11/02

CPC分类号： G01B9/02081 ,  G01B9/02022 ,  G01B2290/45 ,  G01B2290/70

摘要： A grazing incidence interferometer includes: a beam splitting section configured to split a beam from a beam source section into a measuring beam emergent to a measurement surface and a reference beam serving as a measurement reference, and configured to cause the measuring beam to emerge obliquely to the measurement surface; a beam combining part configured to combine the reference beam and the measuring beam reflected at the measurement surface, to obtain a combined beam; a detecting section configured to detect a profile of the measurement surface based on an interference fringe formed by the combined beam; and an image inverting part configured to invert an orientation of a wave front of the measuring beam or the reference beam, the image inverting part being provided in an optical path of the measuring beam or the reference beam leading from the beam splitting section to the beam combining section.

摘要翻译： 放射入射干涉仪包括：分束部分，被配置为将来自光束源部分的光束分裂成测量光束到测量表面;以及参考光束，用作测量参考，并且被配置为使得测量光束倾斜地出射到 测量面; 光束组合部，被配置为组合所述参考光束和在所述测量表面处反射的所述测量光束，以获得组合光束; 检测部，被配置为基于由所述组合光束形成的干涉条纹来检测所述测量表面的轮廓; 以及图像反转部，被配置为反转所述测量光束或所述参考光束的波前的取向，所述图像反转部设置在所述测量光束或从所述分束部分引导到所述光束的参考光束的光路中 组合部分。