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公开(公告)号：US07499178B2
公开(公告)日：2009-03-03
申请号：US11819675
申请日：2007-06-28
申请人： Kazuhiko Kawasaki , Yoshimasa Suzuki , Reiya Ootao
发明人： Kazuhiko Kawasaki , Yoshimasa Suzuki , Reiya Ootao
IPC分类号： G01B9/02
CPC分类号： G01B9/02019 , G01B9/02022 , G01B9/02028 , G01B9/02057 , G01B2290/45 , G01B2290/70
摘要： An oblique incidence interferometer is provided for applying a light at a certain angle from the normal to a measurement surface of a target to be measured and measuring a light reflected from the target. A beam splitter element and beam synthesizer element splits the light from a light source into a measurement light to be applied to the target and a reference light serving as the measurement reference. It also orthogonalizes the polarization directions of the measurement light reflected from the target and the reference light and synthesizes the lights. A three-way split prism splits the synthesized light into a plurality of split lights. Imaging units are provided to capture a plurality of interference fringe images formed in accordance with the plurality of split lights. A ¼-waveplate is provided on either one of an entry side and an exit side of the three-way split prism. Polarizers are provided on imaging surfaces of the imaging units.
摘要翻译： 提供倾斜入射干涉仪，用于以与被测定目标的测量表面垂直的一定角度施加光并测量从目标反射的光。 分束器元件和光束合成器元件将来自光源的光分解成要施加到目标的测量光和用作测量基准的参考光。 它还使从目标反射的测量光和参考光的偏振方向正交化，并合成光。 三路分离棱镜将合成的光分解为多个分光。 提供成像单元以捕获根据多个分裂光形成的多个干涉条纹图像。 在三通分割棱镜的入口侧和出口侧的任一个上设置1/4波片。 在成像单元的成像表面上提供偏振器。
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公开(公告)号：US20080002212A1
公开(公告)日：2008-01-03
申请号：US11819675
申请日：2007-06-28
申请人： Kazuhiko Kawasaki , Yoshimasa Suzuki , Reiya Ootao
发明人： Kazuhiko Kawasaki , Yoshimasa Suzuki , Reiya Ootao
IPC分类号： G01B11/02
CPC分类号： G01B9/02019 , G01B9/02022 , G01B9/02028 , G01B9/02057 , G01B2290/45 , G01B2290/70
摘要： An oblique incidence interferometer is provided for applying a light at a certain angle from the normal to a measurement surface of a target to be measured and measuring a light reflected from the target. A beam splitter element and beam synthesizer element splits the light from a light source into a measurement light to be applied to the target and a reference light serving as the measurement reference. It also orthogonalizes the polarization directions of the measurement light reflected from the target and the reference light and synthesizes the lights. A three-way split prism splits the synthesized light into a plurality of split lights. Imaging units are provided to capture a plurality of interference fringe images formed in accordance with the plurality of split lights. A ¼-waveplate is provided on either one of an entry side and an exit side of the three-way split prism. Polarizers are provided on imaging surfaces of the imaging units.
摘要翻译： 提供倾斜入射干涉仪，用于以与被测定目标的测量表面垂直的一定角度施加光并测量从目标反射的光。 分束器元件和光束合成器元件将来自光源的光分解成要施加到目标的测量光和用作测量基准的参考光。 它还使从目标反射的测量光和参考光的偏振方向正交化，并合成光。 三路分离棱镜将合成的光分解为多个分光。 提供成像单元以捕获根据多个分裂光形成的多个干涉条纹图像。 在三通分割棱镜的入口侧和出口侧的任一个上设置1/4波片。 在成像单元的成像表面上提供偏振器。
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公开(公告)号：US20100014098A1
公开(公告)日：2010-01-21
申请号：US12458592
申请日：2009-07-16
申请人： Yoshimasa Suzuki , Reiya Ootao
发明人： Yoshimasa Suzuki , Reiya Ootao
IPC分类号： G01B9/02
CPC分类号： G01B9/02069 , G01B9/02022 , G01B11/2441 , G01B2290/35
摘要： An oblique incidence interferometer enlarges a measurement range without increasing a size of the apparatus. The oblique incidence interferometer includes a light source for emitting coherent light in an oblique direction to a measurement object; a light collimating unit for collimating the coherent light from the light source; a beam dividing unit for dividing the collimated beam from the light collimating unit into a measurement beam and a reference beam; a beam combining unit for combining the measurement beam reflected by the measurement object with the reference beam; and an image pickup device for picking up images of interference fringes representing a surface shape of the measurement object. The oblique incidence interferometer also includes a measurement range expanding device for enlarging a light measurement range on the measurement object in a lateral direction of the measurement range.
摘要翻译： 倾斜入射干涉仪放大测量范围而不增加设备的尺寸。 倾斜入射干涉仪包括用于沿与测量对象倾斜的方向发射相干光的光源; 光准直单元，用于准直来自光源的相干光; 光束分割单元，用于将来自光准直单元的准直光束分成测量光束和参考光束; 光束组合单元，用于将由测量对象反射的测量光束与参考光束组合; 以及用于拾取表示测量对象的表面形状的干涉条纹的图像的图像拾取装置。 斜入射干涉仪还包括用于在测量范围的横向上放大测量对象上的光测量范围的测量范围扩展装置。
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公开(公告)号：US07681439B2
公开(公告)日：2010-03-23
申请号：US11892365
申请日：2007-08-22
IPC分类号： G01B21/30
CPC分类号： G01Q20/02
摘要： A measuring apparatus comprising: a reference member held in fixed position and orientation with respect to a workpiece during measurement; a stylus for scanning a surface of the workpiece while being displaced upward and downward in accordance with unevenness of the surface of the workpiece; a displacement gauge for measuring a displacement of a specific part of the stylus relative to the reference member; and a scanner for causing the stylus to scan the workpiece along the surface; wherein the fixed position and orientation of the reference member with respect to the workpiece are not changed even during the operation of the scanner; the up-and-down displacement of the specific part of the stylus is measured relative to the reference member; a fine shape of the workpiece is detected in accordance with the measured displacement of the specific part of the stylus.
摘要翻译： 一种测量装置，包括：在测量期间相对于工件保持固定位置和取向的参考构件; 用于根据工件表面的不平坦度向上和向下移动来扫描工件的表面的触针; 用于测量触针的特定部分相对于参考构件的位移的位移计; 以及用于使所述触针沿着所述表面扫描所述工件的扫描仪; 其中，即使在扫描仪的操作期间，参考构件相对于工件的固定位置和取向也不改变; 相对于参考构件测量触针的特定部分的上下移位; 根据测量头的特定部位的位移来检测工件的精细形状。
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公开(公告)号：US07397570B2
公开(公告)日：2008-07-08
申请号：US11433485
申请日：2006-05-15
IPC分类号： G01B11/02
CPC分类号： G01B9/02048 , G01B9/02004 , G01B9/02081 , G01B2290/45 , G01B2290/70
摘要： A wavelength-variable light source is configured to emit a light with a wavelength (λ), which is variable within a scan width (Δλ). An interferometer has a coherent length (ΔL), which is determinable from (Δλ) and (λ). A controller determines an appropriate magnitude of the scan width (Δλ) while a CCD camera captures a fringe image in an exposure time (Te), which is set longer than a time for wavelength scanning.
摘要翻译： 波长可变光源被配置为发射波长（λ）的光，其在扫描宽度（Deltalambda）内是可变的。 干涉仪具有相干长度（DeltaL），其可以从（Deltalambda）和（λ）确定。 控制器确定扫描宽度（Deltalambda）的合适幅度，而CCD照相机在曝光时间（Te）中拍摄条纹图像，曝光时间（Te）设置为比波长扫描时间长。
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公开(公告)号：US08108942B2
公开(公告)日：2012-01-31
申请号：US12699321
申请日：2010-02-03
CPC分类号： G01Q20/02
摘要： A probe microscope includes a cantilever having a probe, a displacement detecting optical system, an observation optical system, an objective lens, and a parallel glass. The displacement detecting optical system includes a first light source and a light detecting element. The observation optical system includes a second light source, an image forming lens, and a camera. The objective lens is disposed between the cantilever and the first and second light sources, and is commonly used by the displacement detecting optical system and the observation optical system. The parallel glass is capable of being inserted and retracted freely between the cantilever and the objective lens to adjust a focal point of the objective lens.
摘要翻译： 探针显微镜包括具有探针的悬臂，位移检测光学系统，观察光学系统，物镜和平行玻璃。 位移检测光学系统包括第一光源和光检测元件。 观察光学系统包括第二光源，图像形成透镜和照相机。 物镜设置在悬臂与第一和第二光源之间，并且通常由位移检测光学系统和观察光学系统使用。 平行玻璃能够在悬臂和物镜之间自由地插入和缩回以调节物镜的焦点。
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公开(公告)号：US20060262320A1
公开(公告)日：2006-11-23
申请号：US11433485
申请日：2006-05-15
申请人： Kazuhiko Kawasaki , Yoshimasa Suzuki , David Sesko
发明人： Kazuhiko Kawasaki , Yoshimasa Suzuki , David Sesko
IPC分类号： G01B9/02
CPC分类号： G01B9/02048 , G01B9/02004 , G01B9/02081 , G01B2290/45 , G01B2290/70
摘要： A wavelength-variable light source is configured to emit a light with a wavelength (λ), which is variable within a scan width (Δλ). An interferometer has a coherent length (ΔL), which is determinable from (Δλ) and (λ). A controller determines an appropriate magnitude of the scan width (Δλ) while a CCD camera captures a fringe image in an exposure time (Te), which is set longer than a time for wavelength scanning.
摘要翻译： 波长可变光源被配置为发射波长（λ）的光，其在扫描宽度（Deltalambda）内是可变的。 干涉仪具有相干长度（DeltaL），其可以从（Deltalambda）和（λ）确定。 控制器确定扫描宽度（Deltalambda）的合适幅度，而CCD照相机在曝光时间（Te）中拍摄条纹图像，曝光时间（Te）设置为比波长扫描时间长。
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公开(公告)号：US08314940B2
公开(公告)日：2012-11-20
申请号：US12831651
申请日：2010-07-07
IPC分类号： G01B11/24
CPC分类号： G01B9/02027 , G01B9/02007 , G01B2290/45 , G01Q20/02
摘要： A probe microscope includes a cantilever having a probe for contact with an object, first and second displacement detection optical systems, and an object lens. The first displacement detection optical system includes a first light source and a first displacement detecting section that detects displacement of the cantilever. The second displacement detection optical system includes a second light source and a second displacement detecting section that detects displacement of the object. The object lens is provided between the cantilever and the first light source and between the cantilever and the second light source. The object lens has a focal position for the light that is emitted from the first light source and has a first wavelength at the position of the cantilever and has a focal position for the light that is emitted from the second light source and has a second wavelength at the position of the object.
摘要翻译： 探针显微镜包括具有用于与物体接触的探针的悬臂，第一和第二位移检测光学系统以及物镜。 第一位移检测光学系统包括检测悬臂的位移的第一光源和第一位移检测部。 第二位移检测光学系统包括第二光源和检测物体的位移的第二位移检测部。 物镜设置在悬臂与第一光源之间以及悬臂与第二光源之间。 物镜具有用于从第一光源发出的光的焦点位置，并且在悬臂的位置处具有第一波长，并且具有用于从第二光源发射的光的焦点位置，并具有第二波长 在对象的位置。
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公开(公告)号：US20090021747A1
公开(公告)日：2009-01-22
申请号：US12219285
申请日：2008-07-18
IPC分类号： G12B21/08
CPC分类号： G01Q10/065 , G01Q20/02 , G01Q60/32
摘要： A shape measuring apparatus includes a probe for scanning across a surface to be measured, while vibrating up and down; a minute-vibration generation section for vibrating the probe up and down; a vertical movement control section for moving the probe up and down to keep a constant contact force or a constant distance between the surface to be measured and the probe; a scanning section for scanning the surface to be measured with the probe; a displacement sensor for measuring the vertical displacement of the probe and outputting a probe displacement signal; and a signal processing section for obtaining information about the contact force or the distance between the surface to be measured and the probe from a high-frequency component of the probe displacement signal, and for obtaining information about profile of the surface to be measured from a low-frequency component of the signal obtained when the surface to be measured is scanned such that the distance or the contact force is kept constant.
摘要翻译： 一种形状测量装置，包括用于在被测量表面上扫描同时上下振动的探针; 微振动发生部，用于上下振动探头; 垂直运动控制部分，用于上下移动探头以保持测量表面与探头之间的恒定的接触力或恒定的距离; 扫描部，用于使用所述探针扫描待测量的表面; 用于测量探头的垂直位移并输出探针位移信号的位移传感器; 以及信号处理部分，用于从探头位移信号的高频分量获得关于接触力或待测量表面与探针之间的距离的信息，并且用于从探测位移信号的高频分量获得关于待测量表面的轮廓的信息 扫描要测量的表面时获得的信号的低频分量，使得距离或接触力保持恒定。
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公开(公告)号：US20060250618A1
公开(公告)日：2006-11-09
申请号：US11411809
申请日：2006-04-27
申请人： Kazuhiko Kawasaki , Yoshimasa Suzuki , David Sesko
发明人： Kazuhiko Kawasaki , Yoshimasa Suzuki , David Sesko
IPC分类号： G01B11/02
CPC分类号： G01B9/0201 , G01B9/02004 , G01B9/02072 , G01B9/0209 , G01B11/2441 , G01B2290/45 , G01B2290/70
摘要： An interferometer comprises a wavelength-variable light source. A reference light and a measurement light are synthesized, and the synthesized light is split into a plurality of split lights. A certain phase difference is provided between the split lights through phase shifting optical members. A plurality of interference fringe images formed by the phase-shifted split lights are captured at an imaging unit. Biases, amplitudes and the amounts of phase shift of the interference fringes formed by the plurality of split lights are calculated, based on interference fringe intensities of the imaged interference fringes, which are obtained by disposing a calibrating substrate instead of the measuring object varying the wavelength of the emitted light to plural values, and operating the imaging unit to capture a plurality of images of interference fringes obtained by the split lights.
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